Integrated photonic device for modulating the phase of a light signal

Patent metadata

Field	Value
Publication number	US-10520677-B2
Application number	US-201816231452-A
Country	US
Kind code	B2
Filing date	Dec 22, 2018
Priority date	Dec 22, 2017
Publication date	Dec 31, 2019
Grant date	Dec 31, 2019

Abstract

An integrated photonic device comprises: an input waveguide configured to extend in an input plane, and an output waveguide configured to extend in an output plane, wherein the output plane is parallel to or contained within the input plane; an input coupler optically coupled to the input waveguide, wherein the input coupler is configured to redirect a light signal out of the input waveguide and the input plane; a light property modifier configured to receive the light signal from the input coupler and reflect the light signal towards the output plane, wherein the light property modifier is configured to selectively adjust an optical path length of the light signal; and an output coupler optically coupled to the output waveguide, wherein the output coupler is configured to receive the reflected light signal from the light property modifier and redirect the light signal into the output waveguide and the output plane.

First claim

The invention claimed is:

1. An integrated photonic device comprising:
an input waveguide arrangement comprising an input waveguide configured to extend in an input plane, and an output waveguide arrangement comprising an output waveguide configured to extend in an output plane, wherein the output plane is parallel to or contained within the input plane;
an input coupler optically coupled to the input waveguide, wherein the input coupler is configured to redirect a light signal out of the input waveguide and the input plane;
a light property modifier configured to receive the light signal from the input coupler and reflect the light signal towards the output plane; and
an output coupler optically coupled to the output waveguide, wherein the output coupler is configured to receive the reflected light signal from the light property modifier and redirect the light signal into the output waveguide and the output plane;
wherein the light property modifier is configured to selectively adjust an optical path length of the light signal between the input coupler and the output coupler.

2. The integrated photonic device according to claim 1 , wherein the input waveguide arrangement, the output waveguide arrangement, and the light property modifier are integrated on one and the same semiconductor substrate.

3. The integrated photonic device according to claim 1 , wherein the light property modifier comprises a reflector configured to be movable along an axis being substantially perpendicular to the input plane in order to selectively adjust the optical path length of the light signal.

4. The integrated photonic device according to claim 3 , wherein the reflector is selected from the group consisting of: metal reflectors, Bragg stack reflectors, flat lenses, and high contrast grating reflectors.

5. The integrated photonic device according to claim 3 , further comprising an actuator configured to move the reflector in the direction substantially perpendicular to the input plane.

6. The integrated photonic device according to claim 5 , wherein the actuator is selected from the group consisting of: capacitive actuators, piezoelectric actuators, magnetic actuators, and thermal actuators.

7. The integrated photonic device according to claim 5 , wherein the actuator is a microelectromechanical system, MEMS, structure configured to be controlled by an applied voltage and to move the light property modifier in the direction substantially perpendicular to the first plane such that linear adjustment of the optical path length of the light signal in response to an applied actuation signal is achieved.

8. The integrated photonic device according to claim 7 , wherein the MEMS structure comprises a cantilever and/or a membrane.

9. The integrated photonic device according to claim 1 , wherein the light property modifier comprises a material having a refractive index affectable by an external signal in order to selectively adjust the optical path length of the light signal.

10. The integrated photonic device according to claim 1 , wherein the input coupler is a backward scattering grating coupler and the output coupler is a backward scattering grating coupler.

11. The integrated photonic device according to claim 1 , wherein the input coupler is a backward scattering grating coupler and the output coupler is a forward scattering grating coupler.

12. The integrated photonic device according to claim 1 , wherein the input coupler is a forward scattering grating coupler and the output coupler is a forward scattering grating coupler.

13. The integrated photonic device according to claim 1 , wherein the input and output waveguide arrangements comprises silicon nitride, SiN.

14. The integrated photonic device according to claim 1 , wherein the light signal comprises visible light.

15. An integrated photonic device comprising:
an input waveguide arrangement comprising an input waveguide configured to extend in an input plane, and an output waveguide arrangement comprising an output waveguide configured to extend in an output plane, wherein the output plane is parallel to or contained within the input plane;
an input coupler optically coupled to the input waveguide, wherein the input coupler is configured to redirect a light signal out of the input waveguide and the input plane;
a light property modifier configured to receive the light signal from the input coupler and reflect the light signal towards the output plane, wherein the light property modifier is configured to selectively adjust an optical path length of the light signal; and
an output coupler optically coupled to the output waveguide, wherein the output coupler is configured to receive the reflected light signal from the light property modifier and redirect the light signal into the output waveguide and the output plane, wherein the light property modifier comprises a material having a refractive index affectable by an external signal in order to selectively adjust the optical path length of the light signal.

16. An integrated photonic device comprising:
an input waveguide arrangement comprising an input waveguide configured to extend in an input plane, and an output waveguide arrangement comprising an output waveguide configured to extend in an output plane, wherein the output plane is parallel to or contained within the input plane;
an input coupler optically coupled to the input waveguide, wherein the input coupler is configured to redirect a light signal out of the input waveguide and the input plane;
a light property modifier configured to receive the light signal from the input coupler and reflect the light signal towards the output plane, wherein the light property modifier is configured to selectively adjust an optical path length of the light signal; and
an output coupler optically coupled to the output waveguide, wherein the output coupler is configured to receive the reflected light signal from the light property modifier and redirect the light signal into the output waveguide and the output plane, wherein the input coupler is a backward scattering grating coupler and the output coupler is a backward scattering grating coupler; or wherein the input coupler is a backward scattering grating coupler and the output coupler is a forward scattering grating coupler or wherein the input coupler is a forward scattering grating coupler and the output coupler is a forward scattering grating coupler.

Assignees

• Imec Vzw

Inventors

• Figeys Bruno
• Rochus Veronique
• Jansen Roelof
• Rottenberg Xavier

Classifications

• G02B6/12002

  Three-dimensional structures · CPC title

• G02B6/3524

  the optical element being refractive · CPC title

• G02B6/3512 Primary

  the optical element being reflective, e.g. mirror · CPC title

• G02B6/3518

  the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device (MEMS devices in general B81B; manufacture of MEM devices in general B81C; micromechanical devices controlling the direction of light G02B26/0833) · CPC title

• G02B6/3596

  With planar waveguide arrangement, i.e. in a substrate, regardless if actuating mechanism is outside the substrate · CPC title