Clean air device and air cleaning unit inspecting method

Patent metadata

Field	Value
Publication number	US-10525458-B2
Application number	US-201415506274-A
Country	US
Kind code	B2
Filing date	Nov 17, 2014
Priority date	Nov 17, 2014
Publication date	Jan 7, 2020
Grant date	Jan 7, 2020

Abstract

With respect to a clean air device, in order to provide a device structure and an air cleaning unit inspecting method capable of supplying clean air through a filter and also capable of measuring the amount of dust in a workroom space in which blown air forms a laminar flow such that an increase in the amount of dust can be accurately detected, the clean air device comprises an air cleaning unit, a rectifying unit arranged downstream of the air cleaning unit configured to rectify air blown from the air cleaning unit and form a laminar flow, and a workroom arranged downstream of the rectifying unit, wherein at least one suction port is provided on a wall surface in a space formed between the air cleaning unit and the rectifying unit, configured to draw out the air in the space to an exterior.

First claim

The invention claimed is:

1. A clean air device comprising:
an air cleaning unit;
a rectifying unit arranged downstream of the air cleaning unit configured to rectify air blown from the air cleaning unit and form a laminar flow; and
a workroom arranged downstream of the rectifying unit,
wherein at least one suction port is provided on a wall surface in a space that is physically located between the air cleaning unit and the rectifying unit, configured to draw out the air in the space to an exterior,
at least one of the suction ports provided on the wall surface is connected to a dust measuring device to measure dust in an air within the space by the dust measuring device,
a charging port communicated with an exterior is provided on the wall surface of the clean air device forming the space on an upstream side of the air cleaning unit, and
the charging port is connected to a simulated dust generator, such that simulated dust is supplied from the simulated dust generator to the space on the upstream side of the air cleaning unit.

2. The clean air device according to claim 1 ,
wherein a measurement port comprising the at least one suction port arranged in a lattice shape, a spiral shape or a linear shape is provided within the space, and the measurement port is connected from an inner side of the wall surface to the suction port provided on the wall surface.

3. The clean air device according to claim 1 ,
wherein a relative angle formed between a blowout surface of the air cleaning unit and the rectifying unit opposed thereto is 0 degrees or greater and smaller than 180 degrees.

4. The clean air device according to claim 1 ,
wherein the clean air device is a clean work station.

5. The clean air device according to claim 1 ,
wherein the clean air device is a safety cabinet.

6. An air cleaning unit inspecting method of a clean air device comprising an air cleaning unit, a rectifying unit arranged downstream of the air cleaning unit configured to rectify air blown from the air cleaning unit and form a laminar flow, and a workroom arranged downstream of the rectifying unit, the method comprising:
connecting a dust measuring device to at least one suction port provided on a wall surface of a space that is physically located between the air cleaning unit and the rectifying unit;
sucking air within the space formed between the air cleaning unit and the rectifying unit by the dust measuring device, and measuring dust contained in the air;
connecting a simulated dust generator to a charging port provided on the wall surface of the space formed upstream of the air cleaning unit; and
executing an operation to supply the simulated dust to the space formed upstream of the air cleaning unit by the simulated dust generator, and an operation to measure the dust by the dust measuring device.

Assignees

• Hitachi Industry Equipment Systems Co Ltd

Inventors

• Ono Keiichi
• Sato Hirotoshi

Classifications

• B01L1/04 Primary

  Dust-free rooms or enclosures · CPC title

• B01L2200/141

  Preventing contamination, tampering · CPC title

• B01L1/50

  for storing hazardous materials in the laboratory, e.g. cupboards, waste containers (sample containers B01L3/50) · CPC title

• B01L2200/082

  Handling hazardous material · CPC title

• B01L2300/045

  whereby the whole cover is slidable · CPC title