Ultrasonic sensing device

Patent metadata

Field	Value
Publication number	US-10461124-B2
Application number	US-201715670976-A
Country	US
Kind code	B2
Filing date	Aug 7, 2017
Priority date	Aug 7, 2017
Publication date	Oct 29, 2019
Grant date	Oct 29, 2019

Abstract

An electronic device comprises a CMOS substrate having a first surface and a second surface opposite the first surface. A plurality of ultrasonic transducers is provided having a transmit/receive surface. A contact surface is piezoelectrically associated with the plurality of ultrasonic transducers and is formed on the first surface of the CMOS substrate. The plurality of ultrasonic transducers is disposed on the second surface of the CMOS substrate, with the transmit/receive side attached to the second surface thereof such that the CMOS substrate is between the plurality of ultrasonic transducers and the platen. An image sensing system is also provided, together with a method for ultrasonic sensing in the electronic device.

First claim

What is claimed is:

1. An electronic device comprising:
a CMOS substrate having a first surface and a second surface opposite the first surface;
a plurality of Piezoelectric Micromachined Ultrasonic Transducer (PMUT) devices having a transmit/receive surface, wherein the transmit/receive surface is disposed on the second surface of the CMOS substrate, wherein at least one PMUT device comprises:
an edge support structure connected to the CMOS substrate; and
a membrane connected to the edge support structure such that a cavity is defined between the membrane and the CMOS substrate, the membrane configured to allow movement at ultrasonic frequencies, the membrane comprising:
a piezoelectric layer; and
first and second electrodes coupled to opposing sides of the piezoelectric layer; and

an interior support structure disposed within the cavity and connected to the CMOS substrate and the membrane; and

a contact surface piezoelectrically associated with the plurality of PMUT devices and disposed on the first surface;
wherein the CMOS substrate is between the plurality of PMUT devices and the contact surface.

2. The electronic device of claim 1 , wherein at least one of the edge support structure and the interior support structure is configured in at least one of shape, size and placement to optimize acoustic injection into the CMOS substrate.

3. The electronic device of claim 1 , wherein the contact surface is a platen.

4. The electronic device of claim 1 , further including an epoxy disposed on the second surface of the CMOS substrate and encapsulating the plurality of PMUT devices.

5. The electronic device of claim 4 , wherein the epoxy is acoustically damping.

6. The electronic device of claim 1 wherein the contact surface, the CMOS substrate, and the plurality of PMUT devices are configured to operate as a sensor.

7. The electronic device of claim 6 , wherein the contact surface is adapted to receive a human finger for sensing a fingerprint.

8. The electronic device of claim 1 , wherein the contact surface is acoustically coupled to the first surface of the CMOS substrate.

9. The electronic device of claim 1 , wherein the CMOS substrate comprises logic, control, and communication electronics, to which the plurality of PMUT devices is connected.

10. A mobile electronic device comprising:
a host processor;
a host memory; and
an ultrasonic sensor comprising:
a CMOS substrate having a first surface and a second surface opposite the first surface, the CMOS substrate comprising logic, control, and communication electronics;
a plurality of vibratory devices formed on the second surface of the CMOS substrate, each vibratory device comprising a Piezoelectric Micromachined Ultrasonic Transducer (PMUT) device to emit acoustic waves, wherein the PMUT device comprises:
an edge support structure connected to the CMOS substrate; and
a membrane connected to the edge support structure such that a cavity is defined between the membrane and the CMOS substrate, the membrane configured to allow movement at ultrasonic frequencies, the membrane comprising:
a piezoelectric layer; and
first and second electrodes coupled to opposing sides of the piezoelectric layer; and

an interior support structure disposed within the cavity and connected to the CMOS substrate and the membrane; and

a platen formed over the first surface;

wherein the CMOS substrate is between the plurality of vibratory devices and the platen.

11. The mobile electronic device of claim 10 , wherein the platen comprises a contact surface adapted to receive a human finger for sensing a fingerprint.

12. The mobile electronic device of claim 10 , wherein the ultrasonic sensor is configured to sense a fingerprint of a human finger.

13. The mobile electronic device of claim 10 , further including an acoustic coupling layer to couple the platen to the first surface.

14. A method for ultrasonic sensing using an electronic device, the method comprising:
providing a CMOS substrate having a first surface and a second surface opposite the first surface;
forming a plurality Piezoelectric Micromachined Ultrasonic Transducer (PMUT) devices having a transmit/receive side on the second surface of the CMOS substrate, wherein the transmit/receive side is disposed on the second surface, wherein at least one PMUT device comprises:
an edge support structure connected to the CMOS substrate; and
a membrane connected to the edge support structure such that a cavity is defined between the membrane and the CMOS substrate, the membrane configured to allow movement at ultrasonic frequencies, the membrane comprising:
a piezoelectric layer; and
first and second electrodes coupled to opposing sides of the piezoelectric layer; and

an interior support structure disposed within the cavity and connected to the CMOS substrate and the membrane; and

forming a platen on the first surface and having a contact surface piezoelectrically associated with the plurality of PMUT devices,
wherein the CMOS substrate is sandwiched between the plurality of PMUT devices and the platen.

15. The method of claim 14 further including forming an acoustic coupling layer on the first surface to which the platen is adhered.

16. The method of claim 14 , wherein the PMUT devices and the platen form a sensing element that is configured to sense a fingerprint of a human finger.

17. The method of claim 14 further encapsulating the plurality of PMUT devices in an acoustic damping epoxy.

18. The method of claim 14 , further comprising forming logic, control, and communication electronics in the CMOS substrate.

19. The method of claim 14 , further comprising causing acoustic waves to be emitted towards the platen through the CMOS substrate.

20. The method of claim 14 , further comprising detecting acoustic waves that reflect off an object on the platen.

Assignees

• Invensense Inc

Inventors

• Berger Renata Melamud
• Tsai Julius Ming-Lin
• Lloyd Stephen

Classifications

• G01N2291/106

  one or more transducer arrays · CPC title

• B81C1/00246

  Monolithic integration, i.e. micromechanical structure and electronic processing unit are integrated on the same substrate · CPC title

• G01N29/28

  providing acoustic coupling {, e.g. water (impedance matching G10K11/02)} · CPC title

• G01N29/2437 Primary

  Piezoelectric probes · CPC title

• H01L41/1138

  Electricity · mapped topic