Overhead manufacturing, processing and storage system

Patent metadata

Field	Value
Publication number	US-10497596-B2
Application number	US-201715791610-A
Country	US
Kind code	B2
Filing date	Oct 24, 2017
Priority date	Oct 24, 2016
Publication date	Dec 3, 2019
Grant date	Dec 3, 2019

Abstract

This disclosure relates generally to substrate and manufacturing system, processes and methods. In one example embodiment, to methods, apparatus, and systems which provides improved substrate processing and manufacturing wherein at least a portion of the system, apparatus or method may be in an overhead system, such as attached to a ceiling or overhead mounts, such that floor space and other efficiencies may be founded.

First claim

What is claimed is:

1. A substrate processing system comprising:
a storage system for storing a plurality of substrates;
a processing system for performing at least one action on the plurality of substrates;
a loading system for loading and unloading the plurality of substrates to and from the storage system and the processing system; and
a transportation system for transporting the substrates between the storage system, the processing system, and the loading system; wherein
each of the storage system, the processing system, the loading system, and the transportation system is ceiling mounted.

2. The substrate processing system of claim 1 , wherein each of the storage system, the processing system, the loading system, and the transportation system being ceiling mounted reduces a foot print of the substrate processing system.

3. The substrate processing system of claim 1 , wherein the storage system includes a high density container and a low density container, wherein the high density container holds substrates at a higher density than the low density container.

4. The substrate processing system of claim 3 , wherein the low density container includes a Front Opening Unified Pod (FOUP) container.

5. The substrate processing system of claim 1 , wherein the storage system includes an opener station, an ID reading station, a transfer station, or a high density storage.

6. The substrate processing system of claim 1 , further comprising an operator station that is located on a floor and that provides access to the storage system, the processing system, the loading system, and the transportation system.

7. The substrate processing system of claim 1 , further comprising a controller unit.

8. The substrate processing system of claim 7 , wherein the controller unit is a user operable drop down controller.

9. The substrate processing system of claim 8 , wherein the user operable drop down controller is configured to move vertically and horizontally in reference to a ceiling.

10. The substrate processing system of claim 8 , wherein the user operable drop down controller is configured to be manually pulled down by a user.

11. The substrate processing system of claim 1 , wherein the transportation system includes an overhead transportation track (OHT).

12. The substrate processing system of claim 1 , wherein the storage system, the processing system, the loading system, and the transportation system are integrated with conventional non-ceiling systems.

13. The substrate processing system of claim 1 , wherein space underneath the storage system, the processing system, the loading system, and the transportation system is free for logistical operations.

14. A substrate processing system comprising:
a low density container; and
a high density container that holds substrates at a higher density than the low density container;
a storage system for storing a plurality of substrates;
a processing system for performing at least one action on the plurality of substrates;
a loading system for loading and unloading the plurality of substrates to and from the storage system and the processing system; and
a transportation system for transporting the substrates between the storage system, the processing system, and the loading system; wherein
each of the storage system, the processing system, the loading system, and the transportation system is ceiling mounted.

15. The substrate processing system of claim 14 , wherein the storage system includes an opener station, an ID reading station, a transfer station, or a high density storage.

16. The substrate processing system of claim 14 , further comprising a controller unit including a user operable drop down controller.

Assignees

• Murata Machinery Ltd

Inventors

• Dovids Gerhard
• Fenner Yves
• Fiddes John
• Wohanka Christian
• Rahrbach Bernd

Classifications

• H10P72/3412

  Batch transfer of wafers · CPC title

• H10P72/3404

  Storage means · CPC title

• H10P72/3222

  Loading to or unloading from a conveyor · CPC title

• H10P72/3202

  Mechanical details, e.g. rollers or belts · CPC title

• H10P72/3221 Primary

  Overhead conveying · CPC title