Components for a chemical mechanical polishing tool

Patent metadata

Field	Value
Publication number	US-10434627-B2
Application number	US-201514947802-A
Country	US
Kind code	B2
Filing date	Nov 20, 2015
Priority date	Dec 19, 2014
Publication date	Oct 8, 2019
Grant date	Oct 8, 2019

Abstract

A component in a CMP tool disclosed herein having a surface and a hydrophobic layer deposited on the surface. In one example, the component is a component for delivering a fluid in a CMP tool. The component for delivering a fluid in a CMP tool includes an elongated member having a first end and a second end, and an elongated upper surface extending between the two ends. A hydrophobic layer is deposited on the elongated upper surface. In another example, the component is a ring shaped body having an upper side and a lower side. A hydrophobic layer is deposited on the inner surfaces of both the upper and lower sides. In another example, the component is a disk shaped body having a top surface, bottom surface, and ledge defined by the top and bottom surfaces. A hydrophobic layer is deposited on the surfaces and the ledge.

First claim

What is claimed is:

1. A component for a CMP tool, the component comprising:
a body having a surface that will be exposed to a polishing fluid when the CMP tool is polishing a substrate; and
a hydrophobic layer disposed on the surface of the body, the hydrophobic layer having a thickness between 400 nm and 1600 nm and a fluid contact angle from 90° to about 140°, the hydrophobic layer is formed from a monomer, wherein the monomer is selected from the group consisting of octadecyldimethylchlorosilane, tris(trimethylsiloxy)silylethyl-dimethylchlorosilane, and octyldimethylchlorosilane.

2. The component of claim 1 , wherein the component is a component for delivering a fluid in a CMP tool, the component for delivering a fluid in a CMP tool comprising:
an elongated member, wherein the elongated member further comprises:
a first end;
a second end; and
an elongated upper surface extending between the first end and the second end, wherein the hydrophobic layer is disposed on the elongated upper surface of the elongated member.

3. The component of claim 2 , wherein the elongated member is a fluid delivery arm.

4. The component of claim 2 , wherein the elongated member is a pad conditioning arm.

5. The component of claim 2 , wherein the elongated member is an arm cover.

6. A component for delivering a fluid in a CMP tool comprising:
an elongated member, wherein the elongated member comprises:
a first end;
a second end;
an elongated upper surface extending between the first end and the second end; and
a hydrophobic layer disposed on the elongated upper surface, the hydrophobic layer having a fluid contact angle from 90° to about 140°, the hydrophobic layer is formed from a monomer, wherein the monomer is selected from the group consisting of octadecyldimethylchlorosilane, tris(trimethylsiloxy)silylethyl-dimethylchlorosilane, and octyldimethylchlorosilane.

7. The component of claim 6 , wherein the elongated member is a fluid delivery arm.

8. The component of claim 6 , wherein the elongated member is a pad conditioning arm.

9. The component of claim 6 , wherein the elongated member is an arm cover.

10. A component for delivering a fluid in a CMP tool comprising:
a body having a first surface that will be exposed to a polishing fluid when the CMP tool is polishing a substrate, wherein the body is an elongated member comprising:
a first end;
a second end; and
an elongated upper surface extending between the first end and the second end; and

a hydrophobic layer disposed on the first surface of the body, the hydrophobic layer having a fluid contact angle of from 90° to about 140°, the hydrophobic layer is formed from a monomer, wherein the monomer is selected from the group consisting of octadecyldimethylchlorosilane, tris(trimethylsiloxy)silylethyl-dimethylchlorosilane and octyldimethylchlorosilane.

11. The component of claim 10 , wherein the elongated member is a fluid delivery arm.

12. The component of claim 10 , wherein the elongated member is a pad conditioning arm.

13. The component of claim 10 , wherein the elongated member is an arm cover.

Assignees

• Applied Materials Inc

Inventors

• Attur Sreenidhi

Classifications

• B24B37/32 Primary

  Retaining rings · CPC title

• B24B37/34

  Accessories · CPC title

• B24B53/017 Primary

  Devices or means for dressing, cleaning or otherwise conditioning lapping tools · CPC title

• B24B57/02

  for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents · CPC title

• H10P52/00

  Grinding, lapping or polishing of wafers, substrates or parts of devices · CPC title