Method and system for growth of graphene nanostripes by plasma enhanced chemical vapor deposition

Patent metadata

Field	Value
Publication number	US-10465291-B2
Application number	US-201815900517-A
Country	US
Kind code	B2
Filing date	Feb 20, 2018
Priority date	Sep 26, 2017
Publication date	Nov 5, 2019
Grant date	Nov 5, 2019

Abstract

A method of forming graphene nanostripes includes providing a substrate comprising at least one of copper foil or nickel foam and subjecting the substrate to a reduced pressure environment in a processing chamber. The method also includes providing methane gas and 1,2-dichlorobenzene (1,2-DCB) gas, flowing the methane gas and the 1,2-DCB into the processing chamber, and establishing a partial pressure ratio of 1,2-DCB gas to methane gas in the processing chamber. The partial pressure ratio is between 0 and 3. The method further includes generating a plasma, thereafter, exposing the at least a portion of the substrate to the methane gas, the 1,2-DCB gas, and the plasma, and growing the graphene nanostripes coupled to the at least a portion of the substrate.

First claim

What is claimed is:

1. A method of forming vertical graphene nanostripes comprising one or several monolayers and characterized by a thickness normal to the one or several monolayers, a length orthogonal to the thickness, and a width orthogonal to the thickness, the method comprising:
providing a substrate consisting of copper foil or nickel foam;
subjecting the substrate to a reduced pressure environment in a processing chamber;
providing methane gas and 1,2-dichlorobenzene (1,2-DCB) gas;
flowing the methane gas and the 1,2-DCB into the processing chamber;
establishing a partial pressure ratio of 1,2-DCB gas to methane gas in the processing chamber, wherein the partial pressure ratio is between 0 and 3;
generating a plasma;
thereafter, exposing the at least a portion of the substrate to the methane gas, the 1,2-DCB gas, and the plasma; and
growing the vertical graphene nanostripes coupled to the at least a portion of the substrate, wherein one or more of the vertical graphene nanostripes are characterized by the thickness measured parallel to the substrate, the length extending parallel to the substrate in a first direction, and the width extending orthogonal to the substrate in a second direction, and an aspect ratio of the length to the width ranging from 10:1 to 130:1.

2. The method of claim 1 wherein the partial pressure ratio is between 1 and 2.

3. The method of claim 1 further comprising generating C 6 radicals in the processing chamber concurrently with:
exposing the at least a portion of the substrate to the methane gas, the 1,2-DCB gas, and the plasma; and
growing the vertical graphene nanostripes.

4. The method of claim 1 further comprising generating C 6 H 6 in the processing chamber concurrently with:
exposing the at least a portion of the substrate to the methane gas, the 1,2-DCB gas, and the plasma; and
growing the vertical graphene nanostripes.

5. The method of claim 1 further comprising providing hydrogen gas and generating HCl in the processing chamber concurrently with:
exposing the at least a portion of the substrate to the methane gas, the 1,2-DCB gas, and the plasma; and
growing the vertical graphene nanostripes.

6. The method of claim 1 further comprising generating CN radicals in the processing chamber concurrently with:
providing a gas including nitrogen;
exposing the at least a portion of the substrate to the methane gas, the gas including nitrogen, the 1,2-DCB gas, and the plasma; and
growing the vertical graphene nanostripes.

7. The method of claim 1 wherein the one or several monolayers consist of one monolayer.

8. The method of claim 1 wherein the substrate comprises a growth substrate.

9. The method of claim 1 wherein growing the vertical graphene nanostripes coupled to the at least a portion of the substrate comprises bonding of benzene rings to the substrate with carbon atoms of the benzene rings aligned with the length and the width of the vertical graphene nanostripes.

10. The method of claim 9 wherein growing the vertical graphene nanostripes coupled to the at least a portion of the substrate further comprises bonding of additional benzene rings to previously bonded benzene rings with carbon atoms of the additional benzene rings aligned with the length and the width of the vertical graphene nanostripes.

11. A method of forming vertical graphene nanostripes comprising one or several monolayers and characterized by a thickness normal to the one or several monolayers, a length orthogonal to the thickness, and a width orthogonal to the thickness, the method comprising:
providing a transition-metal substrate consisting of copper foil or nickel foam;
subjecting the transition-metal substrate to a reduced pressure environment;
providing methane gas and 1,2-dichlorobenzene (1,2-DCB) gas;
exposing at least a portion of the transition-metal substrate to the methane gas and the (1,2-DCB) gas;
generating a plasma;
exposing the at least a portion of the transition-metal substrate to the methane gas, the (1,2-DCB) gas, and the plasma; and
growing the vertical graphene nanostripes coupled to the at least a portion of the transition-metal substrate, wherein one or more of the vertical graphene nanostripes are characterized by the thickness measured parallel to the transition-metal substrate, the length extending parallel to the transition-metal substrate in a first direction, and the width extending orthogonal to the transition-metal substrate in a second direction, and an aspect ratio of the length to the width ranging from 10:1 to 130:1.

12. The method of claim 11 wherein the one or several monolayers consist of one monolayer.

13. The method of claim 11 wherein generating the plasma and exposing the at least a portion of the transition-metal substrate is performed after exposing the at least a portion of the transition-metal substrate to the methane gas and the (1,2-DCB) gas.

14. The method of claim 11 further comprising generating C 6 and C 2 radicals during exposing the at least a portion of the transition-metal substrate to the methane gas, the (1,2-DCB) gas, and the plasma.

15. The method of claim 11 further comprising generating C 6 H 6 during exposing the at least a portion of the transition-metal substrate to the methane gas, the (1,2-DCB) gas, and the plasma.

16. The method of claim 11 wherein a partial pressure ratio of the (1,2-DCB) gas to methane ranges from 0 to 3.

17. The method of claim 16 wherein the partial pressure ratio ranges from 1 to 2.

Assignees

• California Inst Of Techn

Inventors

• Yeh Nai-Chang
• Hsu Chen-Chih

Classifications

• C23C16/4418

  Methods for making free-standing articles (C23C16/01 takes precedence) · CPC title

• C01B2204/06

  Graphene nanoribbons · CPC title

• C01B32/186 Primary

  by chemical vapour deposition [CVD] · CPC title

• C23C16/50

  using electric discharges {(generation and control of plasma in discharge tubes for surface treatment H01J37/32, H01J37/34)} · CPC title

• B82Y40/00

  Manufacture or treatment of nanostructures · CPC title