Substrate transfer apparatus

Patent metadata

Field	Value
Publication number	US-10522379-B2
Application number	US-201715707023-A
Country	US
Kind code	B2
Filing date	Sep 18, 2017
Priority date	Oct 31, 2016
Publication date	Dec 31, 2019
Grant date	Dec 31, 2019

Abstract

A substrate transfer apparatus includes: a chamber including a lower surface, an upper surface opposing the lower surface, and a side surface extending between the lower surface and the upper surface; and a fan filter unit disposed on the upper surface of the chamber and configured to introduce air into the chamber. The chamber includes an inclined surface extending from the upper surface to the side surface and positioned to a side of the fan filter unit.

First claim

What is claimed is:

1. A substrate transfer apparatus comprising:
a chamber including a lower surface, an upper surface opposing the lower surface, and a side surface extending between the lower surface and the upper surface; and
a fan filter unit disposed above and on the upper surface of the chamber and configured to introduce air into the chamber,
wherein the chamber includes an inclined surface extending from the upper surface to the side surface and positioned to a side of the fan filter unit,
wherein the substrate transfer apparatus further comprises a corner block mounted below the upper surface in a corner portion at which the upper surface and the side surface meet to provide the inclined surface within the chamber,
wherein an opening is defined in the upper surface for allowing introduction of air into the chamber, wherein the corner block comprises a plurality of divided members, and wherein the plurality of divided members are arranged around an entire periphery of the opening, and
wherein the inclined surface provided by the corner block is flat.

2. The substrate transfer apparatus of claim 1 , wherein the chamber comprises an entrance portion in the side surface through which a substrate can be transferred, and the inclined surface is positioned above the entrance portion.

3. The substrate transfer apparatus of claim 1 , wherein the corner block is detachably mounted in the chamber and comprises a plurality of divided members.

4. The substrate transfer apparatus of claim 1 , wherein the fan filter unit comprises:
a fan configured to introduce external air into the chamber and to blow the air downwardly within the chamber;
a filter configured to filter the external air;
a guide portion configured to adjust a blowing direction of the external air; and
a housing accommodating the fan, the filter, and the guide portion in an interior of the housing.

5. The substrate transfer apparatus of claim 4 , wherein the guide portion comprises a first vane configured to guide the external air to be blown in a direction toward the lower surface, and a second vane configured to guide the external air to be blown in a direction toward the side surface.

6. The substrate transfer apparatus of claim 1 , further comprising an exhaust portion provided in the lower surface of the chamber and configured to externally discharge air from an interior of the chamber.

7. The substrate transfer apparatus of claim 1 , wherein the chamber is disposed between a container for receiving a substrate and a process chamber, and the apparatus further includes a transfer robot disposed in the chamber that is configured to transfer the substrate between the container and the process chamber.

8. The substrate transfer apparatus of claim 1 , further comprising a control unit configured to control operations of the fan filter unit.

9. The substrate transfer apparatus of claim 1 , wherein the chamber comprises an opening in the upper surface for allowing introduction of air into the chamber.

10. The substrate transfer apparatus of claim 9 , wherein the fan filter unit overlaps the upper surface and completely covers the opening.

11. A substrate transfer apparatus comprising:
a chamber including a lower surface, an upper surface opposing the lower surface, and a side surface extending between the lower surface and the upper surface; and
a fan filter unit disposed above and on the upper surface of the chamber and configured to allow air to be introduced into the chamber,
wherein the chamber includes an inclined surface extending from the upper surface to the side surface and positioned to a side of the fan filter unit,
wherein the substrate transfer apparatus further comprises a corner block mounted below the upper surface in a corner portion at which the upper surface and the side surface meet to provide the inclined surface within the chamber,
wherein the fan filter unit protrudes downwardly from the upper surface toward the lower surface to allow the air to be blown radially into the chamber,
wherein an opening is defined in the upper surface for allowing introduction of air into the chamber, wherein the corner block comprises a plurality of divided members, and wherein the plurality of divided members are arranged around an entire periphery of the opening,
wherein the inclined surface provided by the corner block is flat.

12. The substrate transfer apparatus of claim 11 , wherein a portion of the fan filter unit that is exposed to an interior of the chamber protrudes downwardly in a dome shape.

13. A substrate transfer apparatus comprising:
a chamber including a lower wall, an upper wall and a side wall extending between the lower wall and the upper wall; and
a fan filter unit above and on the upper wall,
wherein the fan filter unit is configured to draw external air into the chamber and direct the air toward or along an inner surface of the side wall,
wherein the upper wall extends inwardly from the side wall, and wherein an opening is defined in the upper wall and the fan filter unit covers the opening, the substrate transfer apparatus further comprising a plurality of corner block members below the upper wall and arranged around an entire periphery of the opening, with each corner block member extending between the upper wall and the side wall to define an inclined surface between the upper wall and the side wall, and
wherein the inclined surface defined by each corner block member is flat.

14. The substrate transfer apparatus of claim 13 , wherein the fan filter unit comprises a guide portion including a plurality of first guide vanes configured to direct the air downwardly toward the lower wall and a plurality of second guide vanes arranged around the first guide vanes and configured to direct the air toward the inner surface of the side wall.

15. The substrate transfer apparatus of claim 13 , wherein the fan filter unit comprises a filter that protrudes downwardly below the upper wall and is curved convexly relative to the lower wall.

Assignees

• Samsung Electronics Co Ltd

Inventors

• Kong Dae Wee
• Park Kang Min
• Choi Chul Hwan
• Hong Yong Joon
• Kim Kang Soo
• Roh Sang Ho
• Lee Heok Jae
• Choi Sang Jin

Classifications

• H10P72/1926

  characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier · CPC title

• H10P72/1911

  characterised by materials, roughness, coatings or the like · CPC title

• H10P72/3406 Primary

  involving removal of lid, door or cover · CPC title

• F24F1/0071

  with means for purifying supplied air (perfuming or deodorising means F24F1/008) · CPC title

• B01D46/0002

  Casings; Housings; Frame constructions · CPC title