Damage-free self-limiting through-substrate laser ablation

Patent metadata

Field	Value
Publication number	US-10486268-B2
Application number	US-201715436775-A
Country	US
Kind code	B2
Filing date	Feb 18, 2017
Priority date	Nov 7, 2014
Publication date	Nov 26, 2019
Grant date	Nov 26, 2019

Abstract

A first substrate, bonded to a second substrate by a material, is provided. The first substrate is transparent to at least some wavelengths of electromagnetic radiation. The first substrate is irradiated with the electromagnetic radiation to which the first substrate is transparent, such that the electromagnetic radiation impinges on the material causing a decomposition thereof at a location at an interface between the first substrate and the material. The decomposition results in, at the location, an interface of the first substrate and an atmosphere of the decomposition. The atmosphere of the decomposition has an optical property resulting in ceasing the decomposition of the material.

First claim

What is claimed is:

1. A product comprising:
a first substrate that is transparent to at least a first wavelength of electromagnetic radiation;
a second substrate that is bonded to a bottom surface of the first substrate; and
a material that is disposed between and bonds the second substrate and the first substrate, and that defines an interface plane with the first substrate;
wherein upon exposure to electromagnetic radiation of the first wavelength at an intensity greater than a threshold that is a photochemical property of the material, the material decomposes to form an atmosphere of decomposition adjacent to the interface plane;
wherein the first substrate and the material have optical properties that cause transmission of the electromagnetic radiation of the first wavelength from the first substrate into the material when the electromagnetic radiation of the first wavelength impinges on the material at a laser incidence angle from the normal of the interface plane;
wherein the first substrate and the atmosphere of decomposition have optical properties that cause total internal reflection of the electromagnetic radiation of the first wavelength when the electromagnetic radiation of the first wavelength impinges on the atmosphere of decomposition at the laser incidence angle from the normal of the interface plane;
wherein at least a portion of a top surface of the first substrate is angled relative to the bottom surface of the first substrate such that the electromagnetic radiation of the first wavelength, impinging on the top surface of the first substrate at a chosen angle from normal to the top surface of the first substrate, impinges on the interface plane at the laser incidence angle from the normal of the interface plane, resulting in transmission of the electromagnetic radiation of the first wavelength through the interface plane between the first substrate and the material and resulting in total internal reflection of the electromagnetic radiation of the first wavelength from the interface plane between the first substrate and the atmosphere of decomposition.

2. A product comprising:
a first substrate that is transparent to at least a first wavelength of electromagnetic radiation;
a second substrate that is bonded to a bottom surface of the first substrate;
a material that is disposed between and bonds the second substrate and the first substrate; and
a prism that is optically coupled to the first substrate;
wherein upon exposure to electromagnetic radiation of the first wavelength at an intensity greater than a threshold that is a photochemical property of the material, the material decomposes to form an atmosphere of decomposition;
wherein one of the prism or the first substrate defines an interface plane where the one of the prism or the first substrate directly contacts the material;
wherein the one of the prism or the first substrate and the material have optical properties that cause transmission of the electromagnetic radiation of the first wavelength into the material when the electromagnetic radiation of the first wavelength impinges on the material at a laser incidence angle from the normal of the interface plane;
wherein the first substrate and the atmosphere of decomposition have optical properties that cause total internal reflection of the electromagnetic radiation of the first wavelength in the first substrate when the electromagnetic radiation of the first wavelength impinges on the atmosphere of decomposition at the laser incidence angle from the normal of the interface plane;
wherein the prism includes a surface that is angled relative to the bottom surface of the first substrate such that the electromagnetic radiation of the first wavelength, impinging on the prism at a chosen angle, impinges on the interface plane at the laser incidence angle from the normal of the interface plane, resulting in transmission of the electromagnetic radiation of the first wavelength through the interface plane between the first substrate and the material and resulting in total internal reflection of the electromagnetic radiation of the first wavelength from the interface plane between the first substrate and the atmosphere of decomposition.

3. The product as claimed in claim 2 further comprising an array of prisms optically coupled to the first substrate, wherein the array of prisms is index-matched to the first substrate.

4. The product as claimed in claim 3 wherein the array of prisms is disposed on a top surface of the first substrate.

5. The product as claimed in claim 3 wherein the array of prisms is integral with the first substrate.

6. An apparatus comprising:
a first substrate that is transparent to at least a first wavelength of electromagnetic radiation;
a second substrate that is bonded to a bottom surface of the first substrate;
a material disposed between and bonding the second substrate and the first substrate;
a prism that is optically coupled to the first substrate and disposed at one of a top surface or a bottom surface of the first substrate; and
a laser that is arranged to emit electromagnetic radiation of the first wavelength toward the first substrate at a chosen angle relative to the normal of the other of the top surface or the bottom surface of the first substrate;
wherein upon exposure to electromagnetic radiation of the first wavelength at a intensity greater than a given threshold that is a photochemical property of the material, the material decomposes to form an atmosphere of decomposition;
wherein one of the prism or the first substrate defines an interface plane where the one of the prism or the first substrate directly contacts the material;
wherein the one of the prism or the first substrate and the material have optical properties that cause transmission of the electromagnetic radiation of the first wavelength into the material when the electromagnetic radiation of the first wavelength impinges on the material at a laser incidence angle from the normal of the interface plane;
wherein the one of the prism or the first substrate and the atmosphere of decomposition have optical properties that cause total internal reflection of the electromagnetic radiation of the first wavelength in the first substrate when the electromagnetic radiation of the first wavelength impinges on the atmosphere of decomposition at the laser incidence angle from the normal of the interface plane;
wherein the prism includes a surface that is angled relative to the other of the top surface or the bottom surface of the first substrate such that refraction of the electromagnetic radiation of the first wavelength by the prism and the first substrate causes the electromagnetic radiation of the first wavelength, which impinges upon the prism or the first substrate at the chosen angle, to impinge on the atmosphere of decomposition at the laser incidence angle from the normal of the interface plane, resulting in transmission of the electromagnetic radiation of the first wavelength through the interface plane between the first substrate and the material and resulting in total internal reflection of the electromagnetic radiation of the first wavelength from the interface plane between the first substrate and the atmosphere of decomposition.

7. The apparatus as claimed in claim 6 wherein the prism is one of an array of prisms optically coupled to the first substrate, wherein the array of prisms is index-matched to the first substrate.

8. The apparatus as claimed in claim 7 wherein the prism is disposed at the bottom surface of the first substrate and the chosen angle is less than the laser incidence angle.

9. The apparatus as claimed in claim 6 wherein the prism is disposed at the top surface of the first

Assignees

• IBM

Inventors

• Doany Fuad E
• Narayan Chandrasekhar

Classifications

• H10P90/00

  Preparation of wafers not covered by a single main group of this subclass, e.g. wafer reinforcement · CPC title

• H10P72/744

  Details of chemical or physical process used for separating the auxiliary support from a device or a wafer · CPC title

• H10P72/74 Primary

  using temporarily an auxiliary support · CPC title

• H10P34/42

  with electromagnetic radiation, e.g. laser annealing (laser cutting H10P54/20) · CPC title

• B23K2103/42

  Plastics other than composite materials · CPC title