Physical quantity detection element, physical quantity detection device, electronic apparatus, and moving object

Patent metadata

Field	Value
Publication number	US-10527644-B2
Application number	US-201815904732-A
Country	US
Kind code	B2
Filing date	Feb 26, 2018
Priority date	Oct 3, 2013
Publication date	Jan 7, 2020
Grant date	Jan 7, 2020

Abstract

A physical quantity detection element includes: a substrate; first and second fixed electrode portions on the substrate; a movable body on the upper portion of the substrate; and a beam on the movable body, the movable body includes a first movable body on a first side of the beam, and a second movable body on a second side of the beam, the first movable body includes a first movable electrode portion facing the first fixed electrode portion and a first mass portion disposed in an opposite direction of the beam from the first movable electrode portion, the second movable body includes a second movable electrode portion facing the second fixed electrode portion, a mass of the first movable body is greater than a mass of the second movable body, and a mass of the first mass portion is greater than a mass of the first movable electrode portion.

First claim

What is claimed is:

1. A physical quantity detection element comprising:
a substrate;
a first fixed electrode that is provided on a main surface of the substrate;
a second fixed electrode that is provided on the main surface of the substrate, the second fixed electrode being spaced apart from the first fixed electrode via a gap along a first direction in a plan view; and
a movable body that is provided above the main surface of the substrate, the movable body being configured with:
a first movable electrode that faces the first fixed electrode via a gap in the plan view;
a second movable electrode that faces the second fixed electrode via a gap in the plan view, each of the first and second movable electrodes having a plurality of first through holes;
a beam that extends in a second direction orthogonal to the first direction, the beam being provided between the first and second movable electrodes, the beam facing the main surface of the substrate via a gap in a third direction orthogonal to the first and second directions, the movable body being configured to move with respect to the beam relative to the main surface of the substrate; and
a movable mass that extends from an end of the first movable electrode in the first direction away from the beam in the plan view, the movable mass having a plurality of second through holes,

wherein when a distance between adjacent two of the plurality of first through holes in the second direction in the plan view is R 1 , a distance between adjacent two of the plurality of first though holes in the first direction in the plan view is L 1 , a distance between adjacent two of the plurality of second though holes in the second direction in the plan view is R 2 , and a distance between adjacent two of the plurality of second through holes in the first direction in the plan view is L 2 , at least one of:
R 1 <R 2 ; and
L 1 <L 2 is satisfied, and

a width of the beam in the first direction is smaller than the distance L 2 .

2. The physical quantity detection element according to claim 1 ,
wherein a thickness of the movable mass is equivalent to a thickness of the first movable electrode.

3. The physical quantity detection element according to claim 1 ,
wherein a thickness of the movable mass is greater than a thickness of the first movable electrode.

4. The physical quantity detection element according to claim 1 ,
wherein a buffer is provided on a surface of the movable mass facing the main surface of the substrate.

5. The physical quantity detection element according to claim 2 ,
wherein an electrode is provided on a surface of the movable mass facing the main surface of the substrate.

6. The physical quantity detection element according to claim 1 ,
wherein when the movable body is divided into two by a center line in the first direction at an area ratio, masses of the divided portions are equivalent to each other.

7. The physical quantity detection element according to claim 1 ,
wherein the movable body is provided line-symmetrically with respect to a center line in the first direction in the plan view.

8. A physical quantity detection device comprising:
the physical quantity detection element according to claim 1 ; and
a detection circuit that outputs a signal indicating physical quantity applied to the physical quantity detection element.

9. A physical quantity detection device comprising:
the physical quantity detection element according to claim 2 ; and
a detection circuit that outputs a signal indicating physical quantity applied to the physical quantity detection element.

10. A physical quantity detection device comprising:
the physical quantity detection element according to claim 3 ; and
a detection circuit that outputs a signal indicating physical quantity applied to the physical quantity detection element.

11. A physical quantity detection device comprising:
the physical quantity detection element according to claim 4 ; and
a detection circuit that outputs a signal indicating physical quantity applied to the physical quantity detection element.

12. A physical quantity detection device comprising:
the physical quantity detection element according to claim 5 ; and
a detection circuit that outputs a signal indicating physical quantity applied to the physical quantity detection element.

13. An electronic apparatus comprising:
the physical quantity detection element according to claim 1 ; and
a case that houses the physical quantity detection element.

14. An electronic apparatus comprising:
the physical quantity detection element according to claim 2 ; and
a case that houses the physical quantity detection element.

15. An electronic apparatus comprising:
the physical quantity detection element according to claim 3 ; and
a case that houses the physical quantity detection element.

16. An electronic apparatus comprising:
the physical quantity detection element according to claim 4 ; and
a case that houses the physical quantity detection element.

17. A moving object comprising:
the physical quantity detection element according to claim 1 ; and
a controller that is configured to control an attitude of the moving object by using the physical quantity detection element.

18. A moving object comprising:
the physical quantity detection element according to claim 2 ; and
a controller that is configured to control an attitude of the moving object by using the physical quantity detection element.

19. A moving object comprising:
the physical quantity detection element according to claim 3 ; and
a controller that is configured to control an attitude of the moving object by using the physical quantity detection element.

20. A moving object comprising:
the physical quantity detection element according to claim 4 ; and
a controller that is configured to control an attitude of the moving object by using the physical quantity detection element.

Assignees

• Seiko Epson Corp

Inventors

• Kigure Shota

Classifications

• G01P2015/0871

  using stopper structures for limiting the travel of the seismic mass · CPC title

• G01P15/125 Primary

  by capacitive pick-up · CPC title

• G01P2015/0831

  the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration · CPC title

• G01P1/003

  used for damping · CPC title

• G01P2015/0874

  using means for preventing stiction of the seismic mass to the substrate · CPC title