Method for monitoring the total amount of brighteners in an acidic copper/copper alloy plating bath and controlled process for plating

Patent metadata

Field	Value
Publication number	US-10494732-B2
Application number	US-201716090597-A
Country	US
Kind code	B2
Filing date	May 17, 2017
Priority date	May 19, 2016
Publication date	Dec 3, 2019
Grant date	Dec 3, 2019

Abstract

The present invention relates to a method for monitoring the total amount of brighteners in an acidic copper/copper alloy plating bath during a copper/copper alloy plating process, the use of such a method for controlling a plating process, a controlled process for electrolytically depositing copper/copper alloy onto a substrate utilizing the method for monitoring according to the present invention, and the use of one or more than one redox active compound for monitoring and/or determining the total amount of brighteners in the acidic copper/copper alloy plating bath.

First claim

The invention claimed is:

1. A method for monitoring the total amount of brighteners in an acidic copper/copper alloy plating bath during a copper/copper alloy plating process, the method comprising the steps:
(a) providing a plating bath sample from said plating bath, the plating bath comprising
(a-1) one or more than one brightener selected from the group consisting of

 wherein
n and m are independently 1, 2, 3, 4 or 5, and
p is independently 0, 1 or 2,

(a-2) copper ions, and
(a-3) chloride ions,

(b) adding to the plating bath sample
(b-1) one or more than one redox active compound, which is not a compound of (a-2), wherein said redox active compound
exhibits a standard potential E 0 in the range of from −0.80 V to +1.45 V, and
is selected from the group consisting of metal ions, metal oxide ions, iodide ions, and molecular oxygen,

 such that a measuring sample results from steps (a) and (b),
(c) in a measuring unit comprising a working electrode, the working electrode being contacted with the measuring sample
measuring a voltammetric or a chronoamperometric response of the working electrode by polarizing the electrode such that electrochemical current data are obtained,

(d) optionally processing the electrochemical current data obtained in step (c) in order to obtain processed electrochemical current data,
(e) comparing the electrochemical current data obtained in step (c) or the processed electrochemical current data obtained in step (d) with reference electrochemical current data or processed reference electrochemical current data.

2. The method of claim 1 , wherein said redox-active compound is
selected from the group consisting of iron ions, manganese ions, nickel ions, zinc ions, silver ions, iodide ions and molecular oxygen.

3. The method of claim 1 , wherein the one or more than one brightener comprises

wherein
n and m are independently 2, 3, or 4.

4. The method of claim 1 , wherein the acidic copper/copper alloy plating bath is utilized in the copper/copper alloy plating process with at least one soluble copper anode, before the plating bath sample is provided in step (a).

5. The method of claim 1 , wherein the plating bath sample provided in step (a) comprises iron ions in a total amount of 0 to 50 ppm, based on the total weight of the plating bath sample.

6. The method of claim 1 , wherein the total amount of component (b-1) in the measuring sample is more than 50 ppm, based on the amount of plating bath sample in the measuring sample.

7. The method of claim 1 , wherein step (c) is started no later than 30 minutes after step (b) is completed.

8. The method of claim 1 , wherein the response of the working electrode measured in step (c) is a voltammetric response by cyclic voltammetric stripping or a chronoamperometric response by cyclic pulse voltammetric stripping.

9. The method of claim 1 , wherein the processed electrochemical current data according to step (d) are selected from the group consisting of metal stripping peak area, metal stripping peak height, integrated current over a predetermined cathodic potential range, integrated current over an anodic potential range corresponding to metal stripping, and average current over a predetermined cathodic potential range.

10. A method for controlling a copper/copper alloy plating process, comprising carrying out the process of claim 1 , further comprising increasing or decreasing the concentration of the brighteners in the acidic copper/copper alloy plating bath, following step (e).

11. Controlled process for electrolytically depositing copper/copper alloy onto a substrate, the controlled process comprising the steps:
(A) providing the substrate and an acidic copper/copper alloy plating bath, wherein the plating bath comprises
copper ions,
chloride ions, and
one or more than one brightener as defined in claim 1 ,

(B) contacting the substrate with the plating bath and applying a current such that copper/copper alloy is electrolytically deposited onto the substrate,
(C) while depositing, monitoring and/or determining the total amount of brighteners in the plating bath, utilizing the method for monitoring according to claim 1 ,
(D) controlling the process for electrolytical copper/copper alloy deposition based on the result obtained in step (C), wherein step (D) comprises the step:
(D1) increasing the concentration of the brighteners in the plating bath,
or

(D2) decreasing the concentration of the brighteners in the plating bath.

12. Controlled process according to claim 11 , wherein in step (B) the applied current is at least 5 Ah/L per hour plating time, based on the total volume of the acidic copper/copper alloy plating bath.

13. Controlled process according to claim 11 , wherein in step (B) at least one soluble copper anode is utilized.

14. The method of claim 1 , wherein said redox-active compound is selected from the group consisting of Fe 2+ and Fe 3 and wherein the total amount of component (b-1) in the measuring sample is 200 ppm or more, based on the amount of plating bath sample in the measuring sample.

15. The method of claim 1 , wherein the one or more than one brightener comprises

wherein n and m are 3, and said redox-active compound is selected from the group consisting of Fe 2+ and Fe 3 , and wherein the total amount of component (b-1) in the measuring sample is 400 ppm or more, based on the amount of plating bath sample in the measuring sample.

Assignees

• Atotech Deutschland Gmbh

Inventors

• Muglali Mutlu-Iskender
• Voss Torsten
• Kirbs Andreas

Classifications

• C25D21/12 Primary

  Process control or regulation (controlling or regulating in general G05) · CPC title

• C25D3/38

  of copper · CPC title

• G01N27/42

  Measuring deposition or liberation of materials from an electrolyte; Coulometry, i.e. measuring coulomb-equivalent of material in an electrolyte · CPC title

• G01N27/4166

  measuring a particular property of an electrolyte · CPC title