Apparatus and techniques for electronic device encapsulation

Patent metadata

Field	Value
Publication number	US-10512931-B2
Application number	US-201715421190-A
Country	US
Kind code	B2
Filing date	Jan 31, 2017
Priority date	Jan 21, 2014
Publication date	Dec 24, 2019
Grant date	Dec 24, 2019

Abstract

Apparatus and techniques for use in manufacturing a light emitting device, such as an organic light emitting diode (OLED) device can include using one or more modules having a controlled environment. The controlled environment can be maintained at a pressure at about atmospheric pressure or above atmospheric pressure. The modules can be arranged to provide various processing regions and to facilitate printing or otherwise depositing one or more patterned organic layers of an OLED device, such as an organic encapsulation layer (OEL) of an OLED device. In an example, uniform support for a substrate can be provided at least in part using a gas cushion, such as during one or more of a printing, holding, or curing operation comprising an OEL fabrication process. In another example, uniform support for the substrate can be provided using a distributed vacuum region, such as provided by a porous medium.

First claim

What is claimed is:

1. A coating system for providing a coating on a substrate, the coating system comprising:
an inkjet printing system to deposit an organic material on the substrate; and
a curing module comprising a stacked configuration of optical curing regions, an ultraviolet energy source, and a window separating the optical curing regions from the ultraviolet energy source, the ultraviolet energy source being positioned to transmit ultraviolet light through the window to cure the organic material deposited on the substrate located in one of the optical curing regions,
wherein the optical curing regions are offset from each other and each of the optical curing regions is sized to receive the substrate to cure the organic material to form an organic layer over at least a portion of a light-emitting device fabricated on the substrate,
wherein each of the inkjet printing system and the curing module is housed in an enclosure to provide a controlled processing environment at or near atmospheric pressure.

2. The coating system of claim 1 , wherein the curing module is configured to hold the substrate for a specified duration when the substrate is received in any one of the optical curing regions.

3. The coating system of claim 1 , wherein the curing module is configured to hold the substrate for a specified duration after deposition of the organic material and before optical curing of the organic material to form the organic layer.

4. The coating system of claim 1 , wherein the controlled processing environment comprises a controlled gas environment that is nonreactive with the organic material deposited on the substrate.

5. The coating system of claim 4 , wherein the controlled gas environment comprises nitrogen.

6. The coating system of claim 1 , wherein the controlled processing environment maintains reactive species at or below a specified limit.

7. The coating system of claim 6 , wherein the reactive species comprise at least one of ozone, oxygen, water vapor, and organic solvent vapor.

8. The coating system of claim 7 , wherein the specified limit is 100 ppm.

9. The coating system of claim 1 , wherein the controlled processing environment comprises a particulate contamination maintained at or below a specified limit.

10. The coating system of claim 9 , wherein the specified limit of the particulate contamination is better than a Class 10 specification for particles greater than or equal to 2 microns in diameter.

11. The coating system of claim 1 , further comprising a substrate transfer module comprising a chamber configured to receive the substrate from an atmospheric environment different from the controlled processing environment of the inkjet printing system and the curing module.

12. The coating system of claim 1 , wherein the inkjet printing system further comprises a substrate support apparatus to establish a pressurized gas cushion between the substrate and the substrate support apparatus.

13. The coating system of claim 12 , wherein the substrate support apparatus comprises a porous ceramic material.

14. The coating system of claim 1 , wherein the curing module further comprises a substrate support apparatus to establish a pressurized gas cushion between the substrate and the substrate support apparatus.

15. The coating system of claim 14 , wherein the substrate support apparatus comprises a porous ceramic material.

16. The coating system of claim 1 , wherein the inkjet printing system is further configured to deposit the organic material so as to form the organic layer in a pattern on the substrate.

17. The coating system of claim 1 , further comprising a gas recirculation system that comprises a pressurized gas loop operably coupled to supply a pressurized gas to a pneumatic component of at least one of the inkjet printing system and the curing module.

18. The coating system of claim 17 , wherein the pressurized gas loop comprises a pressure-controlled bypass loop configured to compensate for variable demand of the pressurized gas supplied to the pneumatic component so as to maintain the controlled processing environment at or near atmospheric pressure.

19. The coating system of claim 1 , wherein the enclosure in which each of the inkjet printing system and curing module is housed is configured to provide the processing environment at a pressure above atmospheric pressure.

20. The coating system of claim 19 , wherein the enclosure in which each of the inkjet printing system and curing module is housed is configured to provide the processing environment at a pressure at about 2 mbarg or greater.

21. The coating system of claim 19 , wherein the enclosure in which each of the inkjet printing system and curing module is housed is configured to provide the processing environment at about 6 mbarg or greater.

22. The coating system of claim 1 , wherein the ultraviolet energy source comprises a linear array of LED sources, the substrate and linear array of LED sources being moveable relative to each other.

23. The coating system of claim 22 , wherein the linear array has a length so as to span across at least one of a length and a width of the substrate.

24. The coating system of claim 22 , further comprising an optical sensor positioned to detect a failure of one or more of the LED sources of the ultraviolet energy source.

25. The coating system of claim 1 , further comprising a substrate support apparatus to establish a pressurized gas cushion between the substrate and the substrate support apparatus in both of the inkjet printing system and in the curing module.

26. The coating system of claim 15 , wherein:
the inkjet printing system comprises an input region, a printing region, and an output region, and
the substrate support apparatus is configured to control floatation of the substrate in at least one of the input region, the printing region, and the output region in a different manner from another of the input region, the printing region, and the output region.

27. The coating system of claim 1 , wherein the window is configured to converge, diverge, or collimate the ultraviolet energy transmitted through the window.

Assignees

• Kateeva Inc

Inventors

• Ko Alexander Sou-Kang
• Mauck Justin
• Vronsky Eliyahu
• Madigan Conor F
• Rabinovich Eugene
• Harjee Nahid
• Buchner Christopher
• Lewis Gregory

Classifications

• H10P72/3314

  Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers · CPC title

• H10P72/0468

  comprising a chamber adapted to a particular process · CPC title

• H10P72/0462

  characterised by the construction of the processing chambers, e.g. modular processing chambers · CPC title

• H10P72/0461

  characterised by the presence of two or more transfer chambers · CPC title

• H10P72/0452

  characterised by the layout of the process chambers · CPC title