Apparatus and method for in-situ calibration of a photoacoustic sensor

Patent metadata

Field	Value
Publication number	US-10527589-B2
Application number	US-201615258646-A
Country	US
Kind code	B2
Filing date	Sep 7, 2016
Priority date	Sep 7, 2015
Publication date	Jan 7, 2020
Grant date	Jan 7, 2020

Abstract

An apparatus for in-situ calibration of a photoacoustic sensor is provided. The apparatus includes a light emitter to emit light along a transmission path to a gas and an acoustic sensor element configured to detect an acoustic signal emitted from the gas based on the received light. Furthermore, the apparatus includes a sensing unit configured to detect the light transmitted along the transmission path and to provide an output signal, and a calibration unit to receive the output signal from the sensing unit and to provide a calibration information based on the output signal received from the sensing unit.

First claim

What is claimed is:

1. A calibration system for in-situ calibration of a photoacoustic sensor, the calibration system comprising:
the photoacoustic sensor comprising:
a light emitter configured to emit light along a transmission path to a gas; and
an acoustic sensor element configured to detect an acoustic signal emitted from the gas based on received light and generate an output signal based on the detected acoustic signal; and

a calibration apparatus comprising:
a first radiation sensor configured to detect the light transmitted along the transmission path and to provide an information signal based on the detected light; and
a calibration unit, comprising at least one processor, configured to receive the information signal from the first radiation sensor and to provide a calibration information based on the information signal from the first radiation sensor.

2. The calibration system according to claim 1 , wherein the first radiation sensor is located at a first distance to the acoustic sensor element and at a second distance to the light emitter, wherein the first distance is smaller than the second distance.

3. The calibration system according to claim 2 , further comprising:
a second radiation sensor configured to detect a current physical characteristic of the light emitter at a position different from a position of the first radiation sensor, and
wherein the second radiation sensor is located in a spatial position that is closer to the light emitter when compared to a spatial position of the first radiation sensor, or
wherein the second radiation sensor is located at a third distance to the light emitter, wherein the third distance is smaller than the second distance.

4. The calibration system according to claim 3 , wherein the calibration unit is configured to determine, based on a difference of a physical characteristic measured by the first radiation sensor and the current physical characteristic measured by the second radiation sensor, whether to apply the calibration information to a signal generator for adjusting the light emitter or to apply the calibration information to the output signal of the acoustic sensor element for correcting the output signal.

5. The calibration system according to claim 1 , wherein the first radiation sensor is located at a spatial position such that the light detected from the first radiation sensor and the light reaching the gas are both attenuated by a same amount.

6. The calibration system according to claim 1 , wherein the first radiation sensor is located at a spatial position with respect to the acoustic sensor element such that a length of an effective transmission path of a physical characteristic to the acoustic sensor element and to the first radiation sensor differs by not more than 20%.

7. The calibration system according to claim 1 , wherein the calibration unit is configured to adjust at least one physical characteristic of the light emitter based on the calibration information to perform the in-situ calibration.

8. The calibration system according to claim 7 , wherein the physical characteristic comprises a temperature of the light emitter, an emissivity of the light emitter, or a radiation of an electromagnetic signal of the light emitter.

9. The calibration system according to any of claim 1 , further comprising:
a processing unit configured to process the output signal of the acoustic sensor element based on the calibration information to obtain an adjusted output signal of the acoustic sensor element.

10. The calibration system according to claim 1 , wherein the light emitter is configured to emit light pulses of different characteristics.

11. The calibration system according to claim 10 , wherein the different characteristics include at least one characteristic selected from a group of characteristics including a different repetition frequency of the light pulses, a different shape of the light pulses, and a different light spectrum.

12. The calibration system according to claim 1 , wherein the first radiation sensor provides the information signal based on a light pulse having a characteristic different from a characteristic of a light pulse used for photoacoustic measurement.

13. The calibration system according to claim 1 , further comprising:
a second radiation sensor configured to detect a current physical characteristic of the light emitter, wherein the calibration unit comprises a threshold switch configured to signal a signal generator to stop feeding the light emitter with an electric signal on a condition a physical characteristic corresponding to the current physical characteristic exceeds a threshold value.

14. The calibration system according to claim 13 , wherein the threshold switch comprises a hysteresis such that when falling behind a further threshold value, the signal generator starts feeding the light emitter with the electric signal.

15. The calibration system according to claim 13 , wherein the second radiation sensor is configured to measure a temperature of a surface of the light emitter by determining a temperature of an environment of the light emitter, or
wherein the first radiation sensor is configured to determine a temperature of the light emitter based on the detected light transmitted along the transmission path.

16. The calibration system according to claim 1 , further comprising:
a signal generator configured to generate an electric signal and feed the light emitter with the electric signal.

17. The calibration system according to claim 16 , wherein the calibration unit is configured to control the signal generator such that the signal generator feeds the light emitter with an electric pulse.

18. The calibration system according to claim 17 , wherein the calibration unit is configured to adjust the electric pulse such that at least one of an edge steepness, an amplitude, or a repetition frequency of the electric pulse is changed.

19. The calibration system according to claim 1 , wherein, when performing an in-situ calibration, the first radiation sensor provides the information signal based on light signals generated in a regular measurement on a measurement gas.

20. The calibration system according to claim 1 , wherein: the light emitter, the acoustic sensor element, the first radiation sensor, and the calibration unit are formed in a common semiconductor substrate, and the first radiation sensor comprises a semiconductor sensor formed within the semiconductor substrate.

21. A method for in-situ calibration of a photoacoustic sensor, the method comprising:
emitting light along a transmission path to a gas;
detecting, by an acoustic sensor element of the photoacoustic sensor, an acoustic signal emitted from the gas based on received light;
generate, by the acoustic sensor element, an output signal based on the detected acoustic signal;
detecting, by a radiation sensor, the light transmitted along the transmission path;
generating, by the radiation sensor, an information signal based on the detected light;
receiving, by a calibration unit, the information signal from the radiation sensor; and
providing, by the calibration unit, calibration information based on the information signal from the radiation sensor.

Assignees

• Infineon Technologies Ag

Inventors

• Kolb Stefan
• Dehe Alfons
• Huber Jochen
• Jost Franz
• Theuss Horst
• Woellenstein Juergen

Classifications

• G01N2021/1704

  in gases · CPC title

• H05B47/10

  Controlling the light source · CPC title

• G01N29/30 Primary

  Arrangements for calibrating or comparing, e.g. with standard objects · CPC title

• G01N2291/021

  Gases · CPC title

• G01R17/02

  Arrangements in which the value to be measured is automatically compared with a reference value · CPC title