Sensitized, photo-sensitive glass and its production

Patent metadata

Field	Value
Publication number	US-10472273-B2
Application number	US-201715821963-A
Country	US
Kind code	B2
Filing date	Nov 24, 2017
Priority date	May 18, 2015
Publication date	Nov 12, 2019
Grant date	Nov 12, 2019

Abstract

A sensitized, photo-structurable glasses and methods for producing are provided. The glasses includes Si 4+ , one or more crystal-agonist, one or more crystal-antagonist, and one or more pair of nucleating agents. The glasses are sensitized in that the glass reacts more sensitive to irradiation with UV-light and can be crystallized easier and with higher aspect ratios than a non-sensitized glass with equal composition. Furthermore, the sensitized glasses of this invention have smaller crystal sizes after irradiation and tempering than a non-sensitized glass with equal composition. The invention also relates to a structured glass product. Such product can be obtained by submitting the crystallized glass product to a subsequent etching step. The structured product can be used in components or as component for the application fields micro-technology, micro-reaction-technology, electronic packaging, micro-fluidics, FED spacer, bio-technology, interposer, and/or three-dimensional structured antennae.

First claim

The invention claimed is:

1. A photo-structurable glass, which comprises Si 4+ , one or more crystal-agonist, one or more crystal-antagonist and one or more pair of nucleating agents,
wherein the crystal-agonists are selected from Na + , K + , and Li + ,
wherein the crystal-antagonists are selected from Al 3+ , B 3+ , Zn 2+ , Sn 2+ and Sb 3+ ,
wherein the pair of nucleating agents comprises cerium and at least one agent from the group of silver, gold and copper,
wherein the molar proportion of the crystal-agonists in cat.-% in relation to the molar proportion of Si 4+ is at least 0.3 and at most 0.85, and
wherein the glass has a position accuracy value of less than or equal to 0.3%.

2. The glass according to claim 1 , wherein the position accuracy value is less than or equal to 0.2%.

3. The glass according to claim 1 , comprising the following components in cat.-%:

Si 4+
 45 to 65

Crystal-agonists
 30 to 45

Crystal-antagonists
3.5 to 9

4. The glass according to claim 1 , comprising the following components in cat.-%:

Si 4+
45 to 65

Crystal-agonists

Li +
25 to 40

K +
 0 to 8

Na +
 0 to 8

Crystal-antagonists

B 3+
 0 to 5

Al 3+
 0 to 10

Zn 2+
 0 to 4

Sb 3+
 0 to 0.4

Nucleating agents

Ce 3+ /Ce 4+
>0 to 0.3

Ag +
>0 to 0.5

5. The glass according to claim 1 , wherein the glass contains between 0.02 and 0.2 cat.-% Sb 3+ .

6. The glass according to claim 1 , wherein the transmittance value is at least 8% at a glass thickness of 1 mm and a wavelength of 280 nm.

7. The glass according to claim 1 , having an internal transmittance of at most 50% at 314 nm and at a thickness of 1 mm.

8. The glass according to claim 1 , wherein the surface of the glass has a roughness Ra of less than 5 nm.

9. The glass according to claim 1 , wherein the glass has a transmittance value of at least 0.2% at a wavelength of 160 nm and a sample thickness of 1 mm.

10. The glass according to claim 1 , wherein the glass has cooling state, which corresponds to a steady cooling from a temperature T1 to a temperature T2 with a cooling rate K of at most 200° C./h, wherein temperature T1 is at least above the glass transition temperature T g of the glass and the temperature T2 is at least 150° C. below T1.

11. A method for producing a glass according to claim 1 , comprising the steps of:
mixing the respective raw materials for obtaining a mixture;
melting the mixture for obtaining a melt; and
solidifying the melt for obtaining a glass.

12. The method according to claim 11 , further comprising a sensitizing the glass step subsequent to solidifying the melt, wherein the sensitizing step comprises cooling the glass from a temperature T1 to a temperature T2 with an average cooling rate of at most 200° C./h, subsequent to re-heating the glass.

13. The method according to claim 11 , wherein the solidifying the melt step comprises cooling the glass from a temperature T1 to a temperature T2 with an average cooling rate of at most 200° C./h.

14. The method according to claim 12 , wherein temperature T1 is at least above the glass transition temperature T g of the glass and temperature T2 is at least 150° C. below T1.

15. A crystallized product obtainable by light exposure and tempering of a glass according to claim 1 .

16. The crystallized product according to claim 15 , wherein the depth of light exposure is at least 1 mm.

17. A structured product obtainable by light exposure, tempering and structuring of a glass according to claim 1 .

18. A photo-structurable glass, which comprises Si 4+ , one or more crystal-agonist, one or more crystal-antagonist and one or more pair of nucleating agents,
wherein the crystal-agonists are selected from Na + , K + , and Li + ,
wherein the crystal-antagonists are selected from Al 3+ , B 3+ , Zn 2+ , Sn 2+ and Sb 3+ ,
wherein the pair of nucleating agents comprises cerium and at least one agent from the group of silver, gold and copper,
wherein the molar proportion of the crystal-agonists in cat.-% in relation to the molar proportion of Si 4+ is at least 0.3 and at most 0.85, and
wherein the glass has a cooling state, which corresponds to a steady cooling from a temperature T1 to a temperature T2 with a cooling rate K of at most 200° C./h, wherein temperature T1 is at least above the glass transition temperature T g of the glass and the temperature T2 is at least 150° C. below T1.

19. The glass according to claim 1 , wherein lithium is present, and a molar proportion of lithium exceeds the molar proportions of sodium and potassium.

Assignees

• Schott Ag

Inventors

• Schreder Bianca
• Walther Marten
• Feichtinger Martin
• Niessner Lothar
• Renz Carsten
• Qian Sean
• Xue Junming

Classifications

• C03C23/002

  by ultraviolet light · CPC title

• C03B32/00

  Thermal after-treatment of glass products not provided for in groups {C03B19/00} , C03B25/00 - C03B31/00 {or C03B37/00}, e.g. crystallisation, eliminating gas inclusions or other impurities; {Hot-pressing vitrified, non-porous, shaped glass products} · CPC title

• C03B23/0006

  by drawing (C03B23/02, C03B23/04, C03B23/18 take precedence) · CPC title

• C03B17/067

  combined with thermal conditioning of the sheets · CPC title

• C03B17/064

  by the overflow downdraw fusion process; Isopipes therefor · CPC title