Acceleration sensor

Patent metadata

Field	Value
Publication number	US-10527642-B2
Application number	US-201415511444-A
Country	US
Kind code	B2
Filing date	Nov 11, 2014
Priority date	Nov 11, 2014
Publication date	Jan 7, 2020
Grant date	Jan 7, 2020

Abstract

An acceleration sensor ( 1 ) includes a fixed portion ( 33 ), a movable portion ( 31 ) connected to the fixed portion ( 33 ), a lower electrode ( 11 ) that is disposed to face a lower surface of the movable portion ( 31 ), and an upper electrode ( 21 ) that is disposed to face an upper surface of the movable portion ( 31 ). A distance in an x-axis direction between an end portion ( 41 ) of the lower electrode ( 11 ) and the fixed portion ( 33 ) is shorter than a distance in the x-axis direction between an end portion ( 51 ) of the upper electrode ( 21 ) and the fixed portion ( 33 ). Further, a distance in the x-axis direction between an end portion ( 42 ) of the lower electrode ( 11 ) and the fixed portion ( 33 ) is shorter than a distance in the x-axis direction between an end portion ( 52 ) of the upper electrode ( 21 ) and the fixed portion ( 33 ).

First claim

The invention claimed is:

1. An acceleration sensor comprising:
a substrate;
a fixed portion fixed on a main surface of the substrate;
a movable portion that is disposed adjacent to the fixed portion in plan view;
a first electrode having a first end portion disposed proximate to said fixed portion and a second end portion disposed at a side opposite said fixed portion, and that is disposed to face a lower surface of the movable portion in a cross-section view; and
a second electrode having a first end portion disposed proximate to said fixed portion and a second end portion disposed at a side opposite said fixed portion, and that is disposed to face an upper surface of the movable portion in the cross-section view,
wherein the movable portion has a first end portion disposed at a side proximate to the fixed portion and which is connected to the fixed portion via a pair of torsion springs each of which is rotatable about a rotation axis adjacent to said movable portion;
wherein the movable portion has a second end portion disposed at a side opposite said fixed portion in a first direction,
wherein acceleration is detected, based on a first capacitance between the movable portion and the first electrode, and a second capacitance between the movable portion and the second electrode, and
wherein a distance in the first direction between the first end portion of the first electrode and the rotation axis is set to a first distance, a distance in the first direction between the second end portion of the first electrode and the rotation axis is set to a second distance, a distance in the first direction between the first end portion of the second electrode and the rotation axis is set to a third distance, and a distance in the first direction between the second end portion of the second electrode and the rotation axis is set to a fourth distance, and the first distance is shorter than the third distance, and the second distance is shorter than the fourth distance.

2. The acceleration sensor according to claim 1 ,
wherein a distance in a second direction perpendicular to the main surface, between a bottom surface of said movable portion and the first electrode, is set to a fifth distance, and a distance in the second direction between a top surface of said movable portion and the second electrode is set to a sixth distance, and the fifth distance is longer than the sixth distance.

3. The acceleration sensor according to claim 1 ,
wherein an area of the first electrode is smaller than an area of the second electrode.

Assignees

• Hitachi Ltd

Inventors

• Isobe Atsushi
• Sakuma Noriyuki
• Takubo Chisaki
• Kamada Yuudai
• Shiota Takashi

Classifications

• G01P15/125 Primary

  by capacitive pick-up · CPC title