Compound and method for producing same

Patent metadata

Field	Value
Publication number	US-10550068-B2
Application number	US-201615743931-A
Country	US
Kind code	B2
Filing date	Jul 21, 2016
Priority date	Jul 23, 2015
Publication date	Feb 4, 2020
Grant date	Feb 4, 2020

Abstract

A compound represented by the following formula (1):

wherein R 1 is a 2n-valent group having 1 to 60 carbon atoms; R 2 to R 5 are each independently a linear, branched, or cyclic alkyl group having 1 to 30 carbon atoms, an aryl group having 6 to 30 carbon atoms, an alkenyl group having 2 to 30 carbon atoms, an alkoxy group having 1 to 30 carbon atoms and optionally having a substituent, a halogen atom, a nitro group, an amino group, a carboxylic acid group, a group in which a hydrogen atom of a hydroxy group is replaced with a vinylphenylmethyl group, a group selected from the group consisting of groups represented by the following formula (A), a thiol group, or a hydroxy group, wherein at least one of the R 2 to the R 5 is a group selected from a group represented by the formula (A); m 2 and m 3 are each independently an integer of 0 to 8; m 4 and m 5 are each independently an integer of 0 to 9, provided that m 2 , m 3 , m 4 , and m 5 are not 0 at the same time; n is an integer of 1 to 4; and p 2 to p 5 are each independently an integer of 0 to 2:

First claim

The invention claimed is:

1. A compound represented by the following formula (1b):

wherein R 1 is a 2n-valent group having 1 to 60 carbon atoms; R 6 and R 7 are each independently a linear, branched, or cyclic alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, a thiol group, or a hydroxy group, or a group selected from the group consisting of groups represented by the following formula (A):

R 8 to R 11 are each independently a group selected from a hydroxy group or the group consisting of groups represented by the above formula (A), provided that at least one of the R 8 to the R 11 is a group selected from the group consisting of groups represented by the above formula (A); n is an integer of 1 to 4; and m 6 and m 7 are each independently an integer of 0 to 7.

2. A resin comprising a constituent unit derived from the compound according to claim 1 .

3. A method for producing the compound according to claim 1 , comprising a step of reacting a compound represented by the following formula (2) with an allyl group introducing agent or a (meth)acryloyl group introducing agent in the presence of a basic catalyst:

wherein R 1 is a 2n-valent group having 1 to 60 carbon atoms; R 6′ to R 7′ are each independently a linear, branched, or cyclic alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, a thiol group, or a hydroxy group, wherein R 8′ to R 11′ are each a hydroxy group; and m 6 and m 7 are each independently an integer of 0 to 7.

4. A composition comprising:
one or more selected from the group consisting of the compound according to claim 1 ; and a resin comprising a constituent unit derived from the compound.

5. A composition for forming optical component comprising:
one or more selected from the group consisting of the compound according to claim 1 ; and a resin comprising a constituent unit derived from the compound.

6. A film forming composition for lithography comprising:
one or more selected from the group consisting of the compound according to claim 1 ; and a resin comprising a constituent unit derived from the compound.

7. A resist composition comprising:
one or more selected from the group consisting of the compound according to claim 1 ; and a resin comprising a constituent unit derived from the compound.

8. The resist composition according to claim 7 , further comprising a solvent.

9. The resist composition according to claim 7 , further comprising an acid generating agent.

10. The resist composition according to claim 7 , further comprising an acid diffusion controlling agent.

11. A method for forming a resist pattern, comprising:
a step of forming a resist film on a substrate using the resist composition according to claim 7 ;
a step of exposing at least a portion of the formed resist film; and
a step of developing the exposed resist film, thereby forming a resist pattern.

12. A radiation-sensitive composition comprising:
a component (A) which is one or more selected from the group consisting of the compound according to any one of claim 1 ; and a resin comprising a constituent unit derived from the compound;
an optically active diazonaphthoquinone compound (B); and
a solvent, wherein
a content of the solvent is 20 to 99% by mass based on 100% by mass in total of the radiation-sensitive composition, and
a content of components except for the solvent is 1 to 80% by mass based on 100% by mass in total of the radiation-sensitive composition.

13. The radiation-sensitive composition according to claim 12 , wherein a content ratio among the compound and/or the resin (A), the optically active diazonaphthoquinone compound (B), and a further optional component (D) optionally contained in the radiation-sensitive composition ((A)/(B)/(D)) is (1 to 99% by mass)/(99 to 1% by mass)/(0 to 98% by mass), based on 100% by mass of solid components of the radiation-sensitive composition.

14. The radiation-sensitive composition according to claim 12 , wherein the radiation-sensitive composition is capable of forming an amorphous film by a spin coating.

15. A method for producing an amorphous film, comprising a step of forming an amorphous film on a substrate using the radiation-sensitive composition according to claim 12 .

16. A method for forming a resist pattern, comprising:
a step of forming a resist film on a substrate using the radiation-sensitive composition according to claim 12 ;
a step of exposing at least a portion of the formed resist film; and
a step of developing the exposed resist film, thereby forming a resist pattern.

17. A composition for underlayer film formation for lithography comprising:
one or more selected from the group consisting of the compound according to claim 1 ; and a resin comprising a constituent unit derived from the compound, and
a solvent.

18. The composition for underlayer film formation for lithography according to claim 17 , further comprising a crosslinking agent.

19. A method for forming a underlayer film for lithography, comprising a step of forming a underlayer film on a substrate using the composition for underlayer film formation for lithography according to claim 17 .

20. A method for forming a resist pattern, comprising:
a step of forming a underlayer film on a substrate using the composition for underlayer film formation for lithography according to claim 17 ;
a step of forming at least one photoresist layer on the underlayer film; and
a step of irradiating a predetermined region of the photoresist layer with radiation for development, thereby forming a resist pattern.

21. A method for forming a circuit pattern, comprising:
a step of forming a underlayer film on a substrate using the composition for underlayer film formation for lithography according to claim 17 ;
a step of forming an intermediate layer film on the underlayer film using a resist intermediate layer film material containing a silicon atom;
a step of forming at least one photoresist layer on the intermediate layer film;
a step of irradiating a predetermined region of the photoresist layer with radiation for development, thereby forming a resist pattern;
a step of etching the intermediate layer film with the resist pattern as a mask, thereby forming an intermediate layer film pattern;
a step of etching the underlayer film with the intermediate layer film pattern as an etching mask, thereby forming a underlayer film pattern; and
a step of etching the substrate with the underlayer film pattern as an etching mask, thereby forming a pattern on the substrate.

22. A purification method comprising:
a step of obtaining a solution (S) by dissolving one or more selected from the group consisting of the compound according to claim 1 and a resin comprising a constituent unit derived from the compound in a solvent; and
a step of extracting impurities in the compound and/or the resin by bringing the obtained solution (S) into contact with an acidic aqueous solution (a first extraction step), wherein
the solvent used in the step of obtaining the so

Assignees

• Mitsubishi Gas Chemical Co

Inventors

• Echigo Masatoshi

Classifications

• H10P50/692

  characterised by their composition, e.g. multilayer masks or materials · CPC title

• H10P50/73

  using masks for insulating materials · CPC title

• C07C43/215 Primary

  having unsaturation outside the six-membered aromatic rings · CPC title

• C07C41/01

  Preparation of ethers · CPC title

• G03F7/2037

  Exposure with X-ray radiation or corpuscular radiation, through a mask with a pattern opaque to that radiation · CPC title