Field emission device with ground electrode

Patent metadata

Field	Value
Publication number	US-10438765-B2
Application number	US-201514943996-A
Country	US
Kind code	B2
Filing date	Nov 17, 2015
Priority date	Nov 21, 2014
Publication date	Oct 8, 2019
Grant date	Oct 8, 2019

Abstract

Provided herein is a field emission device. The field emission device includes a cathode which is connected to a negative power supply and emits electrons, an anode which is connected to a positive power supply and includes a target material receiving the electrons emitted from the cathode, and a ground electrode which is formed to face the anode and has an opening through which the electrons emitted from the cathode pass. The ground electrode is grounded so that when an arc discharge occurs due to high voltage operation of the anode, electric charge produced by the arc discharge is emitted to a ground.

First claim

What is claimed is:

1. A field emission device comprising:
a cathode connected to a negative power supply and emitting electrons;
an anode connected to a positive power supply and receiving the electrons emitted from the cathode;
a plurality of gate electrodes facing the anode and having an opening through which the electrons emitted from the cathode pass, the plurality of gate electrodes including a top gate electrode and a plurality of sub-gate electrodes between the top gate and the cathode;
an N-type metal-oxide-semiconductor field-effect transistor (MOSFET) connected between the cathode and the negative power supply, the N-type MOSFET having a source connected to the negative power supply; and
a control signal source connected to a gate of the N-type MOSFET, the control signal source providing a control signal to the gate of the N-type MOSFET and controlling a current of the cathode,
wherein the top gate electrode is selectively grounded, and
wherein the control signal source comprises a first end connected to the gate of the N-type MOSFET, and a second end directly connected to the negative power source.

2. The field emission device according to claim 1 , wherein the opening has a preset diameter depending on a distance between the cathode and the top gate electrode.

3. The field emission device according to claim 1 , wherein the opening of the top gate electrode has a diameter less than a predetermined length, the predetermined length being twice as long as a distance between the cathode and the top gate electrode.

4. The field emission device according to claim 1 , wherein the cathode comprises an emitter emitting, as an electron beam, the electrons emitted from the cathode.

5. The field emission device according to claim 1 , wherein the N-type MOSFET further has a drain connected to the cathode.

6. The field emission device according to claim 1 , wherein the cathode and the plurality of gate electrodes are included in a field emission electron gun.

7. The field emission device according to claim 6 , wherein the field emission electron gun further includes:
a feedthrough disposed on a bottom of the field emission electron gun; and
an electron gun sub-assembly disposed on an upper portion of the feedthrough and comprising an externally threaded part, and
wherein the cathode and the plurality of gate electrodes are stacked in the externally threaded part and are electrically connected to the feedthrough.

8. The field emission device according to claim 7 , wherein the field emission electron gun further comprises:
a cathode support provided under a lower end of the cathode so as to prevent the cathode from bending.

9. The field emission device according to claim 7 , wherein the field emission electron gun further comprises:
a cover covering the cathode and the plurality of gate electrodes that are stacked, the cover being coupled and fixed to an opening formed in a sidewall of the externally threaded part.

10. The field emission device according to claim 7 , wherein the field emission electron gun further comprises:
an internally threaded member coupled to the externally threaded part; and
a stop screw disposed to pass through the internally threaded member and coupled to a focusing electrode, the focusing electrode being coupled to the internally threaded member.

11. The field emission device according to claim 1 , wherein the source of the N-type MOSFET is directly connected to the negative power supply.

12. The field emission device according to claim 1 , wherein the source of the N-type MOSFET is directly connected to the negative power supply.

13. The field emission device according to claim 1 , wherein the plurality of sub-gate electrodes are grounded.

14. The field emission device according to claim 1 , wherein the opening of the plurality of gate electrodes is an opening of the top gate electrode, and each of the plurality of sub-gate electrodes has an opening, the opening of each of the plurality of sub-gate electrodes having a diameter smaller than a diameter of the opening of the top gate electrode.

Assignees

• Electronics & Telecommunications Res Inst

Inventors

• Jeong Jin Woo
• Song Yoon Ho
• Kang Jun Tae
• Kim Jae Woo

Classifications

• H01J3/021

  Electron guns using a field emission, photo emission, or secondary emission electron source · CPC title

• H01J35/065

  Field emission, photo emission or secondary emission cathodes · CPC title

• H01J35/045 Primary

  Electrodes for controlling the current of the cathode ray, e.g. control grids · CPC title

• H01J2203/0292

  Potentials applied to the electrodes · CPC title

• H01J29/462

  arrangements for interrupting the beam during inoperative periods · CPC title