Composite for neutral layer

Patent metadata

Field	Value
Publication number	US-10532546-B2
Application number	US-201615578951-A
Country	US
Kind code	B2
Filing date	Jun 7, 2016
Priority date	Jun 4, 2015
Publication date	Jan 14, 2020
Grant date	Jan 14, 2020

Abstract

The present application relates to a neutral layer composition. The present application can provide a neutral layer composition capable of forming a neutral layer, which can be effectively applied in the formation of a polymeric film comprising a vertically aligned self-assembled block copolymer.

First claim

The invention claimed is:

1. A laminate comprising a neutral layer; and a polymer film formed on one surface of the neutral layer and comprising a block copolymer having a first block and a second block chemically distinct from the first block,
wherein the neutral layer comprises a random copolymer, and
wherein the first block of the block copolymer and the random copolymer each contain a unit of Formula 1 below:

wherein, X is an oxygen atom, —C(═O)—, —OC(═O)—, —C(═O)—O— or a divalent linker represented by Formula 2 below, and Y is a monovalent hydrocarbon group having 3 to 30 carbon atoms;

wherein, T is a divalent hydrocarbon group, and m is a number within a range of 1 to 5.

2. The laminate according to claim 1 , wherein the unit of Formula 1 in the random copolymer has a ratio in a range of 10% by mole to 90% by mole.

3. The laminate according to claim 1 , wherein the random copolymer further comprises a unit represented by any one of Formulas 3 to 7:

wherein, R is hydrogen or an alkyl group, and T is a single bond or a divalent hydrocarbon group with or without a hetero atom;

wherein, R is hydrogen or an alkyl group, A is an alkylene group, R 1 is hydrogen, a halogen atom, an alkyl group or a haloalkyl group, and n is a number in a range of 1 to 3;

wherein, R is hydrogen or an alkyl group, and T is a divalent hydrocarbon group with or without a hetero atom;

wherein, R is hydrogen or an alkyl group having 1 to 4 carbon atoms, and T is a divalent hydrocarbon group with or without a hetero atom; and

wherein, X 2 is a single bond, an oxygen atom, a sulfur atom, —S(═O) 2 —, an alkylene group, an alkenylene group, an alkynylene group, —C(═O)—X 3 — or —X 3 —C(═O)—, where X 3 is a single bond, an oxygen atom, a sulfur atom, —S(═O) 2 —, an alkylene group, an alkenylene group or an alkynylene group, and R 1 to R 5 are each independently hydrogen, an alkyl group, a haloalkyl group, a halogen atom or a cross-linkable functional group, where the number of the cross-linkable functional groups contained in R 1 to R 5 is one or more.

4. The laminate according to claim 1 , wherein the unit of Formula 1 is substituted with a cross-linkable functional group.

5. The laminate according to claim 1 , wherein the random copolymer further comprises a polymerized unit derived from a (meth)acrylic acid ester compound, a polymerized unit derived from vinylpyridine, or a polymerized unit derived from a styrenic monomer.

6. The laminate according to claim 1 , wherein the random copolymer further comprises a unit of Formula 9 below:

wherein, R 1 is hydrogen or an alkyl group, and R 2 is an alkyl group.

7. The laminate according to claim 1 , wherein the random copolymer has a number average molecular weight in a range of 2000 to 500000.

8. The laminate according to claim 1 , wherein the block copolymer embodies a sphere, cylinder, gyroid or lamellar structure.

9. A method for manufacturing the laminate according to claim 1 comprising a step of forming a neutral layer; and a polymer film formed on one surface of the neutral layer and comprising a block copolymer having a first block and a second block chemically distinct from said first block in a self-assembled state,
wherein the neutral layer comprises a random copolymer, and
wherein the first block of the block copolymer and the random copolymer each contain a unit of Formula 1 defined in claim 1 .

10. A method for forming a pattern comprising a step of selectively removing the first or second block of the block copolymer in the polymer film of the laminate of claim 9 .

Assignees

• Lg Chemical Ltd

Inventors

• Park No Jin
• Yoon Sung Soo
• Kim Jung Keun
• Lee Je Gwon
• Lee Mi Sook

Classifications

• C08F212/18

  Chlorine · CPC title

• C08F212/22

  Oxygen · CPC title

• A61P35/00 Primary

  Antineoplastic agents · CPC title

• C07D303/02

  Compounds containing oxirane rings · CPC title

• C07D209/48

  with oxygen atoms in positions 1 and 3, e.g. phthalimide · CPC title