Elastic wave device including a conductive shield electrode and manufacturing method thereof
US-9520859-B2 · Dec 13, 2016 · US
US10447233B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10447233-B2 |
| Application number | US-201816225383-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 19, 2018 |
| Priority date | Jun 21, 2016 |
| Publication date | Oct 15, 2019 |
| Grant date | Oct 15, 2019 |
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An elastic wave device includes a piezoelectric substrate, filter electrodes, input terminal electrodes, output terminal electrodes, and ground terminal electrodes. The filter electrodes are disposed along a first direction. The ground terminal electrodes corresponding to the filter electrodes are respectively disposed between adjacent filter electrodes, and are common to the adjacent filter electrodes.
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What is claimed is: 1. An elastic wave device comprising: a piezoelectric substrate; and an electrode pattern provided on a surface of the piezoelectric substrate and defining elastic wave filters; wherein the electrode pattern includes: n filter electrodes disposed along a first direction where n is an integer that satisfies n≥3; a first terminal electrode and a second terminal electrode corresponding to each of the n filter electrodes; and a ground terminal electrode corresponding to each of the n filter electrodes; the n filter electrodes include: a first filter electrode at a first end of the piezoelectric substrate in the first direction, a second filter electrode at a second end of the piezoelectric substrate in the first direction, and a third filter electrode different from the first and second filter electrodes; the ground terminal electrode corresponding to the third filter electrode is disposed between the third filter electrode and a filter electrode of the n filter electrodes adjacent to the third filter electrode; and no other filter electrode is disposed between the first filter electrode at the first end of the piezoelectric substrate and the ground terminal electrode connected thereto, between the second filter electrode at the second end of the piezoelectric substrate and the ground terminal electrode connected thereto, and between the third filter electrode and the ground terminal electrode connected thereto. 2. The elastic wave device according to claim 1 , wherein the first terminal electrode corresponding to the third filter electrode is disposed on a first end side of the third filter electrode; the second terminal electrode corresponding to the third filter electrode is disposed on a second end side of the third filter electrode; the first terminal electrode and the second terminal electrode corresponding to the third filter electrode are disposed on opposite sides with respect to the third filter electrode in a second direction orthogonal or substantially orthogonal to the first direction; and the ground terminal electrode corresponding to the third filter electrode is disposed at a same or substantially same position as the second terminal electrode corresponding to the third filter electrode in the first direction, and a same or substantially same position as the first terminal electrode corresponding to the third filter electrode in the second direction, or a same or substantially same position as the first terminal electrode corresponding to the third filter electrode in the first direction, and a same or substantially same position as the second terminal electrode corresponding to the third filter electrode in the second direction. 3. The elastic wave device according to claim 1 , wherein the first terminal electrode and the second terminal electrode corresponding to the first filter electrode are disposed along a second direction orthogonal or substantially orthogonal to the first direction between the first end of the piezoelectric substrate and the first filter electrode; the first terminal electrode and the second terminal electrode corresponding to the second filter electrode are disposed along the second direction between the second end of the piezoelectric substrate and the second filter electrode; and the ground terminal electrode corresponding to the first filter electrode and the ground terminal electrode corresponding to the second filter electrode are electrodes common to the ground terminal electrode corresponding to the third filter electrode adjacent respectively thereto. 4. The elastic wave device according to claim 1 , further comprising a first auxiliary ground terminal electrode between the first filter electrode and the first end of the piezoelectric substrate. 5. The elastic wave device according to claim 4 , wherein the first auxiliary ground electrode terminal is disposed at a same or substantially same position in the first direction as the first terminal electrode and the second terminal electrode corresponding to the first filter electrode. 6. The elastic wave device according to claim 4 , wherein the first auxiliary ground electrode terminal is disposed between the first terminal electrode and the second terminal electrode corresponding to the first filter electrode in a second direction orthogonal or substantially orthogonal to the first direction. 7. The elastic wave device according to claim 1 , further comprising a second auxiliary ground terminal electrode between the second filter electrode and the second end of the piezoelectric substrate. 8. The elastic wave device according to claim 7 , wherein the second auxiliary ground electrode terminal is disposed between the first terminal electrode and the second terminal electrode corresponding to the second filter electrode in a second direction orthogonal or substantially orthogonal to the first direction. 9. The elastic wave device according to claim 7 , wherein the second auxiliary ground electrode terminal is disposed at a same or substantially same position in the first direction as the first terminal electrode and the second terminal electrode corresponding to the second filter electrode. 10. The elastic wave device according to claim 1 , wherein the first, second, and third filter electrodes have different filter characteristics from one another. 11. The elastic wave device according to claim 1 , wherein the first terminal electrodes are input terminal electrodes. 12. The elastic wave device according to claim 1 , wherein the second terminal electrodes are output terminal electrodes.
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