Lift pin holder with spring retention for substrate processing systems

Patent metadata

Field	Value
Publication number	US-10460977-B2
Application number	US-201615280352-A
Country	US
Kind code	B2
Filing date	Sep 29, 2016
Priority date	Sep 29, 2016
Publication date	Oct 29, 2019
Grant date	Oct 29, 2019

Abstract

A lift pin holder assembly includes a lift pin holder including a central bore defining a first groove arranged on a radially inner surface of the central bore. The lift pin holder is made of a non-metallic material. A lift pin includes a second groove arranged on a radially outer surface thereof. A spring is at least partially arranged in the first groove of the lift pin holder and the second groove of the lift pin to retain the lift pin in the lift pin holder.

First claim

What is claimed is:

1. A lift pin holder assembly, comprising:
a lift pin holder including a central bore extending in a first direction, wherein the central bore defines a first groove arranged transverse to the first direction on a radially inner surface of the central bore,
wherein the lift pin holder is made of ceramic;
a lift pin received in the central bore, extending in the first direction and including a second groove arranged transverse to the first direction on a radially outer surface thereof; and
a spring at least partially arranged in the first groove of the lift pin holder and the second groove of the lift pin to retain the lift pin in the central bore of the lift pin holder.

2. The lift pin holder assembly of claim 1 , wherein the spring comprises a metal.

3. The lift pin holder assembly of claim 1 , wherein the spring comprises a metal including nickel alloy.

4. The lift pin holder assembly of claim 1 , wherein the spring includes a coil spring.

5. The lift pin holder assembly of claim 1 , wherein the spring includes a canted coil spring.

6. The lift pin holder assembly of claim 1 , wherein the lift pin is made of a material including sapphire.

7. The lift pin holder assembly of claim 1 , wherein the lift pin holder includes:
a lower portion having a cylindrical outer cross-section;
a middle portion having a cylindrical outer cross-section that has a smaller diameter than the cylindrical outer cross-section of the lower portion; and
an upper portion having a cylindrical outer cross-section that has a smaller diameter than the cylindrical outer cross-section of the lower portion and a greater diameter than the cylindrical outer cross-section of the middle portion.

8. The lift pin holder assembly of claim 7 , further comprising an inverted cone-shaped cavity located on a top surface of the upper portion.

9. A lift pin holder assembly, comprising:
a lift pin holder including a central bore defining a first groove arranged on a radially inner surface of the central bore,
wherein the lift pin holder is made of a non-metallic material;
a lift pin including a second groove on a radially outer surface thereof; and
a spring at least partially arranged in the first groove of the lift pin holder and the second groove of the lift pin to retain the lift pin in the central bore of the lift pin holder,
wherein the spring has a rounded square shape with an opening located at one corner thereof, wherein opposite sides of the spring are separated by a distance that is less than an outer diameter of the lift pin and opposite corners that are separated by a distance that is greater than or equal to an outer diameter of the lift pin.

10. The lift pin holder assembly of claim 9 , wherein the spring is made of nickel alloy.

11. A lift pin holder assembly, comprising:
a lift pin holder including a central bore extending in a first direction, wherein the central bore defines a first groove arranged transverse to the first direction on a radially inner surface of the central bore,
wherein the lift pin holder is made of ceramic;
a lift pin received in the central bore, extending in the first direction and including a second groove arranged transverse to the first direction on a radially outer surface thereof; and
a spring at least partially arranged in the first groove of the lift pin holder and the second groove of the lift pin to retain the lift pin in the lift pin holder, wherein the spring includes a coil spring that is made of metal.

12. The lift pin holder assembly of claim 11 , wherein the metal includes nickel alloy.

13. The lift pin holder assembly of claim 11 , wherein the coil spring includes a canted coil spring.

14. The lift pin holder assembly of claim 11 , wherein the lift pin is made of a material including sapphire.

15. The lift pin holder assembly of claim 11 , wherein the lift pin holder includes:
a lower portion having a cylindrical outer cross-section;
a middle portion having a cylindrical outer cross-section that has a smaller diameter than the cylindrical outer cross-section of the lower portion; and
an upper portion having a cylindrical outer cross-section that has a smaller diameter than the cylindrical outer cross-section of the lower portion and a greater diameter than the cylindrical outer cross-section of the middle portion.

16. The lift pin holder assembly of claim 15 , further comprising an inverted cone-shaped cavity located on a top surface of the upper portion.

17. A lift pin holder assembly, comprising:
a lift pin holder including a central bore extending in a first direction, wherein the central bore defines a first groove arranged transverse to the first direction on a radially inner surface of the central bore, wherein the lift pin holder is made of ceramic and wherein the lift pin holder includes:
a lower portion having a cylindrical outer cross-section;
a middle portion having a cylindrical outer cross-section that has a smaller diameter than the cylindrical outer cross-section of the lower portion; and
an upper portion having a cylindrical outer cross-section that has a smaller diameter than the cylindrical outer cross-section of the lower portion and a greater diameter than the cylindrical outer cross-section of the middle portion, wherein the upper portion includes an inverted cone-shaped cavity located on a top surface of the upper portion;

a lift pin received in the central bore, extending in the first direction and including a second groove arranged transverse to the first direction on a radially outer surface thereof, wherein the lift pin is made of sapphire; and
a spring that is made of metal and that is at least partially arranged in the first groove of the lift pin holder and the second groove of the lift pin to retain the lift pin in the lift pin holder.

18. The lift pin holder assembly of claim 17 , wherein the spring includes a canted coil spring.

19. The lift pin holder assembly of claim 17 , wherein the spring has a rounded square shape with an opening located at one corner thereof, wherein opposite sides of the spring are separated by a distance that is less than an outer diameter of the lift pin and opposite corners that are separated by a distance that is greater than or equal to an outer diameter of the lift pin.

Assignees

• Lam Res Corp

Inventors

• Breninger Andrew H
• Lind Gary

Classifications

• H10P72/7612 Primary

  characterised by lifting arrangements, e.g. lift pins · CPC title

• F16F1/045

  Canted-coil springs · CPC title

• F16B21/073

  the socket having a resilient part on its inside · CPC title

• F16L37/22

  in which the connection is maintained by means of balls, rollers or helical springs under radial pressure between the parts · CPC title

• H01L21/68742 Primary

  Electricity · mapped topic