Dual-airy-beam systems and methods for processing glass substrates

Patent metadata

Field	Value
Publication number	US-10494290-B2
Application number	US-201715404677-A
Country	US
Kind code	B2
Filing date	Jan 12, 2017
Priority date	Jan 14, 2016
Publication date	Dec 3, 2019
Grant date	Dec 3, 2019

Abstract

Systems and methods utilizing two Airy beams to process a non-rounded edge of a glass substrate or to cleave a glass substrate are disclosed. The method includes generating first and second Airy beams and causing them to cross at a crossing to define a curved intensity profile in the vicinity of the crossing point where the first and second Airy beams have respective local radii of curvature RA and RB. The method also includes scanning the curved intensity profile either along the non-rounded outer edge or through the glass along a scan path to form on the glass substrate a rounded outer edge having a radius of curvature RE that is smaller than the first and second local radii of curvature RA and RB. The radius of curvature RE can be adjusted by changing a beam angle between the first and second Airy beams.

First claim

What is claimed is:

1. A method of cleaving a glass substrate, comprising:
a) generating first and second Airy beams;
b) causing the first and second Airy beams to cross at a crossing point in free space to define a curved intensity profile in the vicinity of the crossing point, wherein the first and second Airy beams respectively have first and second local radii of curvature RA and RB at the crossing point; and
c) scanning the curved intensity profile through the glass substrate along a scan path to form a cleaving line that defines a bulbous rounded outer edge of the glass substrate.

2. The method according to claim 1 , wherein the first and second Airy beams initially travel along respective first and second axes that define a beam angle θB that is in the range 0.1π radians<θB<π radians.

3. The method according to claim 1 , wherein the glass substrate includes a central axis that passes through the bulbous rounded outer edge, and wherein the bulbous rounded outer edge is substantially symmetric about the central axis.

4. The method according to claim 1 , wherein the curved intensity profile defines a local radius of curvature RP, and wherein RP is less than RA and RB.

5. The method according to claim 1 , wherein the cleaving line is curved.

6. The method according to claim 1 , wherein the bulbous rounded outer edge has a radius of curvature RE that is smaller than the first and second local radii of curvature RA and RB.

7. The method according to claim 1 , wherein RA=RB.

8. A method of cleaving a substrate made of glass, comprising:
a) generating first and second Airy beams;
b) causing the first and second Airy beams to cross at a crossing point in free space to define a curved intensity profile in the vicinity of the crossing point; and
c) scanning the curved intensity profile through the glass along a scan path to cause the glass to flow to form a cleaving line having a bulbous rounded outer edge.

9. The method according to claim 8 , wherein the substrate comprises a glass sheet having a thickness in the range from 20 μm to 1000 μm.

10. The method according to claim 8 , wherein the first and second Airy beams respectively have first and second local radii of curvature RA and RB at the crossing point, and wherein RA=RB.

11. The method according to claim 8 , wherein the cleaved line is curved.

Assignees

• Corning Inc

Inventors

• Chen Minghan
• Li Ming-Jun
• Liu Anping
• Peng Gaozhu

Classifications

• B23K26/402

  involving non-metallic material, e.g. isolators · CPC title

• B23K2103/54

  Glass · CPC title

• C03B33/093 Primary

  using two or more focussed radiation beams · CPC title

• B23K26/354

  by melting · CPC title

• C03B33/102

  involving a focussed radiation beam, e.g. lasers · CPC title