Electrostatic chuck

Patent metadata

Field	Value
Publication number	US-10460970-B2
Application number	US-201815903175-A
Country	US
Kind code	B2
Filing date	Feb 23, 2018
Priority date	Sep 30, 2015
Publication date	Oct 29, 2019
Grant date	Oct 29, 2019

Abstract

An electrostatic chuck includes a dielectric layer including an oriented alumina sintered body having a degree of c-plane orientation of 5% or more, the degree of c-plane orientation being determined by a Lotgering method using an X-ray diffraction profile obtained by the irradiation of an X-ray in the 2θ range of 20° to 70°; a ceramic layer integrated with a surface disposed opposite a wafer placement surface of the dielectric layer; and an electrostatic electrode between the dielectric layer and the ceramic layer.

First claim

What is claimed is:

1. An electrostatic chuck comprising:
a dielectric layer including an oriented alumina sintered body having a degree of c-plane orientation of 5% or more, the degree of c-plane orientation being determined by a Lotgering method using an X-ray diffraction profile obtained by the irradiation of an X-ray in the 2θ range of 20° to 70°;
a ceramic layer integrated with a surface disposed opposite a wafer placement surface of the dielectric layer; and
an electrostatic electrode between the dielectric layer and the ceramic layer,
wherein a proportion by volume of pores having a diameter of 0.2 μm or more with respect to the volume of the oriented alumina sintered body is 130 ppm or less by volume.

2. The electrostatic chuck according to claim 1 , wherein the ceramic layer contains alumina serving as a main component.

3. The electrostatic chuck according to claim 1 , wherein the oriented alumina sintered body has a degree of c-plane orientation of 70% or more.

4. The electrostatic chuck according to claim 1 , wherein the oriented alumina sintered body has a sintered grain size of 15 to 200 μm.

5. The electrostatic chuck according to claim 1 , wherein the oriented alumina sintered body has a volume resistivity of 1×10 17 Ωcm or more at room temperature and a volume resistivity of 1×10 15 Ωcm or more at 200° C.

6. The electrostatic chuck according to claim 1 , wherein a full width at half maximum obtained in an X-ray rocking curve (XRC) measurement of the oriented alumina sintered body is 15° or less.

7. The electrostatic chuck according to claim 1 , wherein a content of an impurity element other than Mg, C, or F in the oriented alumina sintered body is 50 ppm or less.

8. The electrostatic chuck according to claim 1 , wherein the oriented alumina sintered body has a content of F of 200 ppm or less by mass.

9. An electrostatic chuck comprising:
a dielectric layer including an oriented alumina sintered body having a degree of c-plane orientation of 5% or more, the degree of c-plane orientation being determined by a Lotgering method using an X-ray diffraction profile obtained by the irradiation of an X-ray in the 2θ range of 20° to 70°;
a ceramic layer integrated with a surface disposed opposite a wafer placement surface of the dielectric layer; and
an electrostatic electrode between the dielectric layer and the ceramic layer,
wherein when an image obtained by capturing a field of view having a length of 370.0 μm and a width of 372.0 μm with a scanning electron microscope at a magnification of 1,000 is visually observed, the number of foreign objects having a diameter of 0.2 μm or more is 50 or less.

10. The electrostatic chuck according to claim 9 , wherein the ceramic layer contains alumina serving as a main component.

11. The electrostatic chuck according to claim 9 , wherein the oriented alumina sintered body has a degree of c-plane orientation of 70% or more.

12. The electrostatic chuck according to claim 9 , wherein the oriented alumina sintered body has a sintered grain size of 15 to 200 μm.

13. The electrostatic chuck according to claim 9 , wherein the oriented alumina sintered body has a volume resistivity of 1×10 17 Ωcm or more at room temperature and a volume resistivity of 1×10 15 Ωcm or more at 200° C.

14. The electrostatic chuck according to claim 9 , wherein a full width at half maximum obtained in an X-ray rocking curve (XRC) measurement of the oriented alumina sintered body is 15° or less.

15. The electrostatic chuck according to claim 9 , wherein a content of an impurity element other than Mg, C, or F in the oriented alumina sintered body is 50 ppm or less.

16. The electrostatic chuck according to claim 9 , wherein the oriented alumina sintered body has a content of F of 200 ppm or less by mass.

Assignees

• Ngk Insulators Ltd

Inventors

• Watanabe Morimichi
• Nanataki Tsutomu

Classifications

• H10P72/7616

  characterised by a coating, a hardness or a material · CPC title

• H10P72/72

  using electrostatic chucks · CPC title

• H10P72/722 Primary

  Details of electrostatic chucks · CPC title

• C04B2237/064

  based on alumina or aluminates · CPC title

• C04B2235/787

  Oriented grains · CPC title