Ceramic layer for electrostatic chuck including embedded faraday cage for RF delivery and associated methods

Patent metadata

Field	Value
Publication number	US-10475623-B2
Application number	US-201715628528-A
Country	US
Kind code	B2
Filing date	Jun 20, 2017
Priority date	Jul 27, 2015
Publication date	Nov 12, 2019
Grant date	Nov 12, 2019

Abstract

A ceramic layer is attached to a top surface of a base plate using a bond layer. The ceramic layer has a top surface configured to support a substrate. At least one clamp electrode is positioned within an upper region of the ceramic layer. A primary radiofrequency (RF) power delivery electrode is positioned within the ceramic layer at a location vertically below the at least one clamp electrode such that a region of the ceramic layer between the primary RF power delivery electrode and the at least one clamp electrode is substantially free of other electrically conductive material. A plurality of RF power delivery connection modules is distributed in a substantially uniform manner about a perimeter of the ceramic layer. Each of the RF power delivery connection modules is configured to form an electrical connection from the base plate to the primary RF power delivery electrode at its respective location.

First claim

What is claimed is:

1. A ceramic layer for an electrostatic chuck, comprising:
a top surface including an area configured to support a substrate;
a primary radiofrequency (RF) power delivery electrode positioned within the ceramic layer in an orientation substantially parallel to the top surface, the primary RF power delivery electrode configured to transmit RF power through the top surface at a frequency for generation of a plasma within a region above the top surface;
at least one RF power delivery connection module disposed at least partially within the ceramic layer and configured to provide an electrically conductive path from a location outside the ceramic layer to the primary RF power delivery electrode, the at least one RF power delivery connection module connected to the primary RF power delivery electrode near a radial periphery of the primary RF power delivery electrode,
wherein the at least one RF power delivery connection module and the primary RF power delivery electrode together form part of a Faraday cage to direct RF power transmission around an internal volume of the electrostatic chuck; and
a clamp electrode positioned within the ceramic layer in an orientation substantially parallel to the top surface, the clamp electrode positioned at a location between the primary RF power delivery electrode and the top surface, the clamp electrode configured to generate an electrical field for holding the substrate on the top surface.

2. The ceramic layer for the electrostatic chuck as recited in claim 1 , wherein each of the at least one RF power delivery connection module includes a first electrical connection extending from the location outside the ceramic layer to a conductive segment embedded within the ceramic layer, and wherein each of the at least one RF power delivery connection module includes a second electrical connection extending from the conductive segment embedded within the ceramic layer to the primary RF power delivery electrode.

3. The ceramic layer for the electrostatic chuck as recited in claim 2 , wherein the first electrical connection is configured to receive an electrically conductive pin in compression against the conductive segment embedded within the ceramic layer.

4. The ceramic layer for the electrostatic chuck as recited in claim 2 , wherein the conductive segment embedded within the ceramic layer to which the first electrical connection extends is a lower conductive segment, the second electrical connection including one or more interior conductive segments embedded within the ceramic layer, the second electrical connection including one or more vertical conductive structures positioned to electrically connect the one or more interior conductive segments to each other and to the lower conductive segment and to the primary RF power delivery electrode.

5. The ceramic layer for the electrostatic chuck as recited in claim 4 , wherein at least one of the vertical conductive structures extends through the ceramic layer between the lower conductive segment and one of the interior conductive segments positioned closest to the lower conductive segment, and wherein at least one of the vertical conductive structures extends through the ceramic layer between the primary RF power delivery electrode and one of the interior conductive segments positioned closest to the primary RF power delivery electrode, and wherein at least one of the vertical conductive structures extends through the ceramic layer between each vertically neighboring set of two of the interior conductive segments when present.

6. The ceramic layer for the electrostatic chuck as recited in claim 4 , wherein at least four of the vertical conductive structures extend through the ceramic layer between the lower conductive segment and one of the interior conductive segments positioned closest to the lower conductive segment, and wherein at least four of the vertical conductive structures extend through the ceramic layer between the primary RF power delivery electrode and one of the interior conductive segments positioned closest to the primary RF power delivery electrode, and wherein at least four of the vertical conductive structures extend through the ceramic layer between each vertically neighboring set of two of the interior conductive segments when present.

7. The ceramic layer for the electrostatic chuck as recited in claim 2 , wherein the at least one RF power delivery connection module includes eight RF power delivery connection modules positioned near a periphery of the ceramic layer, with each of the eight RF power delivery connection modules separated from each adjacent one of the eight RF power delivery connection modules by an angle of about 45 degrees as measured about a centerline of the ceramic layer extending perpendicular to the top surface of the ceramic layer.

8. The ceramic layer for the electrostatic chuck as recited in claim 1 , wherein the primary RF power delivery electrode is formed as a disc-shaped member.

9. The ceramic layer for the electrostatic chuck as recited in claim 1 , wherein the ceramic layer is formed as a disc-shaped member.

10. The ceramic layer for the electrostatic chuck as recited in claim 1 , wherein the primary RF power delivery electrode is sectioned in a radially symmetric manner about a centerline of the ceramic layer extending perpendicular to the top surface of the ceramic layer, with each section of the primary RF power delivery electrode separated from adjacent sections of the primary RF power delivery electrode, and with each section of the primary RF power delivery electrode connected to receive RF power from a respective one of the at least one RF power delivery connection module.

11. The ceramic layer for the electrostatic chuck as recited in claim 1 , further comprising:
a perimeter RF power delivery electrode formed at a vertical location within the ceramic layer below the primary RF power delivery electrode, the perimeter RF power delivery electrode oriented substantially parallel to the primary RF power delivery electrode with a portion of the perimeter RF power delivery electrode overlapped by a portion of the primary RF power delivery electrode.

12. The ceramic layer for the electrostatic chuck as recited in claim 11 , wherein each of the at least one RF power delivery connection module includes a first electrical connection extending from the location outside the ceramic layer to a conductive segment embedded within the ceramic layer, and
wherein each of the at least one RF power delivery connection module includes a second electrical connection extending from the conductive segment embedded within the ceramic layer to the primary RF power delivery electrode, the second electrical connection including a lower electrical connection extending through the ceramic layer between the conductive segment embedded within the ceramic layer to the perimeter RF power delivery electrode, the second electrical connection also including an upper electrical connection extending through the ceramic layer from the perimeter RF power delivery electrode to the primary RF power delivery electrode.

13. The ceramic layer for the electrostatic chuck as recited in claim 12 , further comprising:
a central region including the area configured to support the substrate;
a peripheral region configured to circumscribe the central region; and
a bottom surface that extends in a substantially uniform planar manner across both the central region and the peripheral region, the central region having a first overall thickness as measured perpendicular to the bottom surface, the peripheral region having a second overall thickness as measured perpendicular

Assignees

• Lam Res Corp

Inventors

• Benjamin Neil Martin Paul
• Povolny Henry
• Ricci Anthony J

Classifications

• H10P74/238

  comprising acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection or in-situ thickness measurement · CPC title

• H10P72/722 Primary

  Details of electrostatic chucks · CPC title

• H10P72/0604

  Process monitoring, e.g. flow or thickness monitoring · CPC title

• H01J2237/334

  Etching · CPC title

• H01J37/32082 Primary

  Radio frequency generated discharge (H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence) · CPC title