X-ray diffractometer with multilayer reflection-type monochromator

Patent metadata

Field	Value
Publication number	US-10436723-B2
Application number	US-201515312881-A
Country	US
Kind code	B2
Filing date	Jan 14, 2015
Priority date	Jun 5, 2014
Publication date	Oct 8, 2019
Grant date	Oct 8, 2019

Abstract

Only X-rays having a specific wavelength, selected from a group of focusing X-rays diffracted from a sample, are reflected from a monochromator based on a Bragg's condition, passed through a receiving slit and detected by an X-ray detector. The monochromator is configured to be freely removable, and arranged between the sample and a focal point at which the wavelength-selected focusing X-rays diffracted from the sample are directly focused. At this time, the monochromator is moved so as to position the monochromator as close to the focal point as possible. The monochromator comprises a multilayer mirror having an internal interplanar spacing, wherein said internal interplanar spacing varies continuously from one end of the monochromator to the other end.

First claim

The invention claimed is:

1. An X-ray diffractometer comprising:
an X-ray source for irradiating a sample with X-rays;
a reflection type monochromator for receiving diffracted focused X-rays and reflecting only focused X-rays having a specific wavelength based on a Bragg's condition;
an X-ray detector for detecting monochromated focused X-rays; and
a unit that adjusts measurement resolution of the X-ray detector, wherein the monochromator is arranged on an X-ray optical path between a focal point at which the diffracted focused X-rays from the sample are directly focused and the sample.

2. The X-ray diffractometer according to claim 1 , wherein the monochromator comprises a multilayer mirror having an internal interplanar spacing that varies continuously from one end to the other end.

3. The X-ray diffractometer according to claim 2 , wherein the monochromator has an incident face for the focusing X-rays, the incident face being configured to be a flat surface.

4. The X-ray diffractometer according to claim 2 , wherein the interplanar spacing in the multilayer mirror is adjusted so that a interplanar spacing d 1 in a depth direction at a site to which the focusing X-rays are incident at an incident angle θ 1 and a interplanar spacing d 2 in the depth direction at a site to which the focusing X-rays are incident at an incident angle θ 2 satisfy the following equation based on the Bragg's condition: 2d 1 ×sin θ 1 =2d 2 ×sin θ 2 =n λ wherein λ represents the wavelength of the diffracted X-rays, and n represents an integer.

5. The X-ray diffractometer according to claim 1 , wherein the monochromator is arranged in proximity to a focal point at which the diffracted focused X-rays are directly focused to the extent that the monochromator does not interfere with the X-ray detector.

6. The X-ray diffractometer according to claim 5 , wherein the unit that adjusts the measurement resolution of the X-ray detector comprises a receiving slit arranged in front of an X-ray detection face in the X-ray detector.

7. The X-ray diffractometer according to claim 6 , wherein the X-ray detector comprises a two-dimensional X-ray detector that is adapted to two-dimensionally detect X-rays incident to the X-ray detection face.

8. The X-ray diffractometer according to claim 6 , wherein the monochromator is removable from the optical path of the diffracted focused X-rays;
the X-ray detection face of the X-ray detector has an area that allows detection of the diffracted focused X-rays in an X-ray optical system in which the monochromator is removed from the optical path of the focusing X-rays and detection of the diffracted focused X-rays and focusing X-rays reflected from the monochromator in an X-ray optical system in which the monochromator is arranged on the optical path of the focusing X-rays; and
the receiving slit is configured to be freely positionally changeable between a position through which the diffracted focused X-rays pass in the X-ray optical system in which the monochromator is removed from the optical path of the focusing X-rays, and a position through which the diffracted focused X-rays and focusing X-rays reflected from the monochromator pass in the X-ray optical system in which the monochromator is arranged on the optical path of the focusing X-rays.

9. The X-ray diffractometer according to claim 6 , wherein the monochromator is removable from the optical path of the diffracted focused X-rays;
the receiving slit is configured to be freely positionally changeable between a position through which the diffracted focused X-rays pass in an X-ray optical system in which the monochromator is removed from the optical path of the focusing X-rays, and a position through which the diffracted focused X-rays and focusing X-rays reflected from the monochromator pass in an X-ray optical system in which the monochromator is arranged on the optical path of the focusing X-rays; and
the X-ray detector is configured to be freely positionally changeable between a detection position of the diffracted focused X-rays and focusing X-rays passing through the receiving slit in the X-ray optical system in which the monochromator is removed from the optical path of the focusing X-rays, and a detection position of the diffracted focused X-rays, focusing X-rays reflected from the monochromator and passing through the receiving slit in the X-ray optical system in which the monochromator is arranged on the optical path of the focusing X-rays.

10. The X-ray diffractometer according to claim 5 , wherein the monochromator is removable from the optical path of the diffracted focused X-rays;
the X-ray detector comprises a two-dimensional X-ray detector that is adaptable to two-dimensionally detect X-rays incident to the X-ray detection face;
the X-ray detection face of the X-ray detector has an area that allows detection of diffracted focused X-rays in an X-ray optical system in which the monochromator is removed from the optical path of the focusing X-rays and detection of diffracted focused X-rays and focusing X-rays reflected from the monochromator in an X-ray optical system in which the monochromator is arranged on the optical path of the focusing X-rays;
the X-ray detector has a function of freely changing an X-ray detection area between a first X-ray detection area for detecting the diffracted focused X-rays in the X-ray optical system in which the monochromator is removed from the optical path of the focusing X-rays, and a second X-ray detection area for detecting the diffracted focused X-rays and focusing X-rays reflected from the monochromator in the X-ray optical system in which the monochromator is arranged on the optical path of the focusing X-rays; and
the function of freely changing the X-ray detection area in the X-ray detector constitutes a unit that adjusts measurement resolution of the X-ray detector.

11. The X-ray diffractometer according to claim 7 , wherein the two-dimensional X-ray detector is configured to have a two-dimensional X-ray detection function capable of two-dimensionally detecting X-rays incident to the X-ray detection face, a one-dimensional X-ray detection function capable of one-dimensionally detecting X-rays incident to the X-ray detection face and a zero-dimensional X-ray detection function capable of zero-dimensionally detecting X-rays incident to the X-ray detection face, the two-dimensional X-ray detection function, the one-dimensional X-ray detection function and the zero-dimensional X-ray detection function being switchable to one another.

12. The X-ray diffractometer according to claim 10 , wherein the two-dimensional X-ray detector is configured to have a two-dimensional X-ray detection function capable of two-dimensionally detecting X-rays incident to the X-ray detection face, a one-dimensional X-ray detection function capable of one-dimensionally detecting X-rays incident to the X-ray detection face and a zero-dimensional X-ray detection function capable of zero-dimensionally detecting X-rays incident to the X-ray detection face, the two-dimensional X-ray detection function, the one-dimensional X-ray detection function and the zero-dimensional X-ray detection function being switchable to one another.

Assignees

• Rigaku Denki Co Ltd

Inventors

• Osakabe Takeshi
• Ozawa Tetsuya
• Omote Kazuhiko
• Jiang Licai
• Verman Boris
• Platonov Yuriy

Classifications

• G01N2223/315

  monochromators · CPC title

• G21K2201/067

  Construction details · CPC title

• G02B27/0977

  Reflective elements · CPC title

• G21K1/04

  using variable diaphragms, shutters, choppers · CPC title

• G01N23/207 Primary

  Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions · CPC title