Thick-film pastes containing lead-tellurium-lithium-oxides, and their use in the manufacture of semiconductor devices

Patent metadata

Field	Value
Publication number	US-10468542-B2
Application number	US-201715631005-A
Country	US
Kind code	B2
Filing date	Jun 23, 2017
Priority date	May 4, 2010
Publication date	Nov 5, 2019
Grant date	Nov 5, 2019

Abstract

The present invention provides a thick-film paste for printing the front side of a solar cell device having one or more insulating layers. The thick-film paste comprises an electrically conductive metal, and a lead-tellurium-lithium-oxide dispersed in an organic medium.

First claim

What is claimed is:

1. A thick-film paste composition for use in forming an electrical connection in a photovoltaic device comprising a semiconductor substrate having at least one insulating layer on a main surface thereof, the composition comprising:
(a) 97 to 99.75% by weight of an electrically conductive metal or derivative thereof, based on total solids in the composition;
(b) 0.25 to 3% by weight based on solids of a lead-tellurium-lithium-oxide that comprises: (i) at most 60% of PbO, (ii) more than 30% of TeO 2 , and (iii) 0 to 5% of V 2 O 5 , all by weight of the lead-tellurium-lithium-oxide; and
c) an organic medium,

wherein the thick-film paste composition, when fired, is capable of penetrating the at least one insulating layer to form an electrical contact with the photovoltaic device.

2. The thick-film paste composition of claim 1 , wherein the lead-tellurium-lithium-oxide is present as a homogeneous powder.

3. The thick-film paste composition of claim 1 , wherein the lead-tellurium-lithium-oxide is present as a combination of at least two powders having different compositions, such that the combination has an aggregate composition that comprises: (i) at most 60% of PbO, (ii) more than 30% of TeO 2 , and (iii) 0 to 5% of V 2 O 5 , all by weight of the aggregate of the lead-tellurium-lithium-oxide.

4. The thick-film paste composition of claim 3 , wherein a first of the at least two powders comprises some but not all of the elements of the group Pb, Te, Li, and O and a second of the at least two powders comprises one or more of the elements of the group Pb, Te, Li, and O.

5. The thick-film paste composition of claim 1 , wherein the lead-tellurium-lithium-oxide has a composition wherein the mole ratio of lead to tellurium is between 5/95 and 95/5.

6. A thick-film paste composition for use in forming an electrical connection in a photovoltaic device comprising a semiconductor substrate having at least one insulating layer on a main surface thereof, the composition comprising:
(a) 97 to 99.75% by weight of an electrically conductive metal or derivative thereof, based on total solids in the composition;
(b) 0.25 to 3% by weight based on solids of a lead-tellurium-lithium-oxide that comprises 30-55 wt % PbO and 40-65 wt % TeO 2 , all by weight of the lead-tellurium-lithium-oxide; and
(c) an organic medium,

wherein the thick-film paste composition, when fired, is capable of penetrating the at least one insulating layer to form an electrical contact with the photovoltaic device.

7. The thick-film paste composition of claim 1 , wherein the lead-tellurium-lithium-oxide has a composition that comprises 0 to 11% SiO 2 , by weight of the lead-tellurium-lithium-oxide.

8. A thick-film paste composition for use in forming an electrical connection in a photovoltaic device comprising a semiconductor substrate having at least one insulating layer on a main surface thereof, the composition comprising:
(a) 97 to 99.75% by weight of an electrically conductive metal or derivative thereof, based on total solids in the composition;
(b) 0.25 to 3% by weight based on solids of a lead-tellurium-lithium-oxide that comprises: (i) at most 60% of PbO and (ii) more than 30% of TeO 2 , by weight of the lead-tellurium-lithium-oxide; and
(c) an organic medium,

wherein the thick-film paste composition, when fired, is capable of penetrating the at least one insulating layer to form an electrical contact with the photovoltaic device.

9. The thick-film paste composition of claim 1 , wherein the lead-tellurium-lithium-oxide has a composition that comprises 0 to 10% B 2 O 3 , by weight of the lead-tellurium-lithium-oxide.

10. The thick-film paste composition of claim 1 , wherein the lead-tellurium-lithium-oxide comprises 0 to 10% B 2 O 3 , by weight of the lead-tellurium-lithium-oxide.

11. The thick-film paste composition of claim 1 , wherein the lead-tellurium-lithium-oxide is substantially free of CdO.

12. The thick-film paste composition of claim 1 , wherein the lead-tellurium-lithium-oxide comprises 0.1-5 wt % Li 2 O, by weight of the lead-tellurium-lithium-oxide.

13. The thick-film paste composition of claim 1 , wherein the electrically conductive metal comprises silver.

14. The thick-film paste composition of claim 1 , wherein the lead-tellurium-lithium-oxide is at least partially crystalline.

15. The thick-film paste composition of claim 1 , further comprising one or more additives selected from the group consisting of: GeO 2 , Ga 2 O 3 , In 2 O 3 , NiO, CoO, ZnO, CaO, MgO, SrO, MnO, BaO, SeO 2 , MoO 3 , WO 3 , Y 2 O 3 , As 2 O 3 , La 2 O 3 , Nd 2 O 3 , Bi 2 O 3 , Ta 2 O 5 , FeO, HfO 2 , Cr 2 O 3 , CdO, Sb 2 O 3 , PbF 2 , ZrO 2 , Mn 2 O 3 , P 2 O 5 , CuO, La 2 O 3 , Pr 2 O 3 , Al 2 O 3 , Nd 2 O 3 , Gd 2 O 3 , Sm 2 O 3 , Dy 2 O 3 , Eu 2 O 3 , Ho 2 O 3 , Yb 2 O 3 , Lu 2 O 3 , CeO 2 , BiF 3 , SnO, B 2 O 3 , SiO 2 , Ag 2 O, Nb 2 O 5 , TiO 2 , and metal halides selected from the group consisting of: NaCl, KBr, NaI, and LiF.

16. The thick-film paste composition of claim 1 , wherein the lead-tellurium-lithium-oxide further comprises oxides of one or more elements selected from the group consisting of B, Si, Sn, Ti, Ag, Na, K, Rb, Cs, Ge, Ga, In, Ni, Zn, Ca, Mg, Sr, Ba, Se, Mo, W, Y, As, La, Nd, Co, Pr, Al, Gd, Sm, Dy, Eu, Ho, Yb, Lu, Bi, Ta, Fe, Hf, Cr, Cd, Sb, Bi, F, Zr, Mn, P, Cu, Ce, and Nb.

17. A process comprising:
(a) providing a semiconductor substrate comprising one or more insulating films deposited onto at least one surface of the semiconductor substrate;
(b) applying a thick-film paste composition onto at least a portion of the insulating film to form a layered structure, wherein the thick-film paste composition comprises:
(i) 97 to 99.75% by weight of an electrically conductive metal or derivative thereof, based on total solids in the composition;
(ii) 0.25 to 3% by weight based on solids of a lead-tellurium-lithium-oxide that comprises at most 60% of PbO, more than 30% of TeO 2 , and 0 to 5% of V 2 O 5 , all by weight of the lead-tellurium-lithium-oxide; and
(iii) an organic medium; and

(c) firing the semiconductor substrate, one or more insulating films, and thick-film paste wherein the organic medium of the thick-film paste is volatilized, forming an electrode in contact with the one or more insulating films and in electrical contact with the semiconductor substrate.

18. The process of claim 17 , wherein the lead-tellurium-lithium-oxide is present as a combination of at least two powders having different compositions, such that the combination has an aggregate composition that comprises at most 60% of PbO, more than 30% of TeO 2 , and 0 to 5% V 2 O 5 , by weight of the aggregate of the lead-tellurium-lithium-oxide.

19. The process of claim 18 , wherein a first of the at least two powders comprises some but not all of the elements of the group Pb, Te, Li, and O and a second of the at least two powders comprises one or more of the elements of the group Pb, Te, Li, and O.

20. An article comprising:
(a) a semiconductor substrate;
(b) one or more insulating layers on the semiconductor substrate; and
(c) an electrode in contact with the one or more insulating layers and in electrical contact with the semiconductor substrate, the electrode comprising an electrically conductive metal and a lead-tellurium-lithium-oxide,
and wherein, prior to firing, the lead-tellurium-oxide has a composition that comprises at most 60% of PbO, more than 30% of TeO 2 , and 0 to 5% V 2 O 5 .

21. The articl

Assignees

• Dupont Electronics Inc

Inventors

• Carroll Alan Frederick
• Hang Kenneth Warren
• Laughlin Brian J
• Mikeska Kurt Richard
• Torardi Carmine
• Vernooy Paul Douglas

Classifications

• H01B1/22 Primary

  the conductive material comprising metals or alloys · CPC title

• C03C8/12

  containing titanium or zirconium · CPC title

• B22F7/08

  with one or more parts not made from powder {(B22F7/062 takes precedence)} · CPC title

• B22F7/04

  with one or more layers not made from powder, e.g. made from solid metal · CPC title

• C03C8/10

  containing lead · CPC title