Acoustic wave detector

Patent metadata

Field	Value
Publication number	US-10451589-B2
Application number	US-201715603531-A
Country	US
Kind code	B2
Filing date	May 24, 2017
Priority date	Jun 3, 2016
Publication date	Oct 22, 2019
Grant date	Oct 22, 2019

Abstract

An acoustic wave detector may include: an exterior housing with an exterior housing wall, a gas chamber located within the exterior housing and configured to receive a gas therein. The exterior housing wall may include an aperture providing a gas passage between the gas chamber and the exterior of the acoustic wave detector. The acoustic wave detector may further include an excitation element configured to selectively excite gas molecules of a specific type in the gas received in the gas chamber in a time-varying fashion, thereby generating acoustic waves in the gas, and an acoustic wave sensor configured to detect the acoustic waves generated in the gas and acoustic waves generated outside of the acoustic wave detector. The acoustic wave sensor may have an acoustic port overlapping with the aperture in the exterior housing wall. The acoustic wave sensor may include a mechanical structure displaceable by the acoustic waves to be detected, wherein a displacement of the mechanical structure is indicative of characteristics of the acoustic waves to be detected.

First claim

What is claimed is:

1. An acoustic wave detector, comprising:
an exterior housing with an exterior housing wall;
a gas chamber located within the exterior housing and configured to receive a gas therein, wherein the exterior housing wall comprises an aperture providing a gas passage between the gas chamber and the exterior of the acoustic wave detector;
an excitation element configured to selectively excite gas molecules of a specific type in the gas received in the gas chamber in a time-varying fashion, thereby generating acoustic waves in the gas; and
an acoustic wave sensor configured to detect the acoustic waves generated in the gas and acoustic waves generated outside of the acoustic wave detector, wherein the acoustic wave sensor has an acoustic port overlapping with the aperture in the exterior housing wall,
wherein the acoustic wave sensor comprises a mechanical structure displaceable by the acoustic waves to be detected, wherein a displacement of the mechanical structure is indicative of characteristics of the acoustic waves to be detected.

2. The acoustic wave detector of claim 1 ,
wherein the excitation element comprises a radiation source configured to emit radiation into the gas chamber, wherein the radiation is adapted to selectively excite gas molecules of a specific type in the gas in a time-varying fashion, thereby generating acoustic waves.

3. The acoustic wave detector of claim 2 ,
wherein the radiation source is configured to emit electromagnetic radiation.

4. The acoustic wave detector of claim 3 ,
wherein the radiation source is configured to emit electromagnetic radiation in the infrared and/or in the visible and/or in the ultraviolet frequency range.

5. The acoustic wave detector of claim 2 , further comprising:
a window configured to transmit radiation emitted by the radiation source into the gas chamber and to thermally insulate the radiation source from the gas in the gas chamber.

6. The acoustic wave detector of claim 5 ,
wherein the window is configured as a filter adapted to selectively transmit radiation of a predetermined energy emitted by the radiation source into the gas chamber.

7. The acoustic wave detector of claim 6 ,
wherein the filter is configured as a tunable filter, transmission characteristics of which are tunable.

8. The acoustic wave detector of claim 5 ,
wherein the window partitions an interior of the acoustic wave detector into the gas chamber and a radiation source chamber housing the radiation source.

9. The acoustic wave detector of claim 8 ,
wherein the radiation source chamber is formed in a recess in the exterior housing wall, wherein the recess is covered by the window.

10. The acoustic wave detector of claim 9 ,
wherein the recess is formed in a portion of the exterior housing wall that comprises a plurality of housing-wall layers.

11. The acoustic wave detector of claim 10 ,
wherein the radiation source is supported on a housing-wall layer different from an inner housing-wall layer forming part of an inner surface of the exterior housing wall.

12. The acoustic wave detector of claim 5 , further comprising:
a radiation unit that comprises a radiation unit housing, the radiation source housed within the radiation unit housing, and the window forming an exit window of the radiation unit housing.

13. The acoustic wave detector of claim 2 ,
wherein the radiation source is located within the exterior housing.

14. The acoustic wave detector of claim 1 ,
wherein the acoustic wave sensor is located inside the exterior housing.

15. The acoustic wave detector of claim 1 ,
wherein the mechanical structure is a transducer.

16. The acoustic wave detector of claim 15 ,
wherein the mechanical structure is located within the gas chamber.

17. The acoustic wave detector of claim 16 ,
wherein the acoustic wave sensor is located within the gas chamber.

18. The acoustic wave detector of claim 15 ,
wherein the mechanical structure delimits the gas chamber and comprises at least one opening formed therethrough, wherein the at least one opening provides a gas inlet and/or a gas outlet of the gas chamber.

19. The acoustic wave detector of claim 1 ,
wherein the acoustic wave sensor is configured as a microphone.

20. The acoustic wave detector of claim 1 ,
wherein the gas chamber has a volume in the range from 1 to 10 mm 3 .

21. The acoustic wave detector of claim 1 ,
wherein the exterior housing comprises a substrate and a lid defining the gas chamber therebetween.

22. The acoustic wave detector of claim 1 ,
wherein the gas chamber is delimited by a reflector.

23. The acoustic wave detector of claim 1 ,
wherein the mechanical structure is one of either a membrane structure, a cantilever structure, a comb structure or a rotatable structure.

Assignees

• Infineon Technologies Ag

Inventors

• Tumpold David
• Dehe Alfons
• Glacer Christoph

Classifications

• G01N2291/021

  Gases · CPC title

• G01N29/34

  Generating the ultrasonic, sonic or infrasonic waves {, e.g. electronic circuits specially adapted therefor} · CPC title

• G01N29/2425 Primary

  optoacoustic fluid cells therefor · CPC title

• G01N29/02 Primary

  Analysing fluids (using acoustic emission techniques G01N29/14 {; constructional or flow details for analysing fluids G01N29/222; optoacoustic fluid cells G01N29/2425}) · CPC title

• G01N29/2418

  using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics (photoacoustic cells G01N21/1702; measuring characteristics of vibrations by using radiation-sensitive means G01H9/00; acousto-optical conversion techniques for short-range imaging G01S15/8965; sound-producing devices using laser bundle G10K15/046) · CPC title