Piezoelectric actuator

Patent metadata

Field	Value
Publication number	US-10529911-B2
Application number	US-201615392080-A
Country	US
Kind code	B2
Filing date	Dec 28, 2016
Priority date	Jan 29, 2016
Publication date	Jan 7, 2020
Grant date	Jan 7, 2020

Abstract

A piezoelectric actuator includes a suspension plate, a piezoelectric ceramic plate, an outer frame and a bracket. The suspension plate is permitted to undergo a curvy vibration from a middle portion to a periphery portion. The piezoelectric ceramic plate is attached on the suspension plate. When a voltage is applied to the piezoelectric ceramic plate, the suspension plate is driven to undergo the curvy vibration. The outer frame is arranged around the suspension plate. The bracket is connected between the suspension plate and the outer frame for elastically supporting the suspension plate, and includes an intermediate part formed in a vacant space between the suspension plate and the outer frame and in parallel with the outer frame and the suspension plate, a first connecting part arranged between the intermediate part and the suspension plate, and a second connecting part arranged between the intermediate part and the outer frame.

First claim

What is claimed is:

1. A piezoelectric actuator, comprising:
a suspension plate, wherein the suspension plate is a square structure, and the suspension plate is permitted to undergo a curvy vibration from a middle portion to a periphery portion;
a piezoelectric ceramic plate, wherein the piezoelectric ceramic plate is a square structure, a length of the piezoelectric ceramic plate is not larger than a length of the suspension plate, and the piezoelectric ceramic plate is attached on a first surface of the suspension plate, wherein when a voltage is applied to the piezoelectric ceramic plate, the suspension plate is driven to undergo the curvy vibration;
an outer frame arranged around the suspension plate; and
at least one bracket connected between the suspension plate and the outer frame for elastically supporting the suspension plate, wherein the bracket comprises:
an intermediate part formed in a vacant space between the suspension plate and the outer frame and in parallel with the outer frame and the suspension plate;
a first connecting part arranged between the intermediate part and the suspension plate; and
a second connecting part arranged between the intermediate part and the outer frame, wherein the first connecting part and the second connecting part are opposed to each other and arranged along the same horizontal line,

wherein the suspension plate further comprises a bulge, and the bulge is formed on a second surface of the suspension plate.

2. The piezoelectric actuator according to claim 1 , wherein the at least one bracket is a connecting part connected between the suspension plate and the outer frame.

3. The piezoelectric actuator according to claim 2 , wherein the connecting part has two ends, and the two ends are opposed to each other and arranged along the same horizontal line.

4. The piezoelectric actuator according to claim 2 , wherein the connecting part is connected with the outer frame and the suspension plate at an inclined angle between 0 to 45 degrees.

5. The piezoelectric actuator according to claim 1 , wherein the length of the suspension plate is in a range between 7.5 mm and 8.5 mm.

6. The piezoelectric actuator according to claim 1 , wherein the length of the suspension plate is in a range between 8.5 mm and 10 mm.

7. The piezoelectric actuator according to claim 1 , wherein the length of the suspension plate is in a range between 10 mm and 12 mm.

8. The piezoelectric actuator according to claim 1 , wherein, wherein a thickness of the bulge is in a range between 0.02 mm and 0.08 mm.

9. The piezoelectric actuator according to claim 1 , wherein the bulge is a circular convex structure, and a diameter of the bulge is 0.55 times as large as a short side length of the suspension plate.

10. The piezoelectric actuator according to claim 1 , wherein a thickness of the suspension plate is in a range between 0.1 mm and 0.4 mm.

11. The piezoelectric actuator according to claim 1 , wherein a thickness of the piezoelectric ceramic plate is in a range between 0.05 mm and 0.3 mm.

Assignees

• Microjet Technology Co Ltd

Inventors

• Chen Shih-Chang
• Huang Chi-Feng
• Han Yung-Lung
• Liao jia-yu
• Chen Shou-Hung
• Huang Che-Wei
• Liao Hung-Hsin
• Chen Chao-Chih
• Chen Jheng-Wei
• Chang Ying-Lun
• Chang Chia-Hao
• Lee Wei-Ming

Classifications

• F16K2099/0094

  Micropumps · CPC title

• F16K99/0015

  Diaphragm or membrane valves · CPC title

• F16K99/0048

  using piezoelectric means · CPC title

• F04B43/046 Primary

  with piezoelectric drive · CPC title

• H01L41/09 Primary

  Electricity · mapped topic