Holding device, method of determining attraction abnormality in holding device, lithography apparatus, and method of manufacturing article
US-2024393682-A1 · Nov 28, 2024 · US
US10466136B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10466136-B2 |
| Application number | US-201715843466-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 15, 2017 |
| Priority date | Jul 31, 2017 |
| Publication date | Nov 5, 2019 |
| Grant date | Nov 5, 2019 |
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The present application provides a leak hole leak rate detection device and a method for implementing leak hole leak rate detection using the device. The device includes a gas storage tank, a valve, a leak hole, a latex sealing container, an electronic stopwatch and an electronic balance. The device can detect the leak rates of leak holes within a range of 1×10 −1 ˜1×10 −8 Pa·m 3 /s, and has the characteristics of scientific detection principle, simple and reasonable structure and the like.
Opening claim text (preview).
What is claimed is: 1. A leak hole leak rate detection device, comprising an oxygen gas source valve, a nitrogen gas source valve, a pressure gauge, a leak hole, a control valve, a gas storage tank, a latex sealing container, an electronic balance and an electronic stopwatch, wherein that detection medium is a mixed gas of nitrogen and oxygen, and is controlled by the oxygen gas source valve and the nitrogen gas source valve; the leak hole is mounted on the gas storage tank, and the control valve is used for controlling access of leak gas; the latex sealing container is used for collecting leak gas passing through the leak hole, and the electronic balance is used for acquiring the mass change of the latex sealing container; and the electronic stopwatch is used for recording time, and the pressure gauge is mounted on the gas storage tank. 2. A detection method for the leak hole leak rate detection device of claim 1 , comprising the steps of: mixing oxygen and nitrogen in a volume ratio of 21% and 79% via the oxygen gas source valve and the nitrogen gas source valve to obtain a mixed gas that has a density the same with that of air and is stable as a detection medium, and storing the detection medium into the gas storage tank; obtaining the pressure value in the gas storage tank via the pressure gauge, and keeping the pressure value constant at 0.2 MPa, the pressure value is greater than atmospheric pressure, so that high pressure gas can flow to air; collecting leak gas to the latex sealing container via the leak hole and the valve mounted on the gas storage tank, and when the valve is opened, pressing the electronic stopwatch down to start timing, at the same time recording the atmospheric pressure and temperature of the environment of the detection device, the detection device is operated in a constant temperature environment, i.e., the environmental temperature is maintained at 23° C.±0.5° C.; and after gas enters the latex sealing container, reading the mass of the leak gas entering the latex sealing container from the electronic balance with the accumulation of time, and obtaining the leak rate of the leak hole by calculation.
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