Mems-based calorimeter, fabrication, and use thereof
US-2016216163-A1 · Jul 28, 2016 · US
US10429328B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10429328-B2 |
| Application number | US-201514603848-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 23, 2015 |
| Priority date | Jul 24, 2012 |
| Publication date | Oct 1, 2019 |
| Grant date | Oct 1, 2019 |
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A microelectromechanical systems-based calorimetric device includes first and second micromixers and first and second thermally-isolated microchambers. A first solution including a sample and a reagent is introduced to the first microchamber via the first micromixer, and a second solution including a sample and a buffer is introduced to the second microchamber via the second micromixer. A thermopile measures the differential temperature between the first microchamber and the second microchamber and outputs a voltage representative of the difference. The output voltage can be used to calculate reaction parameters.
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We claim: 1. A microelectromechanical systems-based calorimetric device for characterization of biomolecular interactions comprising: a first micromixer; a second micromixer; a thermally-isolated reaction chamber in fluid contact with the first micromixer; a thermally-isolated reference chamber in fluid contact with the second micromixer; and a thermoelectric sensor configured to measure at least one temperature metric associated with the reaction chamber and the reference chamber; wherein the first micromixer comprises a passive chaotic micromixer. 2. The microelectromechanical systems-based calorimetric device of claim 1 , wherein the passive chaotic micromixer comprises a serpentine channel. 3. The microelectromechanical systems-based calorimetric device of claim 2 , wherein the serpentine channel comprises herringbone shaped ridges. 4. The microelectromechanical systems-based calorimetric device of claim 1 , further comprising a first inlet and a second inlet in fluid contact with the first micromixer. 5. The microelectromechanical systems-based calorimetric device of claim 1 , wherein the reaction chamber comprises a polydimethylsiloxane microchamber. 6. The microelectromechanical systems-based calorimetric device of claim 1 , wherein the reference chamber comprises a polydimethylsiloxane microchamber. 7. The microelectromechanical systems-based calorimetric device of claim 1 , wherein the reaction chamber comprises a serpentine chamber. 8. The microelectromechanical systems-based calorimetric device of claim 1 , wherein the reference chamber comprises a serpentine chamber. 9. The microelectromechanical systems-based calorimetric device of claim 1 further comprising a polyimide diaphragm that serves as a base for the reaction chamber. 10. The microelectromechanical systems-based calorimetric device of claim 1 , wherein the thermoelectric sensor comprises a thermopile. 11. The microelectromechanical systems-based calorimetric device of claim 10 , wherein the thermopile comprises an antimony-bismuth thermopile. 12. The microelectromechanical systems-based calorimetric device of claim 10 , wherein a first thermopile junction is located on a first side of the reaction chamber. 13. The microelectromechanical systems-based calorimetric device of claim 12 , wherein a second thermopile junction is located on the first side of the reference chamber. 14. The microelectromechanical systems-based calorimetric device of claim 1 , wherein the reaction chamber is surrounded by an air cavity. 15. The microelectromechanical systems-based calorimetric device of claim 14 , wherein the air cavity comprises a serpentine channel. 16. The microelectromechanical systems-based calorimetric device of claim 1 , wherein the reference chamber is surrounded by an air cavity. 17. The microelectromechanical systems-based calorimetric device of claim 1 , wherein the reaction chamber comprises a chamber temperature sensor. 18. The microelectromechanical systems-based calorimetric device of claim 17 , wherein the reaction chamber further comprises a heater. 19. The microelectromechanical systems-based calorimetric device of claim 1 , wherein the at least one temperature metric comprises a differential temperature between the reaction chamber and the reference chamber. 20. The microelectromechanical systems-based calorimetric device of claim 1 , wherein the at least one temperature metric comprises a temperature of the reaction chamber and a temperature of the reference chamber.
Serpentine channels · CPC title
Measuring quantity of heat (measuring temperature by calorimetry G01K3/00 - G01K11/00; specially adapted for measuring thermal properties of materials, e.g. specific heat, heat of combustion G01N) · CPC title
using resistive heater · CPC title
concerning the temperature responsive elements (measuring temperature or quantity of heat, thermally-sensitive elements G01K; thermoelectric devices H10N10/00, H10N15/00) · CPC title
Flow chambers · CPC title
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