Monolithic collimator and energy analyzer for ion spectrometry

Patent metadata

Field	Value
Publication number	US-10468241-B2
Application number	US-201715479231-A
Country	US
Kind code	B2
Filing date	Apr 4, 2017
Priority date	Apr 4, 2016
Publication date	Nov 5, 2019
Grant date	Nov 5, 2019

Abstract

Disclosed are various examples related to ion or particle spectrometry utilizing a monolithic collimator and energy analyzer. In one example, a particle selection device includes a single substrate including a curved channel energy analyzer section and a straight channel collimator section, wherein particles pass through the collimator section and enter the energy analyzer section of the substrate. The channel outlets in the collimator section are aligned with the channel inlets of the energy analyzer section. Electric and/or magnetic fields can be applied across the channels of the energy analyzer for ion or particle discrimination. A particle detector at the outlet of the energy analyzer section can provide indications of detected ions and/or particles.

First claim

Therefore, at least the following is claimed:

1. A particle selection device, comprising:
a single substrate including a curved channel energy analyzer section and a straight channel collimator section, wherein particles pass through the straight channel collimator section and enter the curved channel energy analyzer section of the substrate.

2. The particle selection device of claim 1 , wherein the particle selection device passes a selected particle through both the curved channel energy analyzer section and the straight channel collimator section to a particle detector.

3. The particle selection device of claim 1 , wherein the particle selection device is made on a wafer.

4. The particle selection device of claim 3 , wherein the wafer is a silicon wafer.

5. The particle selection device of claim 3 , wherein the particle selection device is made on the wafer using MEMs process techniques.

6. The particle selection device of claim 1 , wherein the curved channel energy analyzer section is configured to apply a transverse electric field.

7. The device of claim 6 , wherein channels of the particle selection device are closed with a secondary substrate configured to apply voltages across the channels.

8. The particle selection device of claim 1 , wherein the curved channel energy analyzer section is configured to apply a transverse magnetic field.

9. The particle selection device of claim 8 , wherein channels of the particle selection device are closed with a secondary substrate configured to apply magnetic fields to walls of the channels.

10. The particle selection device of claim 9 , wherein the magnetic fields are applied through an external coil.

11. The particle selection device of claim 9 wherein the secondary substrate is a permanent magnet substrate.

12. The particle selection device of claim 8 , wherein the particle selection device is configured to apply magnetic fields through an external coil and the secondary substrate is constructed of a soft magnetic material.

13. The particle selection device of claim 8 , wherein the secondary substrate comprises a resistive network where a device electrode adjacent to energy bands is configured to bias the channels within the energy band.

14. The particle selection device of claim 1 , comprising a plurality of stacked single substrates, each single substrate of the plurality of stacked single substrates comprising at least one straight channel collimator section and at least one curved channel energy analyzer section.

15. The particle selection device of claim 1 , comprising a plurality of single substrates that are stacked.

16. The particle selection device of claim 15 , wherein the plurality of single substrates are connected with through substrate vias (TSVs).

17. The device of claim 1 , wherein channels of the particle selection device are closed with a secondary substrate configured to apply voltages across the channels.

18. The particle selection device of claim 1 , wherein channels of the particle selection device are closed with a secondary substrate configured to apply magnetic fields to walls of the channels.

Assignees

• Univ West Virginia

Inventors

• Scime Earl
• Keesee Amy M
• Dugas Matthew Phillip
• Ellison Steven Brian
• Tersteeg Joseph Christopher David
• Elliott Drew B

Classifications

• H01J49/48 Primary

  using electrostatic analysers, e.g. cylindrical sector, Wien filter · CPC title

• H01J49/0018 Primary

  Microminiaturised spectrometers, e.g. chip-integrated devices, Micro-Electro-Mechanical Systems [MEMS] · CPC title

• H01J49/06

  Electron- or ion-optical arrangements · CPC title