Chemically amplified positive resist composition and resist pattern forming process
US-12164231-B2 · Dec 10, 2024 · US
US10451967B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10451967-B2 |
| Application number | US-201415038955-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 21, 2014 |
| Priority date | Nov 25, 2013 |
| Publication date | Oct 22, 2019 |
| Grant date | Oct 22, 2019 |
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It is a subject of the present invention to provide an acid- and radical-generating agent which has high sensitivity to an active energy ray having a wavelength of around 300 to 450 nm, and can exert both high acid-generating performance and high radical-generating performance, and has heat resistance; and a method for generating an acid and a radical. The present invention relates to a compound represented by the general formula (A); an acid- and radical-generating agent comprising the compound; and a method for generating an acid and a radical: wherein n pieces of R 1 each independently represent an alkyl group, which may have a specific functional group in the chain, or in which a hydrogen atom may be substituted by a halogen atom; an alkoxy group, in which a hydrogen atom may be substituted by a halogen atom; an aryl group or an aryloxy group, in which a hydrogen atom may be substituted by a halogen atom, an alkyl group or a haloalkyl group; or an arylalkyl group or an arylalkyloxy group, in which a hydrogen atom may be substituted by a halogen atom, an alkyl group or a haloalkyl group; n pieces of R 2 and R 3 each independently represent a hydrogen atom, an alkyl group or an alkoxycarbonyl group; R 4 to R 7 each independently represent a hydrogen atom, a halogen atom, an alkyl group, an alkoxy group, an alkenyl group, an aryl group, an alkoxycarbonyl group, a dialkylamino group or a nitro group; Y represents an oxygen atom, a sulfur atom, or a carbonyl group; n pieces of Z each independently represent a sulfonyl group or an alkoxyphosphoryl group; n represents 1 or 2.
Opening claim text (preview).
The invention claimed is: 1. A compound represented by the general formula (A): wherein Y represents an oxygen atom, a sulfur atom, or a carbonyl group; when Y represents a carbonyl group, n pieces of R 1 each independently represent an alkyl group having 1 to 20 carbon atoms, which may have a functional group selected from the group consisting of a carbonyloxy group, a carbonylamino group, an ether group and a sulfide group in the chain, or in which a hydrogen atom may be substituted by a halogen atom; an aryloxy group having 6 to 10 carbon atoms, in which a hydrogen atom may be substituted by a halogen atom, an alkyl group or a haloalkyl group; an arylalkyl group having 7 to 15 carbon atoms, in which a hydrogen atom may be substituted by a halogen atom, an alkyl group or a haloalkyl group; or an arylalkyloxy group having 7 to 15 carbon atoms, in which a hydrogen atom may be substituted by a halogen atom, an alkyl group or a haloalkyl group; n pieces of R 2 and n pieces of R 3 each independently represent a hydrogen atom, an alkyl group having 1 to 10 carbon atoms or an alkoxycarbonyl group having 2 to 7 carbon atoms; R 4 to R 7 each independently represent a hydrogen atom, a halogen atom, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkenyl group having 2 to 6 carbon atoms, an aryl group having 6 to 10 carbon atoms, an alkoxycarbonyl group having 2 to 7 carbon atoms, a dialkylamino group having 2 to 8 carbon atoms, or a nitro group; n pieces of Z each independently represent a sulfonyl group or an alkoxyphosphoryl group having 1 to 6 carbon atoms; and n represents 1 or 2; and when Y represents an oxygen atom or a sulfur atom, n pieces of R 1 each independently represent an alkyl group having 1 to 20 carbon atoms, which may have a functional group selected from the group consisting of a carbonyloxy group, a carbonylamino group, an ether group and a sulfide group in the chain, or in which a hydrogen atom may be substituted by a halogen atom; an alkoxy group having 1 to 10 carbon atoms, in which a hydrogen atom may be substituted by a halogen atom; an aryl group having 6 to 10 carbon atoms, in which a hydrogen atom may be substituted by a halogen atom, an alkyl group or a haloalkyl group; an aryloxy group having 6 to 10 carbon atoms, in which a hydrogen atom may be substituted by a halogen atom, an alkyl group or a haloalkyl group; an arylalkyl group having 7 to 15 carbon atoms, in which a hydrogen atom may be substituted by a halogen atom, an alkyl group or a haloalkyl group; or an arylalkyloxy group having 7 to 15 carbon atoms, in which a hydrogen atom may be substituted by a halogen atom, an alkyl group or a haloalkyl group; n pieces of R 2 and n pieces of R 3 each independently represent a hydrogen atom, an alkyl group having 1 to 10 carbon atoms or an alkoxycarbonyl group having 2 to 7 carbon atoms; R 4 to R 7 each independently represent a hydrogen atom, a halogen atom, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkenyl group having 2 to 6 carbon atoms, an aryl group having 6 to 10 carbon atoms, an alkoxycarbonyl group having 2 to 7 carbon atoms, a dialkylamino group having 2 to 8 carbon atoms, or a nitro group; n pieces of Z represent a sulfonyl group; and n represents 1 or 2. 2. The compound according to claim 1 , wherein the compound represented by the general formula (A) is a compound represented by the general formula (A′-1): wherein Y represents an oxygen atom, a sulfur atom, or a carbonyl group; when Y represents a carbonyl group, R 1a and R 1b each independently represent an alkyl group having 1 to 20 carbon atoms, which may have a functional group selected from the group consisting of a carbonyloxy group, a carbonylamino group, an ether group and a sulfide group in the chain, or in which a hydrogen atom may be substituted by a halogen atom; an aryloxy group having 6 to 10 carbon atoms, in which a hydrogen atom may be substituted by a halogen atom, an alkyl group or a haloalkyl group; an arylalkyl group having 7 to 15 carbon atoms, in which a hydrogen atom may be substituted by a halogen atom, an alkyl group or a haloalkyl group; or an arylalkyloxy group having 7 to 15 carbon atoms, in which a hydrogen atom may be substituted by a halogen atom, an alkyl group or a haloalkyl group; R 2a ,R 2b , R 3a and R 3b each independently represent a hydrogen atom, an alkyl group having 1 to 10 carbon atoms or an alkoxycarbonyl group having 2 to 7 carbon atoms; and Z a and Z b each independently represent a sulfonyl group or an alkoxyphosphoryl group having 1 to 6 carbon atoms; and when Y represents an oxygen atom or a sulfur atom, R 1a and R 1b each independently represent an alkyl group having 1 to 20 carbon atoms, which may have a functional group selected from the group consisting of a carbonyloxy group, a carbonylamino group, an ether group and a sulfide group in the chain, or in which a hydrogen atom may be substituted by a halogen atom; an alkoxy group having 1 to 10 carbon atoms, in which a hydrogen atom may be substituted by a halogen atom; an aryl group having 6 to 10 carbon atoms, in which a hydrogen atom may be substituted by a halogen atom, an alkyl group or a haloalkyl group; an aryloxy group having 6 to 10 carbon atoms, in which a hydrogen atom may be substituted by a halogen atom, an alkyl group or a haloalkyl group; an arylalkyl group having 7 to 15 carbon atoms, in which a hydrogen atom may be substituted by a halogen atom, an alkyl group or a haloalkyl group; or an arylalkyloxy group having 7 to 15 carbon atoms, in which a hydrogen atom may be substituted by a halogen atom, an alkyl group or a haloalkyl group; R 2a , R 2b , R 3a and R 3b each independently represent a hydrogen atom, an alkyl group having 1 to 10 carbon atoms or an alkoxycarbonyl group having 2 to 7 carbon atoms; and Z a and Z b represent a sulfonyl group; R 4 to R 7 are the same as described above. 3. The compound according to claim 1 , wherein the compound represented by the general formula (A) is a compound represented by the general formula (A′-2): wherein Y represents an oxygen atom, a sulfur atom, or a carbonyl group; when Y represents a carbonyl group, R 1c represents an alkyl group having 1 to 20 carbon atoms, which may have a functional group selected from the group consisting of a carbonyloxy group, a carbonylamino group, an ether group and a sulfide group in the chain, or in which a hydrogen atom may be substituted by a halogen atom; an aryloxy group having 6 to 10 carbon atoms, in which a hydrogen atom may be substituted by a halogen atom, an alkyl group or a haloalkyl group; an arylalkyl group having 7 to 15 carbon atoms, in which a hydrogen atom may be substituted by a halogen atom, an alkyl group or a haloalkyl group; or an arylalkyloxy group having 7 to 15 carbon atoms, in which a hydrogen atom may be substituted by a halogen atom, an alkyl group or a haloalkyl group; R 2c and R 3c each independently represent a hydrogen atom, an alkyl group having 1 to 10 carbon atoms or an alkoxycarbonyl group having 2 to 7 carbon atoms; and Z c represents a sulfonyl group or an alkoxyphosphoryl group having 1 to 6 carbon atoms; and when Y represents an oxygen atom or a sulfur atom, R 1c represents an alkyl group having 1 to 20 carbon atoms, which may have a functional group selected from the group consisting of a carbonyloxy group, a carbonylamino group, an ether group
with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors · CPC title
having sulfone or sulfoxide groups and doubly-bound oxygen atoms bound to the same carbon skeleton · CPC title
Oxygen atoms, e.g. thioxanthones · CPC title
having sulfone or sulfoxide groups and carboxyl groups bound to the same carbon skeleton · CPC title
Anthracenes; Hydrogenated anthracenes · CPC title
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