Force detection device and robot

Patent metadata

Field	Value
Publication number	US-10442092-B2
Application number	US-201615016462-A
Country	US
Kind code	B2
Filing date	Feb 5, 2016
Priority date	Feb 9, 2015
Publication date	Oct 15, 2019
Grant date	Oct 15, 2019

Abstract

To obtain a force detection device and a robot light in weight and having excellent detection accuracy, a force detection device includes a first member, a second member joined to the first member, and a piezoelectric element joined to the second member. A material forming the first member is different from a material forming the second member. The first member is formed in a plate shape. The piezoelectric element and the second member are disposed at an end portion of the first member. A through-hole is formed in the center portion of the first member.

First claim

What is claimed is:

1. A force detection device comprising:
a base plate including a plate-shaped first member, and a second member attached to the first member;
a cover plate including a third and a fourth member; and
a sensor device positioned between the base plate and cover plate, and having a piezoelectric element contained in a package;
wherein the first member and the third member do not directly contact the sensor device,
a material forming the first member is different from a material forming the second member,
the second member protrudes in a direction toward the cover plate,
a coefficient of linear expansion of the material forming the second member is smaller than a coefficient of linear expansion of the material forming the first member,
a density of the material forming the first member is smaller than a density of the material forming the second member,
a coefficient of linear expansion of a material which forms the fourth member is smaller than a coefficient of linear expansion of a material which forms the third member, and
a density of the material which forms the third member is smaller than a density of the material which forms the fourth member.

2. The force detection device according to claim 1 , wherein
the piezoelectric element and the second member are disposed at an end portion of the first member, and
a through-hole is formed in a center portion of the first member.

3. The force detection device according to claim 1 ,
wherein the fourth member is joined to the third member and configured to sandwich the piezoelectric element in conjunction with the second member, wherein
a material forming the third member is different from a material forming the fourth member.

4. The force detection device according to claim 3 ,
wherein the piezoelectric element and the fourth member are disposed at an end portion of the third member, and
a through-hole is formed in a center portion of the third member.

5. The force detection device according to claim 3 , wherein the material forming the second member and the material forming the fourth member are the same.

6. The force detection device according to claim 3 , wherein the material forming the first member and the material forming the third member are the same.

7. The force detection device according to claim 3 , wherein yield strength of the material forming the fourth member is larger than yield strength of the material forming the third member.

8. The force detection device according to claim 1 , wherein yield strength of the material forming the second member is larger than yield strength of the material forming the first member.

9. A robot comprising:
an arm;
an end effector provided in the arm; and
the force detection device according to claim 1 .

Assignees

• Seiko Epson Corp

Inventors

• Nishimura Yoshiteru
• Mizushima Nobuyuki
• Kamiya Toshiyuki
• Kawai Hiroki

Classifications

• G01L1/16 Primary

  using properties of piezoelectric devices · CPC title

• Y10S901/46

  Sensing device · CPC title

• B25J19/028 Primary

  Piezoresistive or piezoelectric sensing devices · CPC title

• B25J13/085

  Force or torque sensors (B25J13/082, B25J13/084 take precedence) · CPC title