Terahertz antenna and method for producing a terahertz antenna

Patent metadata

Field	Value
Publication number	US-10453680-B2
Application number	US-201716077023-A
Country	US
Kind code	B2
Filing date	Feb 10, 2017
Priority date	Feb 12, 2016
Publication date	Oct 22, 2019
Grant date	Oct 22, 2019

Abstract

A terahertz antenna includes at least one photoconductive layer which generates charge carriers upon irradiation of light and two electroconductive antenna elements via which an electric field can be applied to at least one section of the photoconductive layer. The photoconductive layer being doped with a dopant in a concentration of at least 1×1018 cm−3, the dopant being a transition metal. The photoconductive layer is produced by molecular beam epitaxy at a growth temperature of at least 200° C. and not more than 500° C., the dopant being arranged in the photoconductive layer such that it produces a plurality of point defects.

First claim

The invention claimed is:

1. A terahertz antenna, comprising:
at least one photoconductive layer which generates charge carriers upon irradiation of light; and
two electroconductive antenna elements via which an electric field can be applied to at least one section of the photoconductive layer, wherein:
the photoconductive layer being doped with a dopant in a concentration of at least 1×10 18 cm −3 , the dopant being a transition metal, and
the photoconductive layer is produced by molecular beam epitaxy at a growth temperature of at least 200° C. and not more than 500° C., the dopant being arranged in the photoconductive layer such that it produces a plurality of point defects.

2. The terahertz antenna according to claim 1 , wherein the plurality of dopant atoms each are arranged in the photoconductive layer in the form of a point defect or substantially all dopant atoms each are arranged in the photoconductive layer in the form of a point defect.

3. The terahertz antenna according to claim 1 , wherein the photoconductive layer has no or only a small number of dopant clusters.

4. The terahertz antenna according to claim 1 , wherein the concentration of the dopant is at least 5×10 18 cm −3 , at least 1×10 19 cm −3 or at least 1×10 20 cm −3.

5. The terahertz antenna according to claim 1 , wherein the photoconductive layer is configured such that it generates charge carriers upon irradiation of light in a wavelength range between 1000 and 1650 nm.

6. The terahertz antenna according to claim 1 , wherein the photoconductive layer is formed of (In, Ga)As, (In, Ga)(As, P) or (In, Ga, Al)(As, P).

7. The terahertz antenna according to claim 1 , wherein the photoconductive layer has a thickness of at least 100 nm, at least 300 nm or at least 500 nm.

8. The terahertz antenna according to claim 1 , wherein the photoconductive layer is grown on a semi-insulating substrate.

9. The terahertz antenna according to claim 1 , wherein the dopant is iron, ruthenium, rhodium and/or iridium.

10. The terahertz antenna according to claim 1 , wherein the photoconductive layer forms a mesa structure, wherein the antenna elements each are connected to a side wall of the mesa structure.

11. A terahertz converter for generating and/or receiving terahertz radiation, wherein the terahertz converter includes at least one terahertz antenna according to claim 1 .

12. The terahertz converter according to claim 11 , comprising a first and a second terahertz antenna, which each are configured according to any of the preceding claims, wherein the photoconductive layers of the first and the second terahertz antenna are sections of a common photoconductive layer.

13. A method for producing a terahertz antenna, comprising the following steps:
producing at least one photoconductive layer which generates charge carriers upon irradiation of light;
doping of the photoconductive layer with a dopant in a concentration of at least 1×10 18 cm −3 , the dopant being a transition metal; and
producing two electroconductive antenna elements, via which an electric voltage can be applied to at least one section of the photoconductive layer, wherein:
the photoconductive layer is produced by molecular beam epitaxy at a growth temperature of at least 200° C. and not more than 500° C., and doping is effected during the process of epitaxy.

14. The method according to claim 13 , wherein the growth temperature lies between 250° C. or 300° C. and 500° C.

15. The method according to claim 13 , wherein the growth temperature is not more than 450° C. or not more than 400° C.

16. The method according to claim 13 , wherein after growing the photoconductive layer a tempering step is performed.

Assignees

• Fraunhofer Ges Forschung

Inventors

• Dietz Roman
• Göbel Thorsten
• Globisch Björn
• Masselink William Ted
• Semtsiv Mykhaylo Petrovych

Classifications

• H10P14/3446

  Transition metal elements; Rare earth elements · CPC title

• H10P14/3418

  Phosphides · CPC title

• H10P14/22

  using physical deposition, e.g. vacuum deposition or sputtering · CPC title

• H10P14/3421 Primary

  Arsenides · CPC title

• C30B23/063

  Heating of the substrate · CPC title