Slit valve door with moving mating part

Patent metadata

Field	Value
Publication number	US-10453718-B2
Application number	US-201314035829-A
Country	US
Kind code	B2
Filing date	Sep 24, 2013
Priority date	Aug 28, 2008
Publication date	Oct 22, 2019
Grant date	Oct 22, 2019

Abstract

Embodiments disclosed herein generally relate to a slit valve door assembly for sealing an opening in a chamber. A slit valve door that is pressed against the chamber to seal the slit valve opening moves with the chamber as the slit valve opening shrinks so that an o-ring pressed between the slit valve door and the chamber may move with the slit valve door and the chamber. Thus, less rubbing of the o-ring against the chamber may occur. With less rubbing, fewer particles may be generated and the o-ring lifetime may be extended. With a longer lifetime for the o-ring, substrate throughput may be increased.

First claim

The invention claimed is:

1. A slit valve door, comprising:
a first body;
a second body that is separate from the first body and that is movable relative to the first body, the second body having a first surface and a second surface substantially perpendicular to the first surface;
a bearing coupled between the first body and the second body;
a first bellows coupled to the first body and the first surface of the second body; and
a second bellows coupled to the first body and a third surface of the second body, wherein the third surface is parallel to the second surface of the second body.

2. The slit valve door of claim 1 , wherein the bearing comprises a material selected from the group consisting of poly ether ether ketone and poly tetrafluoro ethylene.

3. The slit valve door comprising:
a first body;
a second body that is separate from the first body and that is movable relative to the first body, the second body having a first surface and a second surface substantially perpendicular to the first surface;
a bearing coupled between the first body and the second body, wherein the bearing comprises a material selected from the group consisting of poly ether ether ketone and poly tetrafluoro ethylene;
a first bellow coupled to the first body and the first surface of the second body;
a second bellows coupled to the first body and a third surface of the second body, wherein the third surface is parallel to the second surface of the second body; and
an O-ring coupled to the second body.

4. A slit valve door, comprising:
a first body;
a second body that is separate from the first body and that is movable relative to the first body, the second body having a first surface and a second surface substantially perpendicular to the first surface;
a bearing coupled between the first body and the second body;
a first bellows coupled to the first body and the second body, wherein an orientation of the second bellows is orthogonal to an orientation of the first bellows; and
an O-ring coupled to the second body.

5. A slit valve door, comprising:
a first body;
a second body coupled to the first body at an edge thereof and spaced from the first body such that a slit is present between the first body and the second body, the second body having a first surface and a second surface substantially perpendicular to the first surface;
a first bellows coupled to the first body and the first surface of the second body and over the slit; and
a second bellows coupled to the first body and the second body, wherein an orientation of the second bellows is orthogonal to an orientation of the first bellows.

6. A slit valve door, comprising:
a first body;
a second body coupled to the first body at an edge thereof and spaced from the first body such that a slit is present between the first body and the second body, the the first surface;
a first bellows coupled to the first body and the first surface of the second body and over the slit;
a second bellows coupled to the first body and a third surface of the second body, wherein the third surface is parallel to the second surface of orientation of the first bellows; and
an O-ring coupled to the second body.

Assignees

• Applied Materials Inc

Inventors

• Behdjat Mehran
• Kurita Shinichi
• White John M
• Anwar Suhail
• Inagawa Makoto

Classifications

• H10P72/0441 Primary

  Apparatus for sealing, encapsulating, glassing, decapsulating or the like · CPC title

• F16K51/02 Primary

  specially adapted for high-vacuum installations · CPC title

• F16K1/24 Primary

  with valve members that, on opening of the valve, are initially lifted from the seat and next are turned around an axis parallel to the seat · CPC title

• H01L21/67126 Primary

  Electricity · mapped topic