Stretchable form of single crystal silicon for high performance electronics on rubber substrates
US-9105555-B2 · Aug 11, 2015 · US
US10538028B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10538028-B2 |
| Application number | US-201514944039-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 17, 2015 |
| Priority date | Nov 17, 2014 |
| Publication date | Jan 21, 2020 |
| Grant date | Jan 21, 2020 |
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Origami- and Kirigami-inspired assembly of predetermined three-dimensional forms is presented in comprehensive theoretical and experimental studies, with examples of a broad range of topologies and material compositions. The resulting engineering options in the construction of functional 3D structures have important implications for advanced microsystem technologies.
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We claim: 1. A structure comprising: a thin film structure having a complex shape held under strain by at least partial contact with a supporting material; wherein: the thin film structure is characterized by at least one region with a mode ratio greater than or equal to 0.1, wherein the mode ratio of the at least one region corresponds to a ratio of average twisting curvature of the at least one region to the average bending curvature of the at least one region; the thin film structure is characterized by a thickness less than or equal to 300 μm; the thin film structure is bound to the supporting material at a plurality of bonding regions and not bound to the supporting material at a plurality of non-bonding regions; and the complex shape of the thin film structure is non-linear and helical. 2. A structure comprising: a thin film structure characterized by a plurality of cut-outs configured to allow said thin film structure to form a predetermined three-dimensional shape upon application of a compressive force provided by relaxation of a deformable substrate; wherein said predetermined three-dimensional shape is a rigid structure characterized by at least one region with a mode ratio greater than or equal to 0.1; wherein the mode ratio of the at least one region corresponds to a ratio of average twisting curvature of the at least one region to the average bending curvature of the at least one region; the thin film structure is characterized by a thickness less than or equal to 300 μm; and the three-dimensional shape is a complex shape characterized as non-linear and helical. 3. A structure comprising: a deformable substrate having a surface; and a thin film structure supported by said surface; wherein said thin film structure is bound to said surface at a plurality of bonding regions and not bound to said surface at a plurality of non-bonding regions; wherein relaxation of said deformable substrate provides a compressive force that generates a predetermined three-dimensional form of said thin film structure; wherein said predetermined three-dimensional form is characterized by at least one region with a mode ratio greater than or equal to 0.1; wherein the mode ratio of the at least one region corresponds to a ratio of average twisting curvature of the at least one region to the average bending curvature of the at least one region; the thin film structure is characterized by a thickness less than or equal to 300 μm; and the thin film structure has a complex shape characterized as non-linear and helical. 4. The structure of claim 3 further comprising: an encapsulation layer at least partially encapsulating said predetermined three-dimensional form. 5. The structure of claim 4 , wherein said encapsulation layer is rigid. 6. The structure of claim 4 , wherein said deformable substrate is rigid. 7. The structure of claim 6 , wherein said thin film structure is an insulator. 8. A structure comprising: a deformable substrate having a surface; and a thin film structure supported by said surface; wherein said thin film structure is bound to said surface at a plurality of bonding regions and not bound to said surface at a plurality of non-bonding regions; wherein an overall shape of said thin film structure is non-linear and no bonding region exists at corners of a square or termini of a four-way intersection formed by said thin film structure; wherein each of said non-bonding regions physically contacts said deformable substrate when said deformable substrate is in an expanded state and none of said non-bonding regions physically contacts said deformable substrate when said deformable substrate is in a contracted state; wherein: wherein said overall shape is characterized by at least one region with a mode ratio greater than or equal to 0.1, wherein the mode ratio of the at least one region corresponds to a ratio of average twisting curvature of the at least one region to the average bending curvature of the at least one region; the thin film structure is characterized by a thickness less than or equal to 300 μm; and the overall shape is a complex shape characterized as non-linear and helical. 9. The structure of claim 6 , wherein said predetermined three-dimensional form is a space-filling shape. 10. A template for a three-dimensional structure comprising: a deformable substrate having a surface; and a two-dimensional thin film structure substantially parallel with and supported by said surface; wherein said two-dimensional thin film structure comprises a pattern of cut-outs configured to allow said two-dimensional thin film structure to convert into a predetermined three-dimensional complex shape upon application of a compressive force provided by relaxation of said substrate; wherein: the three-dimensional complex shape is characterized by at least one region with a mode ratio greater than or equal to 0.1, wherein the mode ratio of the at least one region corresponds to a ratio of average twisting curvature of the at least one region to the average bending curvature of the at least one region; the thin film structure is characterized by a thickness less than or equal to 300 μm; the thin film structure is bound to the substrate at a plurality of bonding regions and not bound to the substrate at a plurality of non-bonding regions; and the three-dimensional complex shape is characterized as non-linear and helical. 11. A structure comprising: a thin film structure characterized by a plurality of cut-outs configured to allow said thin film structure to form a predetermined three-dimensional shape upon application of a compressive force provided by relaxation of a deformable substrate; wherein: the three-dimensional shape is characterized by at least one region with a mode ratio greater than or equal to 0.1, wherein the mode ratio of the at least one region corresponds to a ratio of average twisting curvature of the at least one region to the average bending curvature of the at least one region; the thin film structure is characterized by a thickness less than or equal to 300 μm; the thin film structure is bound to the substrate at a plurality of bonding regions and not bound to the substrate at a plurality of non-bonding regions; and the three-dimensional shape is a complex shape characterized as non-linear and helical. 12. The structure of claim 6 wherein said predetermined three-dimensional form is a multilayered three-dimensional structure. 13. The structure of claim 6 wherein said predetermined three-dimensional form comprises an additional three-dimensional structure disposed inside said predetermined three-dimensional form. 14. The structure of claim 6 wherein said predetermined three-dimensional form displays chirality. 15. The structure of claim 6 further comprising: a functional device or functional device component integrated into or disposed upon a non-bonding region of said thin film structure. 16. A spatially varying structure comprising: a deformable substrate having a surface; and a thin film structure supported by said surface; wherein said thin film structure is bound to said surface at a plurality of bonding regions and not bound to said surface at a plurality of non-bonding regions; wherein relaxation of said deformable substrate provides a compressive force that generates a predetermined three-dimensional form of said thin film structure having a plurality of buckled regions characterized by an anisotropic distribution of periodicities, amplitudes or both; wherein: the three-dimensional form is characterized by at least one region with a mode
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