Ultrasonic detection device and ultrasonic diagnostic device

Patent metadata

Field	Value
Publication number	US-10464102-B2
Application number	US-201514943597-A
Country	US
Kind code	B2
Filing date	Nov 17, 2015
Priority date	Nov 6, 2009
Publication date	Nov 5, 2019
Grant date	Nov 5, 2019

Abstract

Provided is an ultrasonic detection device including: a capacitive electromechanical transducer including a cell that includes a first electrode and a second electrode disposed so as to oppose with a space; a voltage source for developing a potential difference between the first electrode and the second electrode; and an electric circuit for converting a current, which is caused by a change in electrostatic capacitance between the first electrode and the second electrode due to vibration of the second electrode, into a voltage, in which the capacitive electromechanical transducer provides an output current with a high-pass characteristic having a first cutoff frequency with respect to a frequency, the electric circuit provides an output with a low-pass characteristic having a second cutoff frequency with respect to the frequency, and the second cutoff frequency is smaller than the first cutoff frequency.

First claim

The invention claimed is:

1. An ultrasonic detection device comprising:
a capacitive electromechanical transducer for receiving an ultrasonic wave including at least one cell that includes a first electrode and a second electrode disposed opposite from the first electrode, a space being between the first electrode and the second electrode; and
an electric circuit for converting a current, which is output from the capacitive electromechanical transducer, into a voltage,
wherein frequency characteristic of output current of the capacitive electromechanical transducer with respect to an ultrasonic wave to be received has a first slope domain where a value becomes small as a frequency becomes low and a first flat domain;
wherein frequency characteristic of output voltage of the electric circuit with respect to a current to be input has a second slope domain where a value becomes small as the frequency becomes high and a second flat domain;
wherein the ultrasonic detection device has a range where the first slope domain overlaps with the second slope domain; and
wherein the frequency band of the first flat domain is higher than the frequency band of the first slope domain, and the frequency band of the second flat domain is lower than the frequency band of the second slope domain.

2. The ultrasonic detection device according to claim 1 , wherein the at least one cell further includes a vibrating membrane that vibratably supports the second electrode.

3. The ultrasonic detection device according to claim 2 , wherein the first slope domain is in a domain lower than a resonance frequency of the vibrating membrane.

4. The ultrasonic detection device according to claim 1 , wherein the first slope domain is in a domain lower than a frequency showing a maximum value of the output current of the capacitive electromechanical transducer with respect to the ultrasonic wave to be received.

5. The ultrasonic detection device according to claim 1 , wherein the first slope domain is in a domain lower than a frequency showing a value lowered by 3 dB at a frequency side lower than a frequency at which the output current of the capacitive electromechanical transducer shows a maximum value with respect to the ultrasonic wave to be received.

6. The ultrasonic detection device according to claim 1 , wherein the second slope domain is in a domain higher than a frequency showing a maximum value of the output voltage of the electric circuit with respect to the current to be input.

7. The ultrasonic detection device according to claim 1 , wherein the second slope domain is in a domain higher than a frequency showing that the output voltage of the electric circuit is lowered by 3 dB than a low band with respect to the current to be input.

8. The ultrasonic detection device according to claim 1 , wherein the capacitive electromechanical transducer includes a plurality of cells, where some of cells constitutes an element, and
wherein the frequency characteristic of output current of the capacitive electromechanical transducer with respect to the ultrasonic wave to be received is determined according to factors including an average of mechanical characteristic of a plurality of second electrodes disposed in the plurality of cells and electrostatic capacitances of the element.

9. The ultrasonic detection device according to claim 1 , wherein the frequency characteristic of the output current of the capacitive electromechanical transducer with respect to the ultrasonic wave to be received is frequency characteristic of the output current of the capacitive electromechanical transducer with respect to a unit sound pressure of an ultrasonic wave to be received.

10. The ultrasonic detection device according to claim 1 , wherein the frequency characteristic of the output voltage of the electric circuit with respect to the current to be input is frequency characteristic of a conversion gain of the output voltage of the electric circuit with respect to the current to be input.

11. The ultrasonic detection device according to claim 1 , wherein the capacitive electromechanical transducer includes a plurality of cells, where some of cells constitutes an element.

12. The ultrasonic detection device according to claim 11 , wherein the plurality of elements is disposed on a substrate.

13. The ultrasonic detection device according to claim 1 , wherein the capacitive electromechanical transducer receives an ultrasonic wave generated in an object to be tested by absorption of light.

14. The ultrasonic detection device according to claim 1 , wherein the capacitive electromechanical transducer transmits an ultrasonic wave.

15. An ultrasonic diagnostic device comprising:
a light source;
an ultrasonic detection device for detecting an ultrasonic wave generated by applying light emitted from the light source to an object to be tested; and
a signal processing system that processes a signal output from the ultrasonic detection device,
wherein the ultrasonic detection device comprises:
a capacitive electromechanical transducer for receiving an ultrasonic wave including at least one cell that includes a first electrode and a second electrode disposed opposite from the first electrode, a space being between the first electrode and the second electrode; and
an electric circuit for converting a current, which is output from the capacitive electromechanical transducer, into a voltage,

wherein frequency characteristic of output current of the capacitive electromechanical transducer with respect to an ultrasonic wave to be received has a first slope domain where a value becomes small as a frequency becomes low and a first flat domain;
wherein frequency characteristic of output voltage of the electric circuit with respect to a current to be input has a second slope domain where a value becomes small as the frequency becomes high and a second flat domain;
wherein the ultrasonic detection device has a range where the first slope domain overlaps with the second slope domain; and
wherein the frequency band of the first flat domain is higher than the frequency band of the first slope domain, and the frequency band of the second flat domain is lower than the frequency band of the second slope domain.

16. An ultrasonic detection device comprising:
a capacitive electromechanical transducer for receiving an ultrasonic wave including at least one cell that includes a first electrode and a second electrode disposed opposite from the first electrode, a space being between the first electrode and the second electrode; and
an electric circuit for converting a current, which is output from the capacitive electromechanical transducer, into a voltage,
wherein frequency characteristic of output current of the capacitive electromechanical transducer with respect to an ultrasonic wave to be received has a first flat domain where a value is constant for frequency and a first slope domain where a value becomes small as a frequency becomes low;
wherein frequency characteristic of output voltage of the electric circuit with respect to a current to be input has a second flat domain where a value is constant for frequency and a second slope domain where a value becomes small as the frequency becomes high;
wherein the ultrasonic detection device has a portion where the first slope domain overlaps with the second slope domain; and
wherein the frequency band of the first flat domain is higher than the frequency band of the first slope domain, and the frequency band of the second flat domain is lower than the frequency band of the second slope domain.

17

Assignees

• Canon Kk

Inventors

• Akiyama Takahiro
• Takagi Makoto
• Fujii Kazunari
• Mizutani Hidemasa

Classifications

• G01N29/2418

  using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics (photoacoustic cells G01N21/1702; measuring characteristics of vibrations by using radiation-sensitive means G01H9/00; acousto-optical conversion techniques for short-range imaging G01S15/8965; sound-producing devices using laser bundle G10K15/046) · CPC title

• G01N29/2406

  Electrostatic or capacitive probes, e.g. electret or cMUT-probes · CPC title

• G01N2291/101

  one transducer · CPC title

• B06B1/0292 Primary

  Electrostatic transducers, e.g. electret-type · CPC title

• G01N29/24

  Probes {(transducers for acoustic waves B06B, G10K; for measuring G01H)} · CPC title