Plasma processing apparatus
US-2015248994-A1 · Sep 3, 2015 · US
US10458569B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10458569-B2 |
| Application number | US-201615355348-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 18, 2016 |
| Priority date | Nov 18, 2015 |
| Publication date | Oct 29, 2019 |
| Grant date | Oct 29, 2019 |
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The positioner having an air circuit including magnetism generating portions producing magnetism based on a current in accordance with a difference between a valve opening setpoint of a regulator valve and a measured value for the valve opening, to generate a pneumatic signal wherein the air pressure is adjusted based on the magnetism produced by the magnetism generating portions, where this pneumatic signal is supplied to an operating device of the regulator valve, where the magnetism generating portions are connected in parallel, and including a plurality of coils connected through magnetically additive coupling.
Opening claim text (preview).
I claim: 1. A positioner, comprising: an air circuit comprising a magnetism generator that generates magnetism based on an electric current in accordance with a difference between a valve opening setpoint for a regulator valve that is to be controlled and a measured valve opening value for the regulator valve, the air circuit generating a pneumatic signal adjust air pressure wherein the pneumatic signal is generated based on the magnetism produced by the magnetism generator, and is supplied to an operating device of the regulator valve, and the magnetism generator includes a plurality of separate coils that are connected in parallel electrically and that are additively coupled magnetically, wherein the magnetism generator further comprises: a main interconnection to supply the electric current; a plurality of branch interconnections, provided for each of the plurality of coils, branching from the main interconnection; and a plurality of Zener diodes, provided for each of the plurality of coils, wherein a corresponding coil and corresponding Zener diodes are connected in parallel with each of the branch interconnections. 2. The positioner as set forth in claim 1 , wherein the magnetism generator further comprises a core that passes through the plurality of coils; and the plurality of coils are disposed separated from each other in a direction in which the core extends. 3. The positioner as set forth in claim 1 , wherein the plurality of coils are arranged in a form of concentric circles. 4. The positioner of claim 1 , wherein the magnetism generator includes two separate coils having identical series resistances based on the resistance components of windings of the separate coils.
by measuring valve parameters · CPC title
Electrical or magnetic means (F16K37/0075 takes precedence) · CPC title
Rotary electromagnets with variable gap (with fixed gap or torque motors H02K26/00) · CPC title
actuated by fluid ({fluid-actuated lift valves F16K1/126} ; fluid-actuated check valves F16K15/00; fluid-actuated safety valves F16K17/00) · CPC title
for measuring valve parameters (F16K37/0033 takes precedence) · CPC title
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