MEMS manufacturing system and MEMS manufacturing method

Patent metadata

Field	Value
Publication number	US-10538429-B2
Application number	US-201816030256-A
Country	US
Kind code	B2
Filing date	Jul 9, 2018
Priority date	Sep 15, 2017
Publication date	Jan 21, 2020
Grant date	Jan 21, 2020

Abstract

In a calculator in a MEMS manufacturing system, a stage control unit inclines a stage based on a stage angle 1 setting a stage inclination angle and a stage angle 2 of the inclination angle different from the stage angle 1. A stage-angle calculation unit calculates the stage inclination angles from first and second images acquired by a SEM apparatus when the stage control unit sets the stage at the stage angles 1 and 2. A 3D-data creation unit creates three-dimensional device data from a third image that is a device image acquired when the stage is set at the stage angle 1 and a fourth image that is a device image acquired when the stage is set at the stage angle 2. When the three-dimensional device data is created, a correction value calculated from the stage angles 1 and 2 and the first and second images is used.

First claim

What claimed is:

1. A MEMS manufacturing system comprising:
an image acquirement unit acquiring image information of a MEMS; and
a manufacturing process unit creating a three-dimensional image of the device formed on the MEMS from the image information acquired by the image acquirement unit, analyzing the created three-dimensional image to estimate a property of the device, and corrects a manufacturing recipe of the MEMS,
wherein the image acquirement unit has a stage on which the MEMS is placed,
the manufacturing process unit has:
a stage control unit;
a stage-angle calculation unit; and
a 3D-data creation unit,

the stage control unit inclining the stage based on a first stage inclination angle to which an inclination angle of the stage on which the MEMS is placed is set and a second stage inclination angle that is a different inclination angle from the first stage inclination angle, the stage-angle calculation unit calculating the stage inclination angles from a first image that is an image for calculating the stage inclination angle acquired by the image acquirement unit when the stage control unit sets the stage to the first stage inclination angle and a second image that is an image for calculating the stage inclination angle acquired by the image acquirement unit when the stage control unit sets the stage to the second stage inclination angle, and the 3D-data creation unit creating three-dimensional data of the device from a third image that is an image of the device acquired when the image acquirement unit sets the stage to the first stage inclination angle and a fourth image that is an image of the device acquired when the image acquirement unit sets the stage to the second stage inclination angle, and
the 3D-data creation unit uses a correction value calculated based on the acquired first image, the acquired second image, the first stage inclination angle set by the stage control unit and the second stage inclination angle set by the stage control unit when the three-dimensional data of the device is created.

2. The MEMS manufacturing system according to claim 1 ,
wherein the 3D-data creation unit calculates each of a difference between the first stage inclination angle set by the stage control unit and the inclination angle of the stage calculated from the first image by the stage-angle calculation unit and a difference between the second stage inclination angle set by the stage control unit and the inclination angle of the stage calculated from the second image by the stage-angle calculation unit, and uses each of the calculated differences among the inclination angles as a correction value.

3. The MEMS manufacturing system according to claim 2 ,
wherein the first image and the second image acquired by the image acquirement unit are images of a reference mark indicating a reference point that is previously formed on the MEMS, and
the stage-angle calculation unit calculates the inclination angles of the stage from the reference marks on the first image and the second image, respectively.

4. The MEMS manufacturing system according to claim 2 ,
wherein the manufacturing process unit has:
a storage unit storing design data of the MEMS and a manufacturing recipe of the MEMS;
a property calculation unit calculating the property of the device from three-dimensional data of the device created by the 3D-data creation unit;
a property comparison unit comparing the property of the device calculated by the property calculation unit with a property of the device contained in the design data stored in the storage unit; and
a manufacturing-recipe correction unit correcting a manufacturing recipe stored in the storage unit based on a result of the comparison made by the property comparison unit so that the property of the device becomes the property of the device contained in the design data.

5. The MEMS manufacturing system according to claim 2 further comprising:
a positional alignment process unit performing a positional alignment process to the third image and the fourth image acquired by the image acquirement unit,
wherein the positional alignment process unit moves the stage so that a position of an origin point set on a virtual axis of the device whose image is captured on the third image when the image acquirement unit acquires the fourth image matches a position of an origin point set on a virtual axis of the device whose image is captured on the fourth image.

6. The MEMS manufacturing system according to claim 1 ,
wherein the manufacturing process unit has a stage-angle comparison unit determining whether or not each of a difference between the first stage inclination angle set by the stage control unit and the inclination angle of the stage calculated from the first image and a difference between the second stage inclination angle set by the stage control unit and the inclination angle of the stage calculated from the second image is within a range of a previously setting value,
the image acquirement unit acquires the third image if the stage-angle comparison unit determines that the difference between the first stage inclination angle set by the stage control unit and the inclination angle of the stage calculated from the first image is within the range of the setting value, and acquires the fourth image if the difference between the second stage inclination angle set by the stage control unit and the inclination angle of the stage calculated from the second image is within the range of the setting value, and
the 3D-data creation unit creates three-dimensional data of the device from the third image and the fourth image each of which is acquired by the image acquirement unit.

7. The MEMS manufacturing system according to claim 6 ,
wherein the stage control unit corrects the inclination angle of the stage until each of the differences in the inclination angle of the stage is within the range of the setting value.

8. The MEMS manufacturing system according to claim 6 further comprising:
a positional alignment process unit performing a positional alignment process to the third image and the fourth image acquired by the image acquirement unit,
wherein the positional alignment process unit moves the stage so that a position of an origin point set on a virtual axis of the device whose image is captured on the third image when the image acquirement unit acquires the fourth image matches a position of an origin point set on a virtual axis of the device whose image is captured on the fourth image.

9. The MEMS manufacturing system according to claim 6 ,
wherein the manufacturing process unit has:
a storage unit storing design data of the MEMS and a manufacturing recipe of the MEMS;
a property calculation unit calculating the property of the device from three-dimensional data of the device created by the 3D-data creation unit;
a property comparison unit comparing the property of the device calculated by the property calculation unit with a property of the device contained in the design data stored in the storage unit; and
a manufacturing-recipe correction unit correcting a manufacturing recipe stored in the storage unit based on a result of the comparison made by the property comparison unit so that the property of the device becomes the property of the device contained in the design data.

10. A method of manufacturing a MEMS performed by a MEMS manufacturing system having an image acquirement unit having a stage on which the MEMS is placed and acquiring image information of the MEMS and a manufacturing process unit creating a three-dimensional image of the device formed on the MEMS from the image information acquired by the image acquirement unit, analyzing the created three-dimensi

Assignees

• Hitachi Ltd

Inventors

• Sagawa Misuzu
• Isobe Atsushi

Classifications

• B81C99/0065

  Process control; Yield prediction · CPC title

• B81C99/006 Primary

  Design; Simulation · CPC title

• B81C99/0025 Primary

  Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems not provided for in B81C99/001 - B81C99/002 · CPC title