Nanotransfer printing method and surface-enhanced raman scattering substrate, surface-enhanced raman scattering vial and surface-enhanced raman scattering patch manufactured using the same

Patent metadata

Field	Value
Publication number	US-10507604-B2
Application number	US-201514884529-A
Country	US
Kind code	B2
Filing date	Oct 15, 2015
Priority date	Oct 29, 2014
Publication date	Dec 17, 2019
Grant date	Dec 17, 2019

Abstract

A nanotransfer printing method, including the steps of coating a polymer thin film on a template substrate where a surface pattern is formed, fabricating the polymer thin film into a thin-film replica mold by using the polymer thin film and an adhesive film, forming nanostructures on the thin-film replica mold, selectively weakening an adhesive force between the adhesive film and the thin-film replica mold, and transferring the nanostructures into a target object, is provided.

First claim

What is claimed is:

1. A nanotransfer printing method comprising:
coating a polymer thin film on a template substrate where a surface pattern is formed;
fabricating the polymer thin film into a thin-film replica mold by using the polymer thin film and an adhesive film;
forming nanostructures on the thin-film replica mold;
selectively weakening an adhesive force between the adhesive film and the polymer thin film of the thin-film replica mold; and
transferring the nanostructures onto a target object,
wherein the selective weakening of the adhesive force between the adhesive film and the polymer thin film of the thin-film replica mold comprises:
injecting an organic solvent vapor between the adhesive film and the polymer thin film of the thin-film replica mold to reduce interfacial detachment energy.

2. The nanotransfer printing method of claim 1 , wherein the forming of the nanostructures comprises:
depositing a functional material on the thin-film replica mold through an angled deposition.

3. The nanotransfer printing method of claim 2 , wherein the depositing of the functional material on the thin-film replica mold comprises:
depositing the functional material on the thin-film replica mold, which is slanted to have a specific angle with a surface of the thin-film replica mold that is prepared for the deposition of the thin-film replica mold in a direction of the deposition, to deposit the functional material only on protruded parts of the surface of the thin-film replica mold that is prepared for the deposition of the thin-film replica mold.

4. The nanotransfer printing method of claim 1 , wherein the template substrate is formed with a rugged type of the surface pattern through a reactive ion etching process and a patterning process including at least one of photolithography, block copolymer self-assembling lithography, or E-beam lithography.

5. The nanotransfer printing method of claim 1 , wherein the coating of the polymer thin film comprises one of:
spreading a monolayered thin film and forming the polymer thin film; and
sequentially spreading a first thin film and a second thin film and forming the polymer thin film as a multilayered thin film.

6. The nanotransfer printing method of claim 1 , wherein the coating of the polymer thin film comprises:
spreading the polymer thin film through at least one of spin coating, deep coating, or spray coating.

7. The nanotransfer printing method of claim 1 , wherein the fabricating of the polymer thin film into the thin-film replica mold comprises:
uniformly attaching the adhesive film to a side of the polymer thin film; and
separating the polymer thin film, to which the adhesive film is attached, from the template substrate.

8. The nanotransfer printing method of claim 1 , wherein the injecting of the organic solvent vapor between the adhesive film and the polymer thin film of the thin-film replica mold comprises one of:
touching a polymer pad, which contains an organic solvent, to the polymer thin film of the thin-film replica mold and providing the organic solvent vapor; and
providing the organic solvent vapor that is evaporated from a liquid organic solvent.

9. The nanotransfer printing method of claim 8 , wherein the organic solvent has a solubility parameter that is similar to that of at least one of the polymer thin film or the adhesive film.

10. The nanotransfer printing method of claim 1 , wherein the transferring of the nanostructures onto the target object comprises:
touching the adhesive film and the thin-film replica mold, in which the nanostructures are formed, to the target object to make the nanostructures meet the target object; and
separating the thin-film replica mold and the adhesive film from the target object to make the nanostructures transferred onto the target object.

11. The nanotransfer printing method of claim 10 , wherein the separating of the thin-film replica mold and the adhesive film from the target object comprises:
separating the adhesive film from the thin-film replica mold that is touched to the target object; and
using an organic solvent to remove the thin-film replica mold that is touched to the target object.

12. The nanotransfer printing method of claim 1 , further comprising:
repeating the transferring of the nanostructures onto the target object to generate a three-dimensional nanostructured SERS device with a stack of a plurality of layers.

13. The nanotransfer printing method of claim 1 , wherein the transferring of the nanostructures onto the target object further comprises:
transferring the nanostructures onto a metallic thin film.

14. A nanotransfer printing method comprising:
coating a polymer thin film on a template substrate where a surface pattern is formed;
fabricating the polymer thin film into a thin-film replica mold by using the polymer thin film and an adhesive film;
forming nanostructures on the thin-film replica mold;
selectively weakening an adhesive force between the adhesive film and the polymer thin film of the thin-film replica mold; and
transferring the nanostructures onto a target object,
wherein the transferring of the nanostructures into the target object comprises:
touching the adhesive film and the thin-film replica mold, in which the nanostructures are formed, to a polymer pad to make the nanostructures meet the polymer pad;
separating the thin-film replica mold and the adhesive film from the polymer pad to leave the nanostructures on the polymer pad;
touching the polymer pad, in which the nanostructures remain, to the target object to make the nanostructures meet the target object; and
separating the polymer pad from the target object to make the nanostructures transferred onto the target object.

15. The nanotransfer printing method of claim 14 , wherein the separating of the thin-film replica mold and the adhesive film from the polymer pad comprises:
separating the adhesive film from the polymer film of the thin-film replica mold that is touched to the polymer pad; and
using an organic solvent to remove the thin-film replica mold that is touched to the polymer pad.

Assignees

• Korea Advanced Inst Sci & Tech

Inventors

• Jung Yeon Sik
• Jeong Jae Won
• Baek Kwang Min
• Kim Jong Min
• Nam Tae Won

Classifications

• C23C14/04

  Coating on selected surface areas, e.g. using masks · CPC title

• B29C33/3857

  by making impressions of one or more parts of models, e.g. shaped articles and including possible subsequent assembly of the parts · CPC title

• B29L2031/757

  Moulds, cores, dies · CPC title

• B29C39/026 Primary

  characterised by the shape of the surface · CPC title

• G01N21/658

  enhancement Raman, e.g. surface plasmons · CPC title