Evaluation systems of block copolymer patterns

Patent metadata

Field	Value
Publication number	US-10495615-B2
Application number	US-201615242748-A
Country	US
Kind code	B2
Filing date	Aug 22, 2016
Priority date	Sep 25, 2015
Publication date	Dec 3, 2019
Grant date	Dec 3, 2019

Abstract

An evaluation system of block copolymer patterns includes a supplier, a plurality of analyzers, and a homopolymer interference remover. The supplier provides a sample including a block copolymer and a homopolymer. The analyzers measure a molecular weight of the block copolymer in the sample, measure a preliminary block ratio, the preliminary block ratio corresponding to a total ratio in the sample of each block in the block copolymer, and selectively measure a ratio of the homopolymer in the sample. The homopolymer interference remover subtracts the ratio of the homopolymer from the preliminary block ratio.

First claim

What is claimed is:

1. An evaluation system of block copolymer patterns, comprising:
a sample supplier providing a sample including a block copolymer and a homopolymer, the block copolymer including a first block and a second block;
a molecular weight analyzer measuring a molecular weight of the block copolymer in the sample;
a preliminary block ratio analyzer measuring a preliminary block ratio, the preliminary block ratio corresponding to a total ratio of the first and second blocks of the block copolymer in the sample;
a homopolymer analyzer measuring a ratio of the homopolymer in the sample;
a homopolymer interference remover subtracting the ratio of the homopolymer from the preliminary block ratio and calculating a pure block ratio of each of the first and second blocks in the block copolymer;
a factor calculator generating pattern determining factors of the block copolymer; and
a block critical dimension (CD) determiner estimating a block CD formed from the block copolymer,
wherein the pattern determining factors include the molecular weight of the block copolymer, the ratio of the homopolymer in the sample and the pure block ratio of each of the first and second blocks in the block copolymer,
wherein the block CD is calculated based on the pattern determining factors, and
wherein each of the molecular weight analyzer and the preliminary block ratio analyzer includes a gel permeation chromatography (GPC) device.

2. The evaluation system as claimed in claim 1 , wherein the molecular weight analyzer and the preliminary block ratio analyzer are integrated into a same device, and the integrated device measures each of the molecular weight of the block copolymer and the preliminary block ratio of the first and second blocks of the block copolymer in the sample.

3. The evaluation system as claimed in claim 2 , wherein a single GPC device serves as the molecular weight analyzer and the preliminary block ratio analyzer.

4. The evaluation system as claimed in claim 3 , further comprising:
at least two different detectors coupled to the GPC device.

5. The evaluation system as claimed in claim 4 , wherein the detectors include a refractive index detector (RID) and an ultraviolet detector (UVD).

6. The evaluation system as claimed in claim 1 , wherein the homopolymer analyzer includes a high-performance liquid chromatography (HPLC) device.

7. The evaluation system as claimed in claim 1 , wherein:
the molecular weight analyzer and the preliminary block ratio analyzer are integrated into one molecular weight/preliminary block ratio analyzer, and
the homopolymer analyzer and the molecular weight/preliminary block ratio analyzer are sequentially and serially connected.

8. The evaluation system as claimed in claim 7 , wherein:
the homopolymer analyzer includes an HPLC device, and
the molecular weight/preliminary block ratio analyzer includes a single GPC device serially connected to the HPLC device.

9. The evaluation system as claimed in claim 7 , further comprising:
a mixer between the homopolymer analyzer and the molecular weight/preliminary block ratio analyzer, wherein polymers are to be recollected in the mixer.

Assignees

• Samsung Electronics Co Ltd

Inventors

• Suh Min-Soo
• Park Hyun-Young
• Park Jung-Dae
• Kim Ki-Hyun
• Lim Kwang-Shin

Classifications

• C08F297/026

  polymerising acrylic acid, methacrylic acid or derivatives thereof · CPC title

• G01N30/88 Primary

  Integrated analysis systems specially adapted therefor, not covered by a single one of the groups G01N30/04 - G01N30/86 · CPC title

• G01N5/04

  by removing a component, e.g. by evaporation, and weighing the remainder · CPC title

• G01N2030/885

  involving polymers · CPC title

• G01N30/74

  Optical detectors {(measurement of intensity, velocity, spectral content, polarisation, or phase of infrared, visible or ultraviolet light G01J)} · CPC title