Rolled-up power inductor and array of rolled-up power inductors for on-chip applications

Patent metadata

Field	Value
Publication number	US-10490328-B2
Application number	US-201715704262-A
Country	US
Kind code	B2
Filing date	Sep 14, 2017
Priority date	Sep 15, 2016
Publication date	Nov 26, 2019
Grant date	Nov 26, 2019

Abstract

An array of rolled-up power inductors for on-chip applications comprises at least two rolled-up power inductors connected in series and formed from a stack of multilayer sheets. The array includes a first rolled-up power inductor comprising a first multilayer sheet in a rolled configuration about a first longitudinal axis and second rolled-up power inductor comprising a second multilayer sheet in a rolled configuration about a second longitudinal axis. The first and second rolled-up power inductors are laterally spaced apart. The first multilayer sheet comprises a first patterned conductive layer on a first strain-relieved layer, and the second multilayer sheet comprises a second patterned conductive layer on a second strain-relieved layer. Prior to roll-up of the second and first multilayer sheets, the second multilayer sheet is disposed on the first multilayer sheet, and a through-thickness first via connects the second patterned conductive layer with the first patterned conductive layer.

First claim

What is claimed is:

1. An array of rolled-up power inductors for on-chip applications, the array comprising:
at least two rolled-up power inductors connected in series and formed from a stack of multilayer sheets, the at least two rolled-up power inductors comprising:
a first rolled-up power inductor comprising a first multilayer sheet in a rolled configuration about a first longitudinal axis, the first multilayer sheet comprising a first patterned conductive layer on a first strain-relieved layer,
a second rolled-up power inductor comprising a second multilayer sheet in a rolled configuration about a second longitudinal axis, the second rolled-up power inductor being laterally spaced apart from the first rolled-up power inductor, the second multilayer sheet comprising a second patterned conductive layer on a second strain-relieved layer,

wherein, prior to roll-up of the second and first multilayer sheets, the second multilayer sheet is disposed on the first multilayer sheet, and a through-thickness first via connects the second patterned conductive layer with the first patterned conductive layer, thereby enabling, after the roll-up, a series connection of the first and second rolled-up power inductors.

2. The array of claim 1 , wherein the first and second patterned conductive layers comprise graphene, the first and second patterned conductive layers being first and second patterned graphene layers.

3. The array of claim 2 , wherein each of the first and second patterned graphene layers comprises multi-layer graphene having from two to 20 atomic layers.

4. The array of claim 1 , further comprising a first thermal conduction layer between the first patterned conductive layer and the first strain-relieved layer, and
further comprising a second thermal conduction layer between the second patterned conductive layer and the second strain-relieved layer.

5. The array of claim 4 , wherein the first and second thermal conduction layers comprise a material selected from the group consisting of: diamond, boron nitride, graphite, carbon nanotubes, silicene, and a transition metal dichalcogenide.

6. The array of claim 1 , wherein the first and second strain-relieved layers comprise SiN x , where 0.5≤x≤1.5.

7. The array of claim 1 , wherein the rolled configuration of the first multilayer sheet and the rolled configuration of the second multilayer sheet each comprises multiple turns about the respective longitudinal axis, the multiple turns being in a range from 5 turns to 500 turns.

8. The array of claim 1 , wherein a lateral spacing of the first and second rolled-up power inductors is no greater than about 250 microns.

9. The array of claim 1 , wherein the first and second rolled-up power inductors are disposed substantially parallel to each other on a substrate.

10. The array of claim 1 , wherein the at least two rolled-up power inductors further include a third rolled-up power inductor comprising a third multilayer sheet in a rolled configuration about a third longitudinal axis, the third rolled-up power inductor being adjacent to and laterally spaced apart from the second rolled-up power inductor, the third multilayer sheet comprising a third patterned conductive layer on a third strain-relieved layer,
wherein, prior to roll-up of the third multilayer sheet, the third multilayer sheet is disposed on the second multilayer sheet, and a through-thickness second via connects the third patterned conductive layer with the second patterned conductive layer, thereby enabling, after the roll-up, a series connection of the second and third rolled-up power inductors.

11. The array of claim 1 comprising a total inductance of at least about 1 μH.

12. A rolled-up power inductor for on-chip applications, the rolled-up power inductor comprising:
a multilayer sheet in a rolled configuration comprising multiple turns about a longitudinal axis, the multilayer sheet comprising:
a patterned graphene layer on a strain-relieved layer with a thermal conduction layer therebetween, the patterned graphene layer comprising at least one graphene strip having a length extending in a rolling direction so as to wrap around the longitudinal axis in the rolled configuration, thereby forming an inductor cell of the rolled-up power inductor.

13. The rolled-up power inductor of claim 12 , wherein the thermal conduction layer comprises a material selected from the group consisting of diamond, boron nitride, graphite, carbon nanotubes, silicene, and a transition metal dichalcogenide.

Assignees

• Univ Illinois

Inventors

• Li Xiuling
• Huang Wen

Classifications

• H01F17/02

  without magnetic core · CPC title

• H01F5/003 Primary

  Printed circuit coils · CPC title

• H01F17/0006

  Printed inductances (printed coils for dynamo-electric machines H02K3/26; printed circuits H05K) · CPC title

• H01F5/04 Primary

  Arrangements of electric connections to coils, e.g. leads · CPC title

• H01F2005/006

  with conical spiral form · CPC title