Piezoelectric actuator, method for manufacturing same, and liquid discharge head

Patent metadata

Field	Value
Publication number	US-10532567-B2
Application number	US-201815886167-A
Country	US
Kind code	B2
Filing date	Feb 1, 2018
Priority date	Feb 7, 2017
Publication date	Jan 14, 2020
Grant date	Jan 14, 2020

Abstract

A piezoelectric actuator has a ground substrate layer, an intermediate layer containing at least one of Ti and TiO2 on the ground substrate layer, an electrode layer containing Pt on the intermediate layer, and a piezoelectric layer containing lead zirconate titanate on the electrode layer, in which the lead zirconate titanate contained in the piezoelectric layer is preferentially oriented in the (100), (001), or (110) direction, the Pt contained in the electrode layer is preferentially oriented in the (111) direction, and the half width of the rocking curve in the (111) plane of the Pt contained in the electrode layer in X-ray diffraction is 1° or more.

First claim

What is claimed is:

1. A piezoelectric actuator comprising:
a ground substrate layer;
an intermediate layer containing at least one of titanium and titanium dioxide on the ground substrate layer;
an electrode layer containing platinum on the intermediate layer; and
a piezoelectric layer containing lead zirconate titanate on the electrode layer, wherein
the lead zirconate titanate contained in the piezoelectric layer is preferentially oriented in a (100), (001), or (110) direction,
the platinum contained in the electrode layer is preferentially oriented in a (111) direction, and
a half width of a rocking curve in a (111) plane of the platinum contained in the electrode layer in X-ray diffraction is 1° or more and 3° or less.

2. The piezoelectric actuator according to claim 1 , wherein a thickness of the intermediate layer is 2 nm or more and 50 nm or less.

3. The piezoelectric actuator according to claim 1 , wherein a thickness of the electrode layer is 10 nm or more and 1000 nm or less.

4. The piezoelectric actuator according to claim 1 , wherein a thickness of the piezoelectric layer is 10 nm or more and 20 μm or less.

5. The piezoelectric actuator according to claim 1 , wherein
a crystal structure of the lead zirconate titanate contained in the piezoelectric layer is a tetragon.

6. The piezoelectric actuator according to claim 1 , wherein a thickness of the intermediate layer is 2 nm or more and 30 nm or less.

7. The piezoelectric actuator according to claim 1 , wherein a thickness of the electrode layer is 50 nm or more and 500 nm or less.

8. The piezoelectric actuator according to claim 1 , wherein a thickness of the piezoelectric layer is 100 nm or more and 1 μm or less.

9. The piezoelectric actuator according to claim 1 , wherein the lead zirconate titanate has a perovskite crystal represented by Pb y (Zr x Ti 1-x )O 3 (x=0.4 to 0.6, y=1.00 to 1.20).

10. The piezoelectric actuator according to claim 9 , wherein an element other than Pb, Zr, and Ti is contained in the piezoelectric layer.

11. The piezoelectric actuator according to claim 10 , wherein a content of the element in the piezoelectric layer is 0.1 to 2 parts by mass based on 100 parts by mass of the lead zirconate titanate.

Assignees

• Canon Kk

Inventors

• Nakasu Minako
• Kobayashi Motokazu
• Numazawa Hiroto
• Tomiyoshi Toshio
• Fukaya Youichi

Classifications

• B41J2202/03

  Specific materials used · CPC title

• B41J2/1642

  thin film formation by CVD [chemical vapor deposition] · CPC title

• B41J2/1618

  Fixing the piezoelectric elements · CPC title

• B41J2/1646

  thin film formation by sputtering · CPC title

• B41J2002/14225

  Finger type piezoelectric element on only one side of the chamber · CPC title