Magnetic bearing device

Patent metadata

Field	Value
Publication number	US-10487875-B2
Application number	US-201715686790-A
Country	US
Kind code	B2
Filing date	Aug 25, 2017
Priority date	Aug 25, 2017
Publication date	Nov 26, 2019
Grant date	Nov 26, 2019

Abstract

When a duration of current noise caused by a PWM control of each excitation amplifier is Td, a cycle of a PWM carrier signal is Tpwm, an on-duty upper limit of the PWM carrier signal under quiet environment without disturbance is Tonu, and an on-duty lower limit of the PWM carrier signal under the quiet environment without the disturbance is Tonl, the AD sampling period includes a first AD sampling period between a point after a lapse of the time Td after a start of the cycle Tpwm and a point after a lapse of a time (Tpwm−Tonu) from the start of the cycle Tpwm, and a second AD sampling period between a point after a lapse of a time (Tpwm−Tonl+Td) from the start of the cycle Tpwm and an end point of the cycle Tpwm.

First claim

What is claimed is:

1. A magnetic bearing device comprising:
a pair of electromagnets provided for each of multiple control axes and arranged to face each other with respect to a rotor shaft;
a plurality of excitation amplifiers configured to supply an electromagnet current to each electromagnet;
a plurality of current sensors each configured to detect the electromagnet current to output a current detection signal; and
a controller configured to AD-sample (i) the current detection signal based on the electromagnet current on which a carrier signal for detecting a change in a levitation position of the rotor shaft is superimposed, and a sum signal of the current detection signals of the pair of electromagnets, or (ii) the current detection signal, and a modulated signal produced by modulating a carrier signal based on the levitation position, in a predetermined AD sampling period to obtain displacement information on the levitation position change, thereby performing PWM control of each excitation amplifier based on the displacement information,
wherein when a duration of current noise caused by the PWM control of each excitation amplifier is Td, a cycle of a PWM carrier signal is Tpwm, an on-duty upper limit of the PWM carrier signal under quiet environment without disturbance is Tonu, and an on-duty lower limit of the PWM carrier signal under the quiet environment without the disturbance is Tonl, the AD sampling period includes
a first AD sampling period between a point after a lapse of the time Td after a start of the cycle Tpwm and a point after a lapse of a time (Tpwm−Tonu) from the start of the cycle Tpwm, and
a second AD sampling period between a point after a lapse of a time (Tpwm−Tonl+Td) from the start of the cycle Tpwm and an end point of the cycle Tpwm.

2. The magnetic bearing device according to claim 1 , further comprising
a carrier generator configured to generate the carrier signal for detecting the change in the levitation position of the rotor shaft; and
a displacement sensor configured to modulate the carrier signal based on the levitation position change to output the modulated signal; wherein
the controller AD-samples each current detection signal and the modulated signal in the predetermined AD sampling period to obtain displacement information on the levitation position change, thereby performing PWM control of each excitation amplifier based on the displacement information.

3. The magnetic bearing device according to claim 1 , wherein
the plurality of excitation amplifiers supply, to each electromagnet, the electromagnet current on which the carrier signal for detecting the change in the levitation position of the rotor shaft is superimposed;
the magnetic bearing device further comprising the sum signal obtainer configured to add up the current detection signals of the pair of electromagnets to obtain the sum signal, wherein
the controller AD-samples each current detection signal and the sum signal in the predetermined AD sampling period to obtain displacement information on the levitation position change, thereby performing PWM control of each excitation amplifier based on the displacement information.

4. The magnetic bearing device according to claim 1 , wherein
when a minimum intake time in AD sampling is Tmin,
the first AD sampling period is set to a period between the point after the lapse of the time Td from the start of the cycle Tpwm and a point after a lapse of a time (Td+Tmin) from the start of the cycle Tpwm, and
the second AD sampling period is set to a period between a point after a lapse of a time (Tpwm−Tmin) from the start of the cycle Tpwm and the end point of the cycle Tpwm.

5. The magnetic bearing device according to claim 1 , wherein
the first AD sampling period is set to a period between a point after a lapse of 10% of the cycle Tpwm from the start of the cycle Tpwm and a point after a lapse of 40% of the cycle Tpwm from the start of the cycle Tpwm, and
the second AD sampling period is set to a period between a point after a lapse of 70% of the cycle Tpwm from the start of the cycle Tpwm and a point after a lapse of 90% of the cycle Tpwm from the start of the cycle Tpwm.

6. The magnetic bearing device according to claim 1 , wherein
when a frequency of the PWM carrier signal is fpwm, a frequency of the carrier signal is fc, and a frequency in the AD sampling is fs, the fpwm, the fc, and the fs satisfy fpwm=M·fs=N·fc in relation to integers M, and satisfying N≥M>1, and
sampling timing for performing the AD sampling is set at every time interval Tsnpl being equal to or shorter than the time (Td+Tmin) and satisfying Tpwm=L·Tsnpl in relation to an integer L.

7. The magnetic bearing device according to claim 1 , further comprising:
an obtainer configured to obtain such a frequency that an on-duty duration in the PWM carrier signal is equal to or shorter than (Td+Tmin) or equal to or longer than (Tpwm−Td−Tmin); and
a warner configured to emit a warning when the frequency exceeds a predetermined frequency threshold.

8. The magnetic bearing device according to claim 7 , further comprising:
a holder configured to hold multiple different frequency thresholds,
wherein any of the multiple frequency thresholds is alternatively set.

Assignees

• Shimadzu Corp

Inventors

• Kozaki Junichiro

Classifications

• F16C32/0489

  with active support of five degrees of freedom, e.g. two radial magnetic bearings combined with an axial bearing · CPC title

• F16C32/0491

  with electromagnets acting in axial and radial direction, e.g. with conical magnets · CPC title

• F16C32/0448

  by using the electromagnet itself as sensor, e.g. sensorless magnetic bearings · CPC title

• H02K7/09

  with magnetic bearings · CPC title

• F16C2360/45

  Turbo-molecular pumps · CPC title