Two-dimensional three-degree-of-freedom micro-motion platform structure for high-precision positioning and measurement
US-10520339-B2 · Dec 31, 2019 · US
US10483877B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10483877-B2 |
| Application number | US-201515549248-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 21, 2015 |
| Priority date | Aug 26, 2015 |
| Publication date | Nov 19, 2019 |
| Grant date | Nov 19, 2019 |
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A one-dimensional large-stroke precise positioning platform includes a housing, a cross ball guiding rail, piezoelectric ceramic and an elastic member. The cross ball guiding rail includes a mover guiding rail and stator guiding rails. A first and second fixing member is movable in a containing chamber provided in the housing. In the longitudinal direction of the mover guiding rail, one end of the piezoelectric ceramic is abutted against the first fixing member, and the other end against the second fixing member. The mover guiding rail is fixed on the second fixing member, and the elastic member is fixed on the first fixing member. In the width direction of the mover guiding rail, the two sides of the elastic member are abutted against the inner side surfaces of the containing chamber, and the first fixing member is connected with the second fixing member by a flexible member.
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What is claimed is: 1. A one-dimensional large-stroke precise positioning platform, comprising: a housing; a cross ball guiding rail arranged at one side of the housing, the cross ball guiding rail comprising a mover guiding rail and stator guiding rails oppositely arranged at two sides of the mover guiding rail; the stator guiding rails being parallel to the mover guiding rail, and the stator guiding rails being fixed on the housing a piezoelectric ceramic and an elastic member disposed within the housing; a containing chamber disposed within the housing for containing the piezoelectric ceramic and the elastic member, a first fixing member and a second fixing member being provided in the containing chamber, and the first fixing member and the second fixing member being movable in the containing chamber along the longitudinal direction of the mover guiding rail; wherein in the longitudinal direction of the mover guiding rail, one end of the piezoelectric ceramic is abutted against the first fixing member, and the other end of the piezoelectric ceramic is abutted against the second fixing member, the mover guiding rail being fixed on the second fixing member, and the elastic member being fixed on the first fixing member; in the width direction of the mover guiding rail, the two sides of the elastic member are abutted against the inner side surfaces of the containing chamber, and the first fixing member being connected with the second fixing member by a flexible member. 2. The one-dimensional large-stroke precise positioning platform as claimed in claim 1 , wherein the piezoelectric ceramic has a first abutment surface for abutting against the first fixing member and a second abutment surface for abutting against the second fixing member, a pre-tensioning screw being provided at one side of the piezoelectric ceramic for abutting against the first abutment surface or the second abutment surface. 3. The one-dimensional large-stroke precise positioning platform as claimed in claim 2 , wherein a gasket is clamped between the pre-tensioning screw and the piezoelectric ceramic. 4. The one-dimensional large-stroke precise positioning platform as claimed in claim 3 , wherein the pre-tensioning screw is threadedly connected on the second fixing member, and the gasket being clamped between the pre-tensioning screw and the second abutment surface of the piezoelectric ceramic. 5. The one-dimensional large-stroke precise positioning platform as claimed in claim 1 , wherein in the height direction of the stator guiding rail, a mounting hole and an adjusting hole are opened at the two opposite sides of the elastic member respectively, and the first fixing member being provided with a positioning screw installed in the mounting hole and an adjustment screw installed in the adjusting hole thereon. 6. The one-dimensional large-stroke precise positioning platform as claimed in claim 1 , wherein the first fixing member includes a first frame and a first hollow cavity formed in the first frame, the elastic member being contained in the first hollow cavity, the first fixing member being provided with an abutment portion for abutting against the piezoelectric ceramic, the abutment portion comprising a protrusion protruding from the first frame towards the piezoelectric ceramic, and the flexible member being provided on the abutment portion. 7. The one-dimensional large-stroke precise positioning platform as claimed in claim 6 , wherein the flexible member is a plate extending outwards from the side surface of the abutment portion. 8. The one-dimensional large-stroke precise positioning platform as claimed in claim 7 , wherein the second fixing member comprises a second frame and a second hollow cavity formed in the second frame, the piezoelectric ceramic being contained in the second hollow cavity, the second frame comprising a top wall and a bottom wall opposite to each other and two side walls extending downwards from the top wall, the second frame having an opening facing the first frame, the abutment portion extending from the opening into the second hollow cavity. 9. The one-dimensional large-stroke precise positioning platform as claimed in claim 8 , wherein there are two plates which extends outwards from the two side surfaces of the abutment portion, and the two plates being connected with the two side walls of the second frame respectively. 10. The one-dimensional large-stroke precise positioning platform as claimed in claim 1 , wherein the housing comprising an upper end wall and a lower end wall opposite to each other, the stator guiding rail being fixed on the upper end wall on which a channel being opened, the mover guiding rail being located above the channel, a through hole being opened on the lower end wall and the through hole being in communication with the containing chamber.
Inertial sliding motors · CPC title
Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof (levels per se G01C9/00); Compensating for the effects of tilting or acceleration, e.g. for optical apparatus · CPC title
producing linear motion, e.g. actuators; Linear positioners {; Linear motors} · CPC title
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