Smart package

Patent metadata

Field	Value
Publication number	US-10508773-B2
Application number	US-201916271339-A
Country	US
Kind code	B2
Filing date	Feb 8, 2019
Priority date	Feb 12, 2015
Publication date	Dec 17, 2019
Grant date	Dec 17, 2019

Abstract

A fluid supply package is described, which includes a fluid storage and dispensing vessel, and a fluid dispensing assembly coupled to the vessel and configured to enable discharge of fluid from the vessel under dispensing conditions, wherein the fluid supply package includes an informational augmentation device thereon, e.g., at least one of a quick read (QR) code and an RFID tag, for informational augmentation of the package. Process systems are described including process tools and one or more fluid supply packages of the foregoing type, wherein the process tool is configured for communicative interaction with the fluid supply package(s). Various communicative arrangements are described, which are usefully employed to enhance the efficiency and operation of process systems in which fluid supply packages of the foregoing type are employed.

First claim

What is claimed is:

1. A fluid supply package, comprising
a pressure regulated fluid storage and dispensing vessel including at least one pressure regulated disposed in an interior volume of the fluid storage and dispending vessel,
a fluid dispensing assembly coupled to the vessel and configured to enable discharge of fluid from the vessel under dispensing conditions, and
an informational augmentation device disposed on the fluid storage and dispensing vessel.

2. The fluid supply package of claim 1 , wherein the informational augmentation device comprises at least one of a quick read (QR) code and an RFID tag.

3. The fluid supply package of claim 1 , wherein the informational augmentation device comprises an RFID tag.

4. The fluid supply package of claim 3 , wherein the RFID tag comprises a tag selected from the group consisting of: an active reader passive tag (ARPT); a passive reader active tag (PRAT); and an active reader active tag (ARAT).

5. The fluid supply package of claim 3 , wherein the RFID tag comprises a thermally-resistive RFID device that is effective to provide an output indicative of temperature of fluid in the fluid supply package.

6. The fluid supply package of claim 1 , wherein the vessel contains a storage medium that is adapted to retain fluid in a stored state under storage conditions, and to release the fluid for discharge from the vessel under dispensing conditions.

7. The fluid supply package of claim 1 , wherein the vessel contains at least one interiorly disposed pressure regulator therein configured to dispense fluid from the vessel to the fluid dispensing assembly at pressure determined by a set point of the pressure regulator.

8. The fluid supply package of claim 1 , wherein the informational augmentation device is readable by a machine reader to initiate accession of a website, display of a webpage, transmission of an email, or other telecommunication action providing information related to the fluid supply package, a fluid packaged therein, or use of the fluid supply package or fluid.

9. The fluid supply package of claim 1 , further comprising an interlock structure configured to preclude fluid dispensing from the fluid storage and dispensing vessel unless unlocked by an unlocking signal requiring for its generation information from the informational augmentation device.

10. The fluid supply package of claim 1 , wherein the informational augmentation device comprises a quick read (QR) code, and the interlock structure is unlockable by an unlocking signal requiring information from the quick read (QR) code for its generation.

11. The fluid supply package of claim 1 , wherein the informational augmentation device comprises an RFID tag, and the interlock structure is unlockable by an unlocking signal requiring information from the RFID tag for its generation.

12. A process system comprising:
at least one fluid supply package comprising a pressure regulated fluid storage and dispensing vessel including at least one pressure regulated disposed in an interior volume of the fluid storage and dispending vessel, a fluid dispensing assembly coupled to the fluid storage and dispensing vessel and configured to enable discharge of fluid from the vessel under dispensing conditions, and an informational augmentation device disposed on the fluid storage and dispending vessel; and
a fluid-utilizing process tool configured to receive fluid from the at least one fluid supply package under the dispensing conditions.

13. The process system of claim 12 , wherein the process tool includes at least one communicational device that is communicationally interactive with the informational augmentation device on the fluid supply package for enabling operation of the process tool.

14. The process system of claim 12 , wherein the process tool is not operationally competent until communicational interaction of the process tool communicational device with the informational augmentation device on the fluid supply package satisfies a predetermined operational communication protocol.

15. The process system of claim 12 , wherein the predetermined operational communication protocol comprises verification of identity of the fluid supply package from fluid supply package information contained in the informational augmentation device on the fluid supply package.

16. The process system of claim 12 , wherein the process tool comprises at least one of an ion implantation process tool, a chemical vapor deposition process tool, and etching tool.

17. The process system of claim 12 , wherein the at least one fluid supply package is contained in a gas box that is ventilated with ventilation gas, wherein the process tool includes at least one communicational device that is communicationally interactive with the informational augmentation device on the fluid supply package, wherein the informational augmentation device on the fluid supply package comprises information indicative of pressure in the fluid supply package vessel, and wherein said at least one communicational device is configured to receive the pressure information and to output a control signal for controllably adjusting ventilation gas flow rate through the gas box in response to the pressure of the fluid in the fluid supply package.

Assignees

• Entegris Inc

Inventors

• Sweeney Joseph D
• Jones Edward Edmiston
• Despres Joseph Robert
• Ray Richard S
• Van Buskirk Peter C
• Sturm Edward A
• Scannell Christopher

Classifications

• F17C2205/058

  by Radio Frequency Identification · CPC title

• F17C2205/05

  Vessel or content identifications, e.g. labels · CPC title

• F17C2270/0518

  Semiconductors · CPC title

• G06K19/0723

  the record carrier comprising an arrangement for non-contact communication, e.g. wireless communication circuits on transponder cards, non-contact smart cards or RFIDs · CPC title

• F17C2205/0391

  inside the pressure vessel · CPC title