Plasma treatment apparatus

Patent metadata

Field	Value
Publication number	US-10504703-B2
Application number	US-201715851662-A
Country	US
Kind code	B2
Filing date	Dec 21, 2017
Priority date	Dec 29, 2016
Publication date	Dec 10, 2019
Grant date	Dec 10, 2019

Abstract

A plasma treatment apparatus and a plasma treatment method are provided. The apparatus includes a chamber, a planar plasma-generating electrode, a sample suspension and holding system, and an optical observation system. The chamber defines a processing inner chamber, and the top portion of the chamber has a window. The planar plasma-generating electrode is located in the processing inner chamber for generating a planar plasma. The sample suspension and holding system is disposed opposite to the planar plasma-generating electrode in the processing inner chamber to suspend and hold a sample. The optical observation system is located in the processing inner chamber adjacent to the sample suspension and holding system to measure the thickness range of a planar plasma effective influence region through the window of the chamber.

First claim

What is claimed is:

1. A plasma treatment apparatus, comprising:
a chamber defining a processing inner chamber, wherein a top portion of the chamber has a window;
a planar plasma-generating electrode located in the processing inner chamber for generating a planar plasma;
a sample suspension and holding system disposed in the processing inner chamber opposite to the planar plasma-generating electrode for suspending and holding a sample, wherein the sample suspension and holding system comprises:
a clamping member; and
a first adjustable suspension member connected to the clamping member; and

an optical observation system located in the processing inner chamber adjacent to the sample suspension and holding system to measure a thickness range of an effective influence region of the planar plasma through the window of the chamber, wherein the optical observation system comprises:
an observation lens comprising a transparent substrate, a shelter coating located on a surface of the transparent substrate, and a fluorescent coating located on the shelter coating; and
a second adjustable suspension member connected to the observation lens for suspending and adjusting a height of the observation lens in the processing inner chamber.

2. The plasma treatment apparatus of claim 1 , wherein the optical observation system and the sample suspension and holding system are controllably linked.

3. The plasma treatment apparatus of claim 1 , wherein the optical observation system is unlinked from the sample suspension and holding system.

4. The plasma treatment apparatus of claim 1 , wherein the optical observation system further comprises:
a digital camera disposed outside the chamber opposite to the window; and
a fiber optic sensor located in the window for transmitting an optical signal to an external analysis equipment for confirming and checking the accuracy of the digital camera.

5. The plasma treatment apparatus of claim 4 , wherein the external analysis equipment comprises a spectrophotometer or a luminance meter for confirming and checking an accuracy of the digital camera.

6. The plasma treatment apparatus of claim 1 , wherein the planar plasma-generating electrode comprises a finger comb electrode, a square loop, a circular loop, a U-line, an S-line, or a serpentine line.

7. The plasma treatment apparatus of claim 1 , further comprising a pattern mask close to a surface of the sample to perform a treatment on a predetermined site of the sample.

Assignees

• Ind Tech Res Inst

Inventors

• Hsieh Hung-Yuan

Classifications

• C23C18/206

  Use of metal other than noble metals and tin, e.g. activation, sensitisation with metals (sensitising with tin C23C18/285, sensitising with noble metals C23C18/30) · CPC title

• C23C18/2006

  by other methods than those of C23C18/22 - C23C18/30 · CPC title

• H01J37/32541

  Shape · CPC title

• H01J37/32935 Primary

  Monitoring and controlling tubes by information coming from the object and/or discharge · CPC title

• H01J37/32972

  Spectral analysis · CPC title