Film forming apparatus

Patent metadata

Field	Value
Publication number	US-10544507-B2
Application number	US-201715715299-A
Country	US
Kind code	B2
Filing date	Sep 26, 2017
Priority date	Sep 30, 2016
Publication date	Jan 28, 2020
Grant date	Jan 28, 2020

Abstract

A film forming apparatus (10) includes a mask body (34) configured to expose inner surfaces (14a) of cylinder bores (14), and mask an inner surface (16a) of a crankcase (16). The mask body (34) includes a main body portion (104), a sealing member (106) and a biasing member (108). The main body portion (104) is configured to stretch and contract, and includes a first tubular member (100) and a second tubular member (102) configured to have an insert structure at least part of which is slidable along an axial direction. The main body portion (104) can stretch and contact in a state where at least one end in the axial direction thereof contacts an inner surface of a cylinder block (12). The sealing member (106) is interposed between sliding surfaces of the first tubular member (100) and the second tubular member (102). The biasing member (108) is configured to resiliently bias the first tubular member (100) and the second tubular member (102) in a stretching direction of the main body portion (104).

First claim

What is claimed is:

1. A film forming apparatus configured to form a film at a film formation portion on an inner surface of a cylindrical work, the film forming apparatus comprising a mask body configured to expose the film formation portion and mask a non-formation portion of the inner surface of the work where the film is not formed, wherein the mask body includes:
a main body portion configured to stretch and contract in an axial direction, and including a plurality of tubular members configured to have an insert structure at least part of which is slidable along the axial direction;
a sealing member interposed between sliding surfaces of the tubular members; and
a biasing member configured to exert a resilient force on the tubular members so that the main body portion stretches in the axial direction; and
the main body portion is provided to be capable of stretching and contracting in a state in which at least one end in the axial direction of the main body portion is in contact with the inner surface of the work, while being contracted against the resilient force exerted by the biasing member.

2. The film forming apparatus according to claim 1 , further comprising:
a housing including a first wall portion in contact with one end side in the axial direction of the work, and a second wall portion in contact with another end side, the housing configured to form an airtight space in which the work is housed;
a source gas supply device configured to supply a source gas of the film to an interior of the work via a first opening formed in the first wall portion;
an anode case communicating with the interior of the work via a second opening formed in the second wall portion, and electrically insulated from an anode electrode;
an insulation member interposed between the anode case and the housing to electrically insulate the anode case and the housing from each other; and
an exhaust device configured to exhaust the interior of the work and an interior of the housing via the anode case; and
the one end in the axial direction of the main body portion is in contact with the inner surface of the work, and another end is in contact with the insulation member via the second opening.

3. The film forming apparatus according to claim 2 , wherein:
the plurality of tubular members include:
a first tubular member including one end side in the axial direction which is in contact with the inner surface of the work; and
a second tubular member disposed near the second wall portion compared to the first tubular member; and
an outer circumferential surface of the first tubular member and an inner circumferential surface of the second tubular member are in sliding contact with each other.

Assignees

• Honda Motor Co Ltd

Inventors

• Funatsu Junya
• Kobayashi Koji
• Yoshimoto Nobuhiko

Classifications

• C23C16/042

  using masks · CPC title

• C23C16/4412 Primary

  Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps · CPC title

• C23C16/50

  using electric discharges {(generation and control of plasma in discharge tubes for surface treatment H01J37/32, H01J37/34)} · CPC title

• C23C16/045 Primary

  Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates · CPC title