Baffle plate and showerhead assemblies and corresponding manufacturing method

Patent metadata

Field	Value
Publication number	US-10483092-B2
Application number	US-201615097600-A
Country	US
Kind code	B2
Filing date	Apr 13, 2016
Priority date	Apr 13, 2016
Publication date	Nov 19, 2019
Grant date	Nov 19, 2019

Abstract

A baffle plate assembly including a baffle plate, a ring and support members. The baffle plate has an outer diameter and configured to distribute gases through a showerhead of a showerhead assembly of a substrate processing system. The gases are received from a stem of the showerhead assembly. The ring has an inner diameter and configured to be disposed in a ring channel of the showerhead assembly. The inner diameter is greater than the outer diameter of the baffle plate. The support members extend from the baffle plate to the ring. The ring and the support members hold the baffle plate in a position between a top plate and a bottom plate of the showerhead.

First claim

What is claimed is:

1. A baffle plate assembly comprising:
a baffle plate having an outer diameter and configured to receive gases from a stem of a showerhead assembly and distribute the gases through a showerhead of the showerhead assembly of a substrate processing system;
a ring having an inner diameter and configured to be disposed in a ring channel of the showerhead assembly, wherein the inner diameter is greater than the outer diameter of the baffle plate; and
a plurality of support members extending from the baffle plate to the ring,
wherein the ring and the plurality of support members are configured to hold the baffle plate in a position between a top plate and a bottom plate of the showerhead.

2. The baffle plate assembly of claim 1 , wherein the plurality of support members are configured to be placed in notches in a collar of the stem of the showerhead assembly.

3. The baffle plate assembly of claim 1 , wherein the baffle plate comprises a plurality of holes through which portions of the gases pass.

4. The baffle plate assembly of claim 1 , wherein each of the plurality of support members is thicker at the baffle plate than at the ring.

5. The baffle plate assembly of claim 1 , wherein the plurality of support members comprise a tapered bottom surface.

6. The baffle plate assembly of claim 1 , wherein each of the plurality of support members comprises:
a top surface extending parallel to a bottom surface of the stem or a bottom surface of the top plate of the showerhead; and
a tapered bottom surface.

7. The baffle plate assembly of claim 1 , wherein a top surface of the baffle plate, top surfaces of the plurality of support members, and a top surface of the ring are in a same plane.

8. A showerhead assembly comprising:
the baffle plate assembly of claim 1 ; and
the showerhead,
wherein
the baffle plate receives the gases from the stem of the showerhead assembly and distributes the gases through the showerhead,
the ring is disposed in the ring channel of the showerhead assembly, and
the ring and the plurality of support members hold the baffle plate in the position between the top plate and the bottom plate of the showerhead.

9. The showerhead assembly of claim 8 , further comprising the stem,
wherein the top plate is connected to the stem and comprises the ring channel.

10. The showerhead assembly of claim 9 , wherein:
the stem comprises notches; and
a portion of each of the plurality of support members is placed in a respective one of the notches.

11. The showerhead assembly of claim 10 , wherein the portions of the plurality of support members have a thermal interference fit with the notches.

12. The showerhead assembly of claim 9 , wherein the ring is welded to the stem or the top plate.

13. The showerhead assembly of claim 9 , wherein the ring is friction stir welded to the stem and the top plate.

14. The showerhead assembly of claim 9 , wherein:
the ring is friction stir welded to the stem; and
the stem is friction stir welded to the top plate.

15. The showerhead assembly of claim 9 , wherein:
the stem comprises swage tabs;
the ring comprises notches; and
the swage tabs are pressed at least partially into the notches of the ring.

16. The showerhead assembly of claim 9 , wherein the ring has a thermal interference fit with the ring channel.

17. The showerhead assembly of claim 9 , wherein the ring abuts the top plate of the showerhead.

18. A method comprising:
forming a top plate for a showerhead of a showerhead assembly of a substrate processing system;
forming a stem of the showerhead assembly;
forming a baffle plate assembly including a baffle plate, a ring and a plurality of support members, wherein the plurality of support members extend from the baffle plate to the ring;
sliding the top plate on to the stem;
placing the ring in a ring channel of the showerhead assembly to suspend the baffle plate between (i) the stem or the top plate of the showerhead, and (ii) a bottom plate of the showerhead; and
locking the ring in the ring channel.

19. The method of claim 18 , further comprising welding the ring to the stem or the top plate.

20. The method of claim 18 , further comprising friction stir welding the ring to the stem and to the top plate.

21. The method of claim 18 , wherein the locking of the ring in the ring channel comprises:
forming swage tabs in a collar of the stem;
forming notches in the ring; and
pressing or compressing the swage tabs at least partially into the notches of the ring to lock the ring in the ring channel.

22. The method of claim 18 , wherein the locking of the ring in the ring channel comprises:
prior to placing the ring in the ring channel, heating the ring or a portion of the stem to allow the ring to be placed in the ring channel; and
allowing the ring or the portion of the stem to return to an ambient temperature to lock the ring in the ring channel.

23. The method of claim 18 , wherein the locking of the ring in the ring channel comprises:
prior to placing the ring in the ring channel, cooling the ring or a portion of the stem to allow the ring to be placed in the ring channel; and
allowing the ring or the portion of the stem to return to an ambient temperature to lock the ring in the ring channel.

24. The method of claim 18 , further comprising locking the plurality of support members in notches of the stem, wherein the locking of the plurality of support members comprises:
prior to placing the ring in the ring channel, heating the plurality of support members or a portion of the stem to allow the plurality of support members to be placed in the notches; and
allowing the plurality of support members or the portion of the stem to return to an ambient temperature to lock the plurality of support members in the notches.

25. The method of claim 18 , further comprising locking the plurality of support members in notches of the stem, wherein the locking of the plurality of support members comprises:
prior to placing the ring in the ring channel, cooling the plurality of support members or a portion of the stem to allow the plurality of support members to be placed in the notches; and
allowing the plurality of support members or the portion of the stem to return to an ambient temperature to lock the plurality of support members in the notches.

Assignees

• Lam Res Corp

Inventors

• Madsen Eric Russell
• Dyrdahl Lance

Classifications

• B23K20/122

  using a non-consumable tool, e.g. friction stir welding · CPC title

• C23C16/45591

  Fixed means, e.g. wings, baffles · CPC title

• H01J37/32449

  Gas control, e.g. control of the gas flow · CPC title

• H10P72/04

  Apparatus for manufacture or treatment · CPC title

• H01J37/32633

  Baffles · CPC title