Semiconductor optical device monolithically integrating optical waveguides with photodiodes having a shared bias pad and apparatus implementing the same

Patent metadata

Field	Value
Publication number	US-10514516-B2
Application number	US-201815909235-A
Country	US
Kind code	B2
Filing date	Mar 1, 2018
Priority date	Mar 3, 2017
Publication date	Dec 24, 2019
Grant date	Dec 24, 2019

Abstract

A functional optical device applicable to a coherent optical communication system as a front end device is disclosed. The functional optical device includes a pair of light-receiving elements of a type of waveguide photodiode (PD), a pair of signal pads, a pair of ground pads, a bias pad, and a substrate that monolithically integrates those elements thereon. The light-receiving elements generate a photocurrent complementary to each other in respective anodes thereof; while, receive biases through the bias pad common to the light-receiving elements. Those pads are disposed along an edge of the substrate such that the signal pads put the bias pads therebetween, and the ground pads put the signal pads and the bias pad therebetween.

First claim

What is claimed is:

1. A functional optical device implemented in a coherent communication system, comprising:
a coupling unit that generates a pair of optical signals complementary to each other by interfering a signal light with a local light;
a pair of optical waveguides that carry the optical signals,
a pair of light-receiving elements of a waveguide photodiode (PD) type each providing an anode and a cathode, the light-receiving elements generating a pair of photocurrents complementary to each other based on the optical signals, and
a pair of signal pads each connected with the anodes of the light-receiving elements, a pair of ground pads, and a bias pad connected with the respective cathodes of the light-receiving elements; and
a substrate that monolithically integrates the optical waveguides, the light-receiving elements, the signal pads, the ground pads, and the bias pad thereon,
wherein the bias pad is arranged in-between the signal pads, and the signal pads and the bias pad are arranged in-between the ground pads.

2. The functional optical device according to claim 1 ,
wherein the signal pads, the ground pads, and the bias pad are arranged along one edge of the substrate.

3. The functional optical device according to claim 1 ,
wherein the substrate provides vias under the ground pads and a back metal on a back surface of the substrate, the vias piercing the substrate, and
wherein the ground pads are directly connected with the back metal through the vias.

4. The functional optical device according to claim 1 ,
wherein the substrate provides an n-type buffer layer on a whole top surface of the substrate, and
wherein the light-receiving elements each provide a mesa on the n-type buffer layer, each mesa including an absorption layer and a p-type cladding layer, the n-type buffer layer and the p-type cladding layer forming an optical confinement structure that confines the optical signal within the absorption layer.

5. The functional optical device according to claim 1 ,
wherein the substrate provides an n-type buffer layer on a whole surface of the substrate, and
wherein the optical waveguides each provide a mesa on the n-type buffer layer, each mesa including a core layer and a cladding layer, the n-type buffer layer and the cladding layer forming an optical confinement structure that confines the optical signal within the core layer.

6. The functional optical device according to claim 1 ,
wherein the substrate provides an n-type buffer layer on a whole surface of the substrate,
wherein the substrate provides a pair of grooves,
wherein the light receiving elements are arranged in-between the pair of grooves, and
wherein the pair of grooves is formed by removing the n-type buffer layer and exposes the substrate therein.

7. The functional optical device according to claim 6 ,
wherein the grooves extend along the optical waveguides optically coupled with the light-receiving elements.

8. The functional optical device according to claim 7 ,
wherein the grooves each extend along the optical waveguides toward the coupling unit.

9. The functional optical device according to claim 1 ,
wherein the functional optical device includes a pair of units each including the optical waveguides, the light-receiving elements, the signal pads, the ground pads, and the bias pad,
wherein the coupling unit generates two pairs of the optical signals, one of the pairs of the optical signals being provided to one of the units, another of the pairs of the optical signals being provided to another of the units, and
wherein the functional optical device further includes a groove between the units, the groove exposing the substrate therein.

10. The functional optical device according to claim 1 ,
wherein the functional optical device includes a pair of units each including the optical waveguides, the light-receiving elements, the signal pads, the ground pads, and the bias pad,
wherein the coupling unit generates two pairs of the optical signals, one of the pairs of the optical signals being provided to one of the units, another of the pairs of the optical signals being provided to another of the units, and
wherein each of the units further includes a groove extending along one of the optical waveguides of the unit disposed closer to the other of the units, respectively.

11. The functional optical device according to claim 10 ,
wherein each of the units further includes a second groove extending along the one of the optical waveguides disposed closer to the other unit, and
wherein the one of the optical waveguides disposed closer to the other unit is arranged in-between the groove and the second groove.

12. An optical apparatus implemented in a coherent communication system, the optical apparatus optically receiving signal light and local light and outputting an electrical signal, the optical apparatus comprising:
a functional optical device claimed in claim 1 ;
an amplifier unit outputting the electrical signal, the amplifier unit providing a pair of ground pads connected with the ground pads in the functional optical device, a pair of signal pads connected with the signal pads in the functional optical device, and a bias pad connected in the functional optical device; and
bonding wires each connecting the ground pads, the signal pads, and the bias pads between the functional optical device and the amplifier unit,
wherein the bonding wire connecting the bias pad of the functional optical device with the bias pad of the amplifier unit is located between the bonding wires connecting the signals pads of the functional optical device with the signal pads of the amplifier unit, and
wherein the bonding wires connecting the signal pads of the functional optical device with the signal pads of the amplifier unit, and the bonding wire connecting the bias pad of the functional optical device with the bias pad of the amplifier unit, are located between the bonding wires connecting the ground pads of the functional optical device with the ground pads of the amplifier unit.

Assignees

• Sedi Inc

Inventors

• Yoneda Yoshihiro
• Masuyama Ryuji
• Okimoto Takuya

Classifications

• G02B6/26

  Optical coupling means (G02B6/36, G02B6/42 take precedence) · CPC title

• G02B6/12004

  Combinations of two or more optical elements · CPC title

• H04B10/691

  Arrangements for optimizing the photodetector in the receiver · CPC title

• G02B6/4295 Primary

  coupling with semiconductor devices activated by light through the light guide, e.g. thyristors, phototransistors · CPC title

• H01L31/101

  Electricity · mapped topic