Thin film metal silicides and methods for formation

Patent metadata

Field	Value
Publication number	US-10535526-B2
Application number	US-201815890465-A
Country	US
Kind code	B2
Filing date	Feb 7, 2018
Priority date	Feb 5, 2015
Publication date	Jan 14, 2020
Grant date	Jan 14, 2020

Abstract

The disclosed subject matter provides thin films including a metal silicide and methods for forming such films. The disclosed subject matter can provide techniques for tailoring the electronic structure of metal thin films to produce desirable properties. In example embodiments, the metal silicide can comprise a platinum silicide, such as for example, PtSi, Pt2Si, or Pt3Si. For example, the disclosed subject matter provides methods which include identifying a desired phase of a metal silicide, providing a substrate, depositing at least two film layers on the substrate which include a first layer including amorphous silicon and a second layer including metal contacting the first layer, and annealing the two film layers to form a metal silicide. Methods can be at least one of a source-limited method and a kinetically-limited method. The film layers can be deposited on the substrate using techniques known in the art including, for example, sputter depositing.

First claim

The invention claimed is:

1. A thin film comprising a platinum layer and an amorphous silicon layer, wherein the platinum layer and amorphous silicon layer are present in a thickness ratio 2:1 corresponding to a Pt 3 Si phase upon annealing thereof at predetermined time-temperature points.

2. The thin film of claim 1 , wherein the thin film is selected from a group consisting of at least 40% Pt 3 Si, at least 45% Pt 3 Si, at least 50% Pt 3 Si, at least 55% Pt 3 Si, at least 60% Pt 3 Si, at least 65% Pt 3 Si, at least 70% Pt 3 Si, at least 74% Pt 3 Si, at least about 75% Pt 3 Si, at least about 80% Pt 3 Si, at least about 85% Pt 3 Si, and at least about 88% Pt 3 Si.

3. The thin film of claim 1 , wherein the predetermined time-temperature points are determined based on a desired phase of the thin film.

4. A thin film including a metal silicide having a phase, comprising:
a substrate;
a first layer comprising a first amount of amorphous silicon deposited on said substrate; and
a second layer comprising a second amount of a metal deposited on the first layer; wherein a thickness ratio of the first layer and the second layer corresponds to the phase upon annealing thereof at predetermined time-temperature points.

5. The thin film of claim 4 , wherein the metal comprises at least one of platinum, titanium, nickel, tungsten, cobalt, molybdenum, and chromium.

6. The thin film of claim 4 , wherein the metal silicide comprises platinum silicide.

7. The thin film of claim 6 , wherein the platinum silicide is Pt 3 Si.

8. The thin film of claim 4 , wherein the annealing comprises:
annealing the at least two film layers using a time-temperature regime to form the desired phase of the metal silicide.

9. A nanoelectromechanical switch comprising the thin film of claim 1 .

10. A jet engine comprising the thin film of claim 1 .

11. A device comprising the thin film of claim 1 , the device selected from a group consisting of a plasmonic device, a lithium-ion battery, a field emitter, and an atomic force microscopy probe.

12. The thin film of claim 4 , wherein the predetermined time-temperature points are determined based on a desired phase of the thin film.

Assignees

• Univ Pennsylvania

Inventors

• Carpick Robert W
• Streller Frank
• Agarwal Rahul
• Mangolini Filippo

Classifications

• H10D64/0112 Primary

  using conductive layers comprising silicides · CPC title

• C01B33/06

  Metal silicides (alloys C22) · CPC title

• B81C1/00698

  Electrical characteristics, e.g. by doping materials · CPC title

• B81B2203/04

  Electrodes · CPC title

• B81B3/0086

  Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage · CPC title