Low noise ultrathin freestanding membranes composed of atomically-thin 2D materials

Patent metadata

Field	Value
Publication number	US-10550487-B2
Application number	US-201515552373-A
Country	US
Kind code	B2
Filing date	Nov 25, 2015
Priority date	Feb 20, 2015
Publication date	Feb 4, 2020
Grant date	Feb 4, 2020

Abstract

The invention provides methods for direct growth of low noise, atomically thin freestanding membranes of two-dimensional monocrystalline or polycrystalline materials, such as transition metal chalcogenides including molybdenum disulfide. The freestanding membranes are directly grown over an aperture by reacting two precursors in a chemical vapor deposition process carried out at atmospheric pressure. Membrane growth is preferentially over apertures in a thin sheet of solid state material. The resulting membranes are one or a few atomic layers thick and essentially free of defects. The membranes are useful for sequencing of biopolymers through nanopores.

First claim

What is claimed is:

1. A method of fabricating an ultrathin membrane comprising a two-dimensional material, the membrane spanning an aperture in a sheet of solid state material and attached to a surface of the sheet in an area surrounding the aperture, the method comprising the step of performing chemical vapor deposition of a first membrane precursor disposed on a first side of a sheet of solid state material comprising an aperture and a second membrane precursor disposed on a second side of the sheet, opposite the first side, whereby the first and second precursors are heated to promote sublimation prior to said deposition and said ultrathin membrane is formed from the first and second precursors across the aperture and contacting a surface of the sheet of solid state material in an area surrounding the aperture.

2. The method of claim 1 , wherein the first membrane precursor comprises a metal selected from the group consisting of Ga, In, Hf, Mo, Nb, Ni, Pd, Pt, Re, Ta, Ti, W, and Zr.

3. The method of claim 2 , wherein the first membrane precursor is an oxide of said metal.

4. The method of claim 3 , wherein atoms of the second membrane precursor displace oxygen atoms of the oxide and form a two-dimensional material at the aperture.

5. The method of claim 1 , wherein the second membrane precursor comprises S, Se, or Te.

6. The method of claim 1 , wherein the two-dimensional material formed is selected from the group consisting of GaS, GaSe, InS, InSe, HfS 2 , HfSe 2 , HfTe 2 , MoS 2 , MoSe 2 , MoTe 2 , NbS 2 , NbSe 2 , NbTe 2 , NiS 2 , NiSe 2 , NiTe 2 , PdS 2 , PdSe 2 , PdTe 2 , PtS 2 , PtSe 2 , PtTe 2 , ReS 2 , ReSe 2 , ReTe 2 , TaS 2 , TaSe 2 , TaTe 2 , TiS 2 , TiSe 2 , TiTe 2 , WS 2 , WSe 2 , WTe 2 , ZrS 2 , ZrSe 2 , and ZrTe 2 .

7. The method of claim 6 , wherein the two-dimensional material consists essentially of MoS 2 or MoSe 2 .

8. The method of claim 1 , wherein said chemical vapor deposition comprises heating the first membrane precursor and second membrane precursor in separate containers and in the presence of an inert carrier gas.

9. The method of claim 8 , wherein the container comprising the first membrane precursor is disposed near the first side of said sheet of solid state material, the container comprising the second membrane precursor is disposed remotely from said sheet of solid state material, and the heated second membrane precursor is carried towards the aperture by the carrier gas at the second side of said sheet of solid state material; and wherein the ultrathin membrane is fabricated on a surface of the sheet on the second side.

10. The method of claim 8 , wherein said inert carrier gas is Ar or N 2 .

11. The method of claim 1 , wherein the first and second membrane precursors are heated to about 650 to 800° C. at about 3 to 10° C./min under carrier gas flow, and held at about 650 to 800° C. for about 15 to 60 minutes.

12. The method of claim 11 wherein, prior to said heating step, the first and second membrane precursors are heated to about 300 to 400° C. at a rate of about 20 to 30° C./min under carrier gas flow and held at about 300 to 400° C. for about 15 to 30 minutes, and wherein the two-dimensional material formed is MoS 2 .

13. The method of claim 1 , wherein said carrier gas flow is maintained at a rate of about 180 to 200 sccm.

14. The method of claim 1 , wherein the ultrathin membrane is fabricated across an aperture having a diameter of from about 0.02 μm to about 2.0 μm.

15. The method of claim 1 , wherein the solid state material is a material selected from the group consisting of silicon nitride, silicon dioxide, hafnium dioxide, titanium dioxide, and aluminum oxide.

16. The method of claim 1 , wherein the thickness of the ultrathin membrane is 1-2 atomic layers.

17. The method of claim 1 , wherein the ultrathin membrane is essentially free of holes and atomic vacancies.

18. The method of claim 1 , wherein the ultrathin membrane consists essentially of monocrystalline MoS 2 or MoSe 2 .

19. The method of claim 1 , further comprising the step of forming one or more nanopores in the ultrathin membrane.

20. The method of claim 19 , wherein the one or more nanopores are formed using an electron beam, an ion beam, a laser, or application of voltage across the membrane.

21. The method of claim 19 , wherein the one or more nanopores each have a diameter in the range from about 0.3 nm to about 50 nm.

Assignees

• Univ Northeastern

Inventors

• Waduge Pradeep
• Kar Swastik
• Wanunu Meni
• Larkin Joseph
• Bilgin Ismail

Classifications

• G01N27/4473

  by electric means · CPC title

• G01N33/48721 Primary

  Investigating individual macromolecules, e.g. by translocation through nanopores (Coulter counters in general G01N15/12; fabrication methods for nanoscale apertures B81B1/00; sequencing of nucleic acids C12Q1/68) · CPC title

• G01N27/44791

  Microapparatus (sample containers with integrated microfluidic structures B01L3/5027) · CPC title

• C12Q1/6869

  Methods for sequencing · CPC title

• C01B32/186

  by chemical vapour deposition [CVD] · CPC title